12/8/2012	8:05:53 AM	Helium valve closed
12/8/2012	8:05:53 AM	H2 valve closed
12/8/2012	8:05:53 AM	BCl3 valve closed
12/8/2012	8:05:53 AM	PH3 valve closed
12/8/2012	8:05:53 AM	SiCl4 pre valve closed
12/8/2012	8:05:53 AM	SiCl4 post valve closed
12/8/2012	8:05:53 AM	Main Vac valve closed
12/8/2012	8:05:53 AM	Bypass valve closed
12/8/2012	8:05:53 AM	Bubbler valve closed
12/8/2012	8:05:53 AM	Helium MFC set to  0.000000
12/8/2012	8:05:53 AM	H2 MFC set to  0.000000
12/8/2012	8:05:53 AM	BCl3 MFC set to  0.000000
12/8/2012	8:05:53 AM	PH3 MFC set to  0.000000
12/8/2012	8:05:53 AM	SiCl4 MFC set to  0.000000
12/8/2012	8:05:53 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	8:05:53 AM	Tube furnace set to 0
12/8/2012	8:05:56 AM	Helium valve closed
12/8/2012	8:05:56 AM	BCl3 valve closed
12/8/2012	8:05:56 AM	PH3 valve closed
12/8/2012	8:05:56 AM	SiCl4 pre valve closed
12/8/2012	8:05:56 AM	SiCl4 post valve closed
12/8/2012	8:05:56 AM	Main Vac valve closed
12/8/2012	8:05:56 AM	Bypass valve closed
12/8/2012	8:05:56 AM	Bubbler valve closed
12/8/2012	8:05:56 AM	H2 valve opened
12/8/2012	8:05:56 AM	Helium MFC set to  0.000000
12/8/2012	8:05:56 AM	H2 MFC set to  500.000000
12/8/2012	8:05:56 AM	BCl3 MFC set to  0.000000
12/8/2012	8:05:56 AM	PH3 MFC set to  0.000000
12/8/2012	8:05:56 AM	SiCl4 MFC set to  0.000000
12/8/2012	8:05:56 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	8:05:56 AM	Tube furnace set to 0
12/8/2012	8:07:09 AM	Helium valve closed
12/8/2012	8:07:09 AM	BCl3 valve closed
12/8/2012	8:07:09 AM	PH3 valve closed
12/8/2012	8:07:09 AM	SiCl4 pre valve closed
12/8/2012	8:07:09 AM	SiCl4 post valve closed
12/8/2012	8:07:09 AM	Main Vac valve closed
12/8/2012	8:07:09 AM	Bypass valve closed
12/8/2012	8:07:09 AM	H2 valve opened
12/8/2012	8:07:09 AM	Bubbler valve opened
12/8/2012	8:07:09 AM	Helium MFC set to  0.000000
12/8/2012	8:07:09 AM	H2 MFC set to  500.000000
12/8/2012	8:07:09 AM	BCl3 MFC set to  0.000000
12/8/2012	8:07:09 AM	PH3 MFC set to  0.000000
12/8/2012	8:07:09 AM	SiCl4 MFC set to  0.000000
12/8/2012	8:07:09 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	8:07:09 AM	Tube furnace set to 0
12/8/2012	8:07:10 AM	Helium valve closed
12/8/2012	8:07:10 AM	BCl3 valve closed
12/8/2012	8:07:10 AM	PH3 valve closed
12/8/2012	8:07:10 AM	SiCl4 pre valve closed
12/8/2012	8:07:10 AM	SiCl4 post valve closed
12/8/2012	8:07:10 AM	Main Vac valve closed
12/8/2012	8:07:10 AM	Bypass valve closed
12/8/2012	8:07:10 AM	H2 valve opened
12/8/2012	8:07:10 AM	Bubbler valve opened
12/8/2012	8:07:10 AM	Helium MFC set to  0.000000
12/8/2012	8:07:10 AM	H2 MFC set to  500.000000
12/8/2012	8:07:10 AM	BCl3 MFC set to  0.000000
12/8/2012	8:07:10 AM	PH3 MFC set to  0.000000
12/8/2012	8:07:10 AM	SiCl4 MFC set to  0.000000
12/8/2012	8:07:10 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	8:07:10 AM	Tube furnace set to 1000
12/8/2012	8:27:10 AM	Helium valve closed
12/8/2012	8:27:10 AM	PH3 valve closed
12/8/2012	8:27:10 AM	Main Vac valve closed
12/8/2012	8:27:10 AM	Bypass valve closed
12/8/2012	8:27:10 AM	H2 valve opened
12/8/2012	8:27:10 AM	BCl3 valve opened
12/8/2012	8:27:10 AM	SiCl4 pre valve opened
12/8/2012	8:27:10 AM	SiCl4 post valve opened
12/8/2012	8:27:10 AM	Bubbler valve opened
12/8/2012	8:27:10 AM	Helium MFC set to  0.000000
12/8/2012	8:27:10 AM	H2 MFC set to  450.000000
12/8/2012	8:27:10 AM	BCl3 MFC set to  1.300000
12/8/2012	8:27:10 AM	PH3 MFC set to  0.000000
12/8/2012	8:27:10 AM	SiCl4 MFC set to  50.000000
12/8/2012	8:27:10 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	8:27:10 AM	Tube furnace set to 1000
12/8/2012	8:47:10 AM	Helium valve closed
12/8/2012	8:47:10 AM	BCl3 valve closed
12/8/2012	8:47:10 AM	PH3 valve closed
12/8/2012	8:47:10 AM	SiCl4 pre valve closed
12/8/2012	8:47:10 AM	SiCl4 post valve closed
12/8/2012	8:47:10 AM	Main Vac valve closed
12/8/2012	8:47:10 AM	Bypass valve closed
12/8/2012	8:47:10 AM	H2 valve opened
12/8/2012	8:47:10 AM	Bubbler valve opened
12/8/2012	8:47:10 AM	Helium MFC set to  0.000000
12/8/2012	8:47:10 AM	H2 MFC set to  500.000000
12/8/2012	8:47:10 AM	BCl3 MFC set to  0.000000
12/8/2012	8:47:10 AM	PH3 MFC set to  0.000000
12/8/2012	8:47:10 AM	SiCl4 MFC set to  0.000000
12/8/2012	8:47:10 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	8:47:10 AM	Tube furnace set to 900
12/8/2012	8:52:10 AM	Helium valve closed
12/8/2012	8:52:10 AM	BCl3 valve closed
12/8/2012	8:52:10 AM	PH3 valve closed
12/8/2012	8:52:10 AM	SiCl4 pre valve closed
12/8/2012	8:52:10 AM	SiCl4 post valve closed
12/8/2012	8:52:10 AM	Main Vac valve closed
12/8/2012	8:52:10 AM	Bypass valve closed
12/8/2012	8:52:10 AM	H2 valve opened
12/8/2012	8:52:10 AM	Bubbler valve opened
12/8/2012	8:52:10 AM	Helium MFC set to  0.000000
12/8/2012	8:52:10 AM	H2 MFC set to  500.000000
12/8/2012	8:52:10 AM	BCl3 MFC set to  0.000000
12/8/2012	8:52:10 AM	PH3 MFC set to  0.000000
12/8/2012	8:52:10 AM	SiCl4 MFC set to  0.000000
12/8/2012	8:52:10 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	8:52:11 AM	Tube furnace set to 800
12/8/2012	8:57:11 AM	Helium valve closed
12/8/2012	8:57:11 AM	BCl3 valve closed
12/8/2012	8:57:11 AM	PH3 valve closed
12/8/2012	8:57:11 AM	SiCl4 pre valve closed
12/8/2012	8:57:11 AM	SiCl4 post valve closed
12/8/2012	8:57:11 AM	Main Vac valve closed
12/8/2012	8:57:11 AM	Bypass valve closed
12/8/2012	8:57:11 AM	H2 valve opened
12/8/2012	8:57:11 AM	Bubbler valve opened
12/8/2012	8:57:11 AM	Helium MFC set to  0.000000
12/8/2012	8:57:11 AM	H2 MFC set to  500.000000
12/8/2012	8:57:11 AM	BCl3 MFC set to  0.000000
12/8/2012	8:57:11 AM	PH3 MFC set to  0.000000
12/8/2012	8:57:11 AM	SiCl4 MFC set to  0.000000
12/8/2012	8:57:11 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	8:57:11 AM	Tube furnace set to 700
12/8/2012	9:02:11 AM	Helium valve closed
12/8/2012	9:02:11 AM	BCl3 valve closed
12/8/2012	9:02:11 AM	PH3 valve closed
12/8/2012	9:02:11 AM	SiCl4 pre valve closed
12/8/2012	9:02:11 AM	SiCl4 post valve closed
12/8/2012	9:02:11 AM	Main Vac valve closed
12/8/2012	9:02:11 AM	Bypass valve closed
12/8/2012	9:02:11 AM	H2 valve opened
12/8/2012	9:02:11 AM	Bubbler valve opened
12/8/2012	9:02:11 AM	Helium MFC set to  0.000000
12/8/2012	9:02:11 AM	H2 MFC set to  500.000000
12/8/2012	9:02:11 AM	BCl3 MFC set to  0.000000
12/8/2012	9:02:11 AM	PH3 MFC set to  0.000000
12/8/2012	9:02:11 AM	SiCl4 MFC set to  0.000000
12/8/2012	9:02:11 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:02:11 AM	Tube furnace set to 600
12/8/2012	9:07:11 AM	H2 valve closed
12/8/2012	9:07:11 AM	BCl3 valve closed
12/8/2012	9:07:11 AM	PH3 valve closed
12/8/2012	9:07:11 AM	SiCl4 pre valve closed
12/8/2012	9:07:11 AM	SiCl4 post valve closed
12/8/2012	9:07:11 AM	Main Vac valve closed
12/8/2012	9:07:11 AM	Bypass valve closed
12/8/2012	9:07:11 AM	Helium valve opened
12/8/2012	9:07:11 AM	Bubbler valve opened
12/8/2012	9:07:11 AM	Helium MFC set to  500.000000
12/8/2012	9:07:11 AM	H2 MFC set to  0.000000
12/8/2012	9:07:11 AM	BCl3 MFC set to  0.000000
12/8/2012	9:07:11 AM	PH3 MFC set to  0.000000
12/8/2012	9:07:11 AM	SiCl4 MFC set to  0.000000
12/8/2012	9:07:11 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:07:11 AM	Tube furnace set to 0
12/8/2012	9:27:11 AM	Helium valve closed
12/8/2012	9:27:11 AM	H2 valve closed
12/8/2012	9:27:11 AM	BCl3 valve closed
12/8/2012	9:27:11 AM	PH3 valve closed
12/8/2012	9:27:11 AM	SiCl4 pre valve closed
12/8/2012	9:27:11 AM	SiCl4 post valve closed
12/8/2012	9:27:11 AM	Main Vac valve closed
12/8/2012	9:27:11 AM	Bypass valve closed
12/8/2012	9:27:11 AM	Bubbler valve closed
12/8/2012	9:27:11 AM	Helium MFC set to  0.000000
12/8/2012	9:27:11 AM	H2 MFC set to  0.000000
12/8/2012	9:27:11 AM	BCl3 MFC set to  0.000000
12/8/2012	9:27:11 AM	PH3 MFC set to  0.000000
12/8/2012	9:27:11 AM	SiCl4 MFC set to  0.000000
12/8/2012	9:27:11 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:27:11 AM	Tube furnace set to 0
12/8/2012	9:54:02 AM	Run aborted at 9:54 AM
12/8/2012	9:54:02 AM	Helium valve closed
12/8/2012	9:54:02 AM	H2 valve closed
12/8/2012	9:54:02 AM	BCl3 valve closed
12/8/2012	9:54:02 AM	PH3 valve closed
12/8/2012	9:54:02 AM	SiCl4 pre valve closed
12/8/2012	9:54:02 AM	SiCl4 post valve closed
12/8/2012	9:54:02 AM	Bypass valve closed
12/8/2012	9:54:02 AM	Main Vac valve closed
12/8/2012	9:54:02 AM	Bubbler valve closed
12/8/2012	9:54:02 AM	Helium MFC set to  0.000000
12/8/2012	9:54:02 AM	H2 MFC set to  0.000000
12/8/2012	9:54:02 AM	BCl3 MFC set to  0.000000
12/8/2012	9:54:02 AM	PH3 MFC set to  0.000000
12/8/2012	9:54:02 AM	SiCl4 MFC set to  0.000000
12/8/2012	9:54:02 AM	Tube furnace set to 0
12/8/2012	9:54:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2012	9:54:06 AM	Recipe started at 9:54 AM
12/8/2012	9:54:07 AM	Helium valve closed
12/8/2012	9:54:07 AM	H2 valve closed
12/8/2012	9:54:07 AM	BCl3 valve closed
12/8/2012	9:54:07 AM	PH3 valve closed
12/8/2012	9:54:07 AM	SiCl4 pre valve closed
12/8/2012	9:54:07 AM	SiCl4 post valve closed
12/8/2012	9:54:07 AM	Main Vac valve closed
12/8/2012	9:54:07 AM	Bypass valve closed
12/8/2012	9:54:07 AM	Bubbler valve closed
12/8/2012	9:54:07 AM	Helium MFC set to  0.000000
12/8/2012	9:54:07 AM	H2 MFC set to  0.000000
12/8/2012	9:54:07 AM	BCl3 MFC set to  0.000000
12/8/2012	9:54:07 AM	PH3 MFC set to  0.000000
12/8/2012	9:54:07 AM	SiCl4 MFC set to  0.000000
12/8/2012	9:54:07 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:54:07 AM	Tube furnace set to 0
12/8/2012	9:54:10 AM	H2 valve closed
12/8/2012	9:54:10 AM	BCl3 valve closed
12/8/2012	9:54:10 AM	PH3 valve closed
12/8/2012	9:54:10 AM	SiCl4 pre valve closed
12/8/2012	9:54:10 AM	SiCl4 post valve closed
12/8/2012	9:54:10 AM	Main Vac valve closed
12/8/2012	9:54:10 AM	Bypass valve closed
12/8/2012	9:54:10 AM	Bubbler valve closed
12/8/2012	9:54:10 AM	Helium valve opened
12/8/2012	9:54:10 AM	Helium MFC set to  500.000000
12/8/2012	9:54:10 AM	H2 MFC set to  0.000000
12/8/2012	9:54:10 AM	BCl3 MFC set to  0.000000
12/8/2012	9:54:10 AM	PH3 MFC set to  0.000000
12/8/2012	9:54:10 AM	SiCl4 MFC set to  0.000000
12/8/2012	9:54:10 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:54:10 AM	Tube furnace set to 0
12/8/2012	9:54:11 AM	Helium valve closed
12/8/2012	9:54:11 AM	H2 valve closed
12/8/2012	9:54:11 AM	BCl3 valve closed
12/8/2012	9:54:11 AM	PH3 valve closed
12/8/2012	9:54:11 AM	SiCl4 pre valve closed
12/8/2012	9:54:11 AM	SiCl4 post valve closed
12/8/2012	9:54:11 AM	Main Vac valve closed
12/8/2012	9:54:11 AM	Bypass valve closed
12/8/2012	9:54:11 AM	Bubbler valve closed
12/8/2012	9:54:11 AM	Helium MFC set to  0.000000
12/8/2012	9:54:11 AM	H2 MFC set to  0.000000
12/8/2012	9:54:11 AM	BCl3 MFC set to  0.000000
12/8/2012	9:54:11 AM	PH3 MFC set to  0.000000
12/8/2012	9:54:11 AM	SiCl4 MFC set to  0.000000
12/8/2012	9:54:11 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:54:11 AM	Tube furnace set to 0
12/8/2012	9:54:12 AM	Run finished at 9:54 AM
12/8/2012	9:54:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2012	9:56:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2012	9:56:58 AM	Recipe started at 9:56 AM
12/8/2012	9:56:58 AM	Helium valve closed
12/8/2012	9:56:58 AM	H2 valve closed
12/8/2012	9:56:58 AM	BCl3 valve closed
12/8/2012	9:56:58 AM	PH3 valve closed
12/8/2012	9:56:58 AM	SiCl4 pre valve closed
12/8/2012	9:56:58 AM	SiCl4 post valve closed
12/8/2012	9:56:58 AM	Main Vac valve closed
12/8/2012	9:56:58 AM	Bubbler valve closed
12/8/2012	9:56:58 AM	Bypass valve opened
12/8/2012	9:56:58 AM	Helium MFC set to  0.000000
12/8/2012	9:56:58 AM	H2 MFC set to  0.000000
12/8/2012	9:56:58 AM	BCl3 MFC set to  0.000000
12/8/2012	9:56:58 AM	PH3 MFC set to  0.000000
12/8/2012	9:56:58 AM	SiCl4 MFC set to  0.000000
12/8/2012	9:56:58 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:56:58 AM	Tube furnace set to 0
12/8/2012	9:58:16 AM	Helium valve closed
12/8/2012	9:58:16 AM	H2 valve closed
12/8/2012	9:58:16 AM	BCl3 valve closed
12/8/2012	9:58:16 AM	PH3 valve closed
12/8/2012	9:58:16 AM	SiCl4 pre valve closed
12/8/2012	9:58:16 AM	SiCl4 post valve closed
12/8/2012	9:58:16 AM	Main Vac valve closed
12/8/2012	9:58:16 AM	Bubbler valve closed
12/8/2012	9:58:16 AM	Bypass valve opened
12/8/2012	9:58:16 AM	Helium MFC set to  0.000000
12/8/2012	9:58:16 AM	H2 MFC set to  0.000000
12/8/2012	9:58:16 AM	BCl3 MFC set to  0.000000
12/8/2012	9:58:16 AM	PH3 MFC set to  0.000000
12/8/2012	9:58:16 AM	SiCl4 MFC set to  0.000000
12/8/2012	9:58:16 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:58:16 AM	Tube furnace set to 0
12/8/2012	9:59:16 AM	Helium valve closed
12/8/2012	9:59:16 AM	H2 valve closed
12/8/2012	9:59:16 AM	BCl3 valve closed
12/8/2012	9:59:16 AM	PH3 valve closed
12/8/2012	9:59:16 AM	SiCl4 pre valve closed
12/8/2012	9:59:16 AM	SiCl4 post valve closed
12/8/2012	9:59:16 AM	Bypass valve closed
12/8/2012	9:59:16 AM	Bubbler valve closed
12/8/2012	9:59:16 AM	Main Vac valve opened
12/8/2012	9:59:16 AM	Helium MFC set to  0.000000
12/8/2012	9:59:16 AM	H2 MFC set to  0.000000
12/8/2012	9:59:16 AM	BCl3 MFC set to  0.000000
12/8/2012	9:59:16 AM	PH3 MFC set to  0.000000
12/8/2012	9:59:16 AM	SiCl4 MFC set to  0.000000
12/8/2012	9:59:16 AM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:59:16 AM	Tube furnace set to 0
12/8/2012	9:59:17 AM	Run finished at 9:59 AM
12/8/2012	9:59:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2012	12:49:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2012	12:49:49 PM	Recipe started at 12:49 PM
12/8/2012	12:49:49 PM	Helium valve closed
12/8/2012	12:49:49 PM	H2 valve closed
12/8/2012	12:49:49 PM	BCl3 valve closed
12/8/2012	12:49:49 PM	PH3 valve closed
12/8/2012	12:49:49 PM	SiCl4 pre valve closed
12/8/2012	12:49:49 PM	SiCl4 post valve closed
12/8/2012	12:49:49 PM	Main Vac valve closed
12/8/2012	12:49:49 PM	Bypass valve closed
12/8/2012	12:49:49 PM	Bubbler valve closed
12/8/2012	12:49:49 PM	Helium MFC set to  0.000000
12/8/2012	12:49:49 PM	H2 MFC set to  0.000000
12/8/2012	12:49:49 PM	BCl3 MFC set to  0.000000
12/8/2012	12:49:49 PM	PH3 MFC set to  0.000000
12/8/2012	12:49:49 PM	SiCl4 MFC set to  0.000000
12/8/2012	12:49:49 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	12:49:50 PM	Tube furnace set to 0
12/8/2012	12:49:53 PM	H2 valve closed
12/8/2012	12:49:53 PM	BCl3 valve closed
12/8/2012	12:49:53 PM	PH3 valve closed
12/8/2012	12:49:53 PM	SiCl4 pre valve closed
12/8/2012	12:49:53 PM	SiCl4 post valve closed
12/8/2012	12:49:53 PM	Main Vac valve closed
12/8/2012	12:49:53 PM	Bypass valve closed
12/8/2012	12:49:53 PM	Bubbler valve closed
12/8/2012	12:49:53 PM	Helium valve opened
12/8/2012	12:49:53 PM	Helium MFC set to  500.000000
12/8/2012	12:49:53 PM	H2 MFC set to  0.000000
12/8/2012	12:49:53 PM	BCl3 MFC set to  0.000000
12/8/2012	12:49:53 PM	PH3 MFC set to  0.000000
12/8/2012	12:49:53 PM	SiCl4 MFC set to  0.000000
12/8/2012	12:49:53 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	12:49:53 PM	Tube furnace set to 0
12/8/2012	12:51:06 PM	Helium valve closed
12/8/2012	12:51:06 PM	H2 valve closed
12/8/2012	12:51:06 PM	BCl3 valve closed
12/8/2012	12:51:06 PM	PH3 valve closed
12/8/2012	12:51:06 PM	SiCl4 pre valve closed
12/8/2012	12:51:06 PM	SiCl4 post valve closed
12/8/2012	12:51:06 PM	Main Vac valve closed
12/8/2012	12:51:06 PM	Bypass valve closed
12/8/2012	12:51:06 PM	Bubbler valve closed
12/8/2012	12:51:06 PM	Helium MFC set to  0.000000
12/8/2012	12:51:06 PM	H2 MFC set to  0.000000
12/8/2012	12:51:06 PM	BCl3 MFC set to  0.000000
12/8/2012	12:51:06 PM	PH3 MFC set to  0.000000
12/8/2012	12:51:06 PM	SiCl4 MFC set to  0.000000
12/8/2012	12:51:06 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	12:51:06 PM	Tube furnace set to 0
12/8/2012	12:51:07 PM	Run finished at 12:51 PM
12/8/2012	12:51:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2012	12:58:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2012	12:58:48 PM	Recipe started at 12:58 PM
12/8/2012	12:58:48 PM	Helium valve closed
12/8/2012	12:58:48 PM	H2 valve closed
12/8/2012	12:58:48 PM	BCl3 valve closed
12/8/2012	12:58:48 PM	PH3 valve closed
12/8/2012	12:58:48 PM	SiCl4 pre valve closed
12/8/2012	12:58:48 PM	SiCl4 post valve closed
12/8/2012	12:58:48 PM	Main Vac valve closed
12/8/2012	12:58:48 PM	Bubbler valve closed
12/8/2012	12:58:48 PM	Bypass valve opened
12/8/2012	12:58:48 PM	Helium MFC set to  0.000000
12/8/2012	12:58:48 PM	H2 MFC set to  0.000000
12/8/2012	12:58:48 PM	BCl3 MFC set to  0.000000
12/8/2012	12:58:48 PM	PH3 MFC set to  0.000000
12/8/2012	12:58:48 PM	SiCl4 MFC set to  0.000000
12/8/2012	12:58:48 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	12:58:48 PM	Tube furnace set to 0
12/8/2012	1:00:26 PM	Helium valve closed
12/8/2012	1:00:26 PM	H2 valve closed
12/8/2012	1:00:26 PM	BCl3 valve closed
12/8/2012	1:00:26 PM	PH3 valve closed
12/8/2012	1:00:26 PM	SiCl4 pre valve closed
12/8/2012	1:00:26 PM	SiCl4 post valve closed
12/8/2012	1:00:26 PM	Main Vac valve closed
12/8/2012	1:00:26 PM	Bubbler valve closed
12/8/2012	1:00:26 PM	Bypass valve opened
12/8/2012	1:00:26 PM	Helium MFC set to  0.000000
12/8/2012	1:00:26 PM	H2 MFC set to  0.000000
12/8/2012	1:00:26 PM	BCl3 MFC set to  0.000000
12/8/2012	1:00:26 PM	PH3 MFC set to  0.000000
12/8/2012	1:00:26 PM	SiCl4 MFC set to  0.000000
12/8/2012	1:00:26 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	1:00:27 PM	Tube furnace set to 0
12/8/2012	1:01:27 PM	Helium valve closed
12/8/2012	1:01:27 PM	H2 valve closed
12/8/2012	1:01:27 PM	BCl3 valve closed
12/8/2012	1:01:27 PM	PH3 valve closed
12/8/2012	1:01:27 PM	SiCl4 pre valve closed
12/8/2012	1:01:27 PM	SiCl4 post valve closed
12/8/2012	1:01:27 PM	Bypass valve closed
12/8/2012	1:01:27 PM	Bubbler valve closed
12/8/2012	1:01:27 PM	Main Vac valve opened
12/8/2012	1:01:27 PM	Helium MFC set to  0.000000
12/8/2012	1:01:27 PM	H2 MFC set to  0.000000
12/8/2012	1:01:27 PM	BCl3 MFC set to  0.000000
12/8/2012	1:01:27 PM	PH3 MFC set to  0.000000
12/8/2012	1:01:27 PM	SiCl4 MFC set to  0.000000
12/8/2012	1:01:27 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	1:01:27 PM	Tube furnace set to 0
12/8/2012	1:01:28 PM	Run finished at 1:01 PM
12/8/2012	1:01:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2012	1:03:25 PM	Recipe started at 1:03 PM
12/8/2012	1:03:25 PM	Helium valve closed
12/8/2012	1:03:25 PM	H2 valve closed
12/8/2012	1:03:25 PM	BCl3 valve closed
12/8/2012	1:03:25 PM	PH3 valve closed
12/8/2012	1:03:25 PM	SiCl4 pre valve closed
12/8/2012	1:03:25 PM	SiCl4 post valve closed
12/8/2012	1:03:25 PM	Bypass valve closed
12/8/2012	1:03:25 PM	Bubbler valve closed
12/8/2012	1:03:25 PM	Main Vac valve opened
12/8/2012	1:03:25 PM	Helium MFC set to  0.000000
12/8/2012	1:03:25 PM	H2 MFC set to  0.000000
12/8/2012	1:03:25 PM	BCl3 MFC set to  0.000000
12/8/2012	1:03:25 PM	PH3 MFC set to  0.000000
12/8/2012	1:03:25 PM	SiCl4 MFC set to  0.000000
12/8/2012	1:03:25 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	1:03:25 PM	Tube furnace set to 150
12/8/2012	2:44:53 PM	H2 valve closed
12/8/2012	2:44:53 PM	BCl3 valve closed
12/8/2012	2:44:53 PM	PH3 valve closed
12/8/2012	2:44:53 PM	SiCl4 pre valve closed
12/8/2012	2:44:53 PM	SiCl4 post valve closed
12/8/2012	2:44:53 PM	Bypass valve closed
12/8/2012	2:44:53 PM	Bubbler valve closed
12/8/2012	2:44:53 PM	Helium valve opened
12/8/2012	2:44:53 PM	Main Vac valve opened
12/8/2012	2:44:53 PM	Helium MFC set to  20.000000
12/8/2012	2:44:53 PM	H2 MFC set to  0.000000
12/8/2012	2:44:53 PM	BCl3 MFC set to  0.000000
12/8/2012	2:44:53 PM	PH3 MFC set to  0.000000
12/8/2012	2:44:53 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:44:53 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:44:53 PM	Tube furnace set to 150
12/8/2012	2:45:23 PM	Helium valve closed
12/8/2012	2:45:23 PM	H2 valve closed
12/8/2012	2:45:23 PM	BCl3 valve closed
12/8/2012	2:45:23 PM	PH3 valve closed
12/8/2012	2:45:23 PM	SiCl4 pre valve closed
12/8/2012	2:45:23 PM	SiCl4 post valve closed
12/8/2012	2:45:23 PM	Bypass valve closed
12/8/2012	2:45:23 PM	Bubbler valve closed
12/8/2012	2:45:23 PM	Main Vac valve opened
12/8/2012	2:45:23 PM	Helium MFC set to  0.000000
12/8/2012	2:45:23 PM	H2 MFC set to  0.000000
12/8/2012	2:45:23 PM	BCl3 MFC set to  0.000000
12/8/2012	2:45:23 PM	PH3 MFC set to  0.000000
12/8/2012	2:45:23 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:45:23 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:45:24 PM	Tube furnace set to 150
12/8/2012	2:45:54 PM	H2 valve closed
12/8/2012	2:45:54 PM	BCl3 valve closed
12/8/2012	2:45:54 PM	PH3 valve closed
12/8/2012	2:45:54 PM	SiCl4 pre valve closed
12/8/2012	2:45:54 PM	SiCl4 post valve closed
12/8/2012	2:45:54 PM	Bypass valve closed
12/8/2012	2:45:54 PM	Bubbler valve closed
12/8/2012	2:45:54 PM	Helium valve opened
12/8/2012	2:45:54 PM	Main Vac valve opened
12/8/2012	2:45:54 PM	Helium MFC set to  20.000000
12/8/2012	2:45:54 PM	H2 MFC set to  0.000000
12/8/2012	2:45:54 PM	BCl3 MFC set to  0.000000
12/8/2012	2:45:54 PM	PH3 MFC set to  0.000000
12/8/2012	2:45:54 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:45:54 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:45:54 PM	Tube furnace set to 150
12/8/2012	2:46:24 PM	Helium valve closed
12/8/2012	2:46:24 PM	H2 valve closed
12/8/2012	2:46:24 PM	BCl3 valve closed
12/8/2012	2:46:24 PM	PH3 valve closed
12/8/2012	2:46:24 PM	SiCl4 pre valve closed
12/8/2012	2:46:24 PM	SiCl4 post valve closed
12/8/2012	2:46:24 PM	Bypass valve closed
12/8/2012	2:46:24 PM	Bubbler valve closed
12/8/2012	2:46:24 PM	Main Vac valve opened
12/8/2012	2:46:24 PM	Helium MFC set to  0.000000
12/8/2012	2:46:24 PM	H2 MFC set to  0.000000
12/8/2012	2:46:24 PM	BCl3 MFC set to  0.000000
12/8/2012	2:46:24 PM	PH3 MFC set to  0.000000
12/8/2012	2:46:24 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:46:24 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:46:24 PM	Tube furnace set to 150
12/8/2012	2:46:54 PM	H2 valve closed
12/8/2012	2:46:54 PM	BCl3 valve closed
12/8/2012	2:46:54 PM	PH3 valve closed
12/8/2012	2:46:54 PM	SiCl4 pre valve closed
12/8/2012	2:46:54 PM	SiCl4 post valve closed
12/8/2012	2:46:54 PM	Bypass valve closed
12/8/2012	2:46:54 PM	Bubbler valve closed
12/8/2012	2:46:54 PM	Helium valve opened
12/8/2012	2:46:54 PM	Main Vac valve opened
12/8/2012	2:46:54 PM	Helium MFC set to  20.000000
12/8/2012	2:46:54 PM	H2 MFC set to  0.000000
12/8/2012	2:46:54 PM	BCl3 MFC set to  0.000000
12/8/2012	2:46:54 PM	PH3 MFC set to  0.000000
12/8/2012	2:46:54 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:46:54 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:46:54 PM	Tube furnace set to 150
12/8/2012	2:47:24 PM	Helium valve closed
12/8/2012	2:47:24 PM	H2 valve closed
12/8/2012	2:47:24 PM	BCl3 valve closed
12/8/2012	2:47:24 PM	PH3 valve closed
12/8/2012	2:47:24 PM	SiCl4 pre valve closed
12/8/2012	2:47:24 PM	SiCl4 post valve closed
12/8/2012	2:47:24 PM	Bypass valve closed
12/8/2012	2:47:24 PM	Bubbler valve closed
12/8/2012	2:47:24 PM	Main Vac valve opened
12/8/2012	2:47:24 PM	Helium MFC set to  0.000000
12/8/2012	2:47:24 PM	H2 MFC set to  0.000000
12/8/2012	2:47:24 PM	BCl3 MFC set to  0.000000
12/8/2012	2:47:24 PM	PH3 MFC set to  0.000000
12/8/2012	2:47:24 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:47:24 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:47:25 PM	Tube furnace set to 150
12/8/2012	2:47:55 PM	H2 valve closed
12/8/2012	2:47:55 PM	BCl3 valve closed
12/8/2012	2:47:55 PM	PH3 valve closed
12/8/2012	2:47:55 PM	SiCl4 pre valve closed
12/8/2012	2:47:55 PM	SiCl4 post valve closed
12/8/2012	2:47:55 PM	Bypass valve closed
12/8/2012	2:47:55 PM	Bubbler valve closed
12/8/2012	2:47:55 PM	Helium valve opened
12/8/2012	2:47:55 PM	Main Vac valve opened
12/8/2012	2:47:55 PM	Helium MFC set to  20.000000
12/8/2012	2:47:55 PM	H2 MFC set to  0.000000
12/8/2012	2:47:55 PM	BCl3 MFC set to  0.000000
12/8/2012	2:47:55 PM	PH3 MFC set to  0.000000
12/8/2012	2:47:55 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:47:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:47:55 PM	Tube furnace set to 150
12/8/2012	2:48:25 PM	Helium valve closed
12/8/2012	2:48:25 PM	H2 valve closed
12/8/2012	2:48:25 PM	BCl3 valve closed
12/8/2012	2:48:25 PM	PH3 valve closed
12/8/2012	2:48:25 PM	SiCl4 pre valve closed
12/8/2012	2:48:25 PM	SiCl4 post valve closed
12/8/2012	2:48:25 PM	Bypass valve closed
12/8/2012	2:48:25 PM	Bubbler valve closed
12/8/2012	2:48:25 PM	Main Vac valve opened
12/8/2012	2:48:25 PM	Helium MFC set to  0.000000
12/8/2012	2:48:25 PM	H2 MFC set to  0.000000
12/8/2012	2:48:25 PM	BCl3 MFC set to  0.000000
12/8/2012	2:48:25 PM	PH3 MFC set to  0.000000
12/8/2012	2:48:25 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:48:25 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:48:25 PM	Tube furnace set to 150
12/8/2012	2:48:55 PM	H2 valve closed
12/8/2012	2:48:55 PM	BCl3 valve closed
12/8/2012	2:48:55 PM	PH3 valve closed
12/8/2012	2:48:55 PM	SiCl4 pre valve closed
12/8/2012	2:48:55 PM	SiCl4 post valve closed
12/8/2012	2:48:55 PM	Bypass valve closed
12/8/2012	2:48:55 PM	Bubbler valve closed
12/8/2012	2:48:55 PM	Helium valve opened
12/8/2012	2:48:55 PM	Main Vac valve opened
12/8/2012	2:48:55 PM	Helium MFC set to  20.000000
12/8/2012	2:48:55 PM	H2 MFC set to  0.000000
12/8/2012	2:48:55 PM	BCl3 MFC set to  0.000000
12/8/2012	2:48:55 PM	PH3 MFC set to  0.000000
12/8/2012	2:48:55 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:48:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:48:55 PM	Tube furnace set to 150
12/8/2012	2:49:25 PM	Helium valve closed
12/8/2012	2:49:25 PM	H2 valve closed
12/8/2012	2:49:25 PM	BCl3 valve closed
12/8/2012	2:49:25 PM	PH3 valve closed
12/8/2012	2:49:25 PM	SiCl4 pre valve closed
12/8/2012	2:49:25 PM	SiCl4 post valve closed
12/8/2012	2:49:25 PM	Bypass valve closed
12/8/2012	2:49:25 PM	Bubbler valve closed
12/8/2012	2:49:25 PM	Main Vac valve opened
12/8/2012	2:49:25 PM	Helium MFC set to  0.000000
12/8/2012	2:49:25 PM	H2 MFC set to  0.000000
12/8/2012	2:49:25 PM	BCl3 MFC set to  0.000000
12/8/2012	2:49:25 PM	PH3 MFC set to  0.000000
12/8/2012	2:49:25 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:49:25 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:49:26 PM	Tube furnace set to 150
12/8/2012	2:49:56 PM	H2 valve closed
12/8/2012	2:49:56 PM	BCl3 valve closed
12/8/2012	2:49:56 PM	PH3 valve closed
12/8/2012	2:49:56 PM	SiCl4 pre valve closed
12/8/2012	2:49:56 PM	SiCl4 post valve closed
12/8/2012	2:49:56 PM	Bypass valve closed
12/8/2012	2:49:56 PM	Bubbler valve closed
12/8/2012	2:49:56 PM	Helium valve opened
12/8/2012	2:49:56 PM	Main Vac valve opened
12/8/2012	2:49:56 PM	Helium MFC set to  20.000000
12/8/2012	2:49:56 PM	H2 MFC set to  0.000000
12/8/2012	2:49:56 PM	BCl3 MFC set to  0.000000
12/8/2012	2:49:56 PM	PH3 MFC set to  0.000000
12/8/2012	2:49:56 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:49:56 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:49:56 PM	Tube furnace set to 150
12/8/2012	2:50:26 PM	Helium valve closed
12/8/2012	2:50:26 PM	H2 valve closed
12/8/2012	2:50:26 PM	BCl3 valve closed
12/8/2012	2:50:26 PM	PH3 valve closed
12/8/2012	2:50:26 PM	SiCl4 pre valve closed
12/8/2012	2:50:26 PM	SiCl4 post valve closed
12/8/2012	2:50:26 PM	Bypass valve closed
12/8/2012	2:50:26 PM	Bubbler valve closed
12/8/2012	2:50:26 PM	Main Vac valve opened
12/8/2012	2:50:26 PM	Helium MFC set to  0.000000
12/8/2012	2:50:26 PM	H2 MFC set to  0.000000
12/8/2012	2:50:26 PM	BCl3 MFC set to  0.000000
12/8/2012	2:50:26 PM	PH3 MFC set to  0.000000
12/8/2012	2:50:26 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:50:26 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:50:26 PM	Tube furnace set to 150
12/8/2012	2:50:56 PM	H2 valve closed
12/8/2012	2:50:56 PM	BCl3 valve closed
12/8/2012	2:50:56 PM	PH3 valve closed
12/8/2012	2:50:56 PM	SiCl4 pre valve closed
12/8/2012	2:50:56 PM	SiCl4 post valve closed
12/8/2012	2:50:56 PM	Bypass valve closed
12/8/2012	2:50:56 PM	Bubbler valve closed
12/8/2012	2:50:56 PM	Helium valve opened
12/8/2012	2:50:56 PM	Main Vac valve opened
12/8/2012	2:50:56 PM	Helium MFC set to  20.000000
12/8/2012	2:50:56 PM	H2 MFC set to  0.000000
12/8/2012	2:50:56 PM	BCl3 MFC set to  0.000000
12/8/2012	2:50:56 PM	PH3 MFC set to  0.000000
12/8/2012	2:50:56 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:50:56 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:50:56 PM	Tube furnace set to 150
12/8/2012	2:51:26 PM	Helium valve closed
12/8/2012	2:51:26 PM	H2 valve closed
12/8/2012	2:51:26 PM	BCl3 valve closed
12/8/2012	2:51:26 PM	PH3 valve closed
12/8/2012	2:51:26 PM	SiCl4 pre valve closed
12/8/2012	2:51:26 PM	SiCl4 post valve closed
12/8/2012	2:51:26 PM	Bypass valve closed
12/8/2012	2:51:26 PM	Bubbler valve closed
12/8/2012	2:51:26 PM	Main Vac valve opened
12/8/2012	2:51:26 PM	Helium MFC set to  0.000000
12/8/2012	2:51:26 PM	H2 MFC set to  0.000000
12/8/2012	2:51:26 PM	BCl3 MFC set to  0.000000
12/8/2012	2:51:26 PM	PH3 MFC set to  0.000000
12/8/2012	2:51:26 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:51:26 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:51:27 PM	Tube furnace set to 150
12/8/2012	2:51:57 PM	H2 valve closed
12/8/2012	2:51:57 PM	BCl3 valve closed
12/8/2012	2:51:57 PM	PH3 valve closed
12/8/2012	2:51:57 PM	SiCl4 pre valve closed
12/8/2012	2:51:57 PM	SiCl4 post valve closed
12/8/2012	2:51:57 PM	Bypass valve closed
12/8/2012	2:51:57 PM	Bubbler valve closed
12/8/2012	2:51:57 PM	Helium valve opened
12/8/2012	2:51:57 PM	Main Vac valve opened
12/8/2012	2:51:57 PM	Helium MFC set to  20.000000
12/8/2012	2:51:57 PM	H2 MFC set to  0.000000
12/8/2012	2:51:57 PM	BCl3 MFC set to  0.000000
12/8/2012	2:51:57 PM	PH3 MFC set to  0.000000
12/8/2012	2:51:57 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:51:57 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:51:57 PM	Tube furnace set to 150
12/8/2012	2:52:27 PM	Helium valve closed
12/8/2012	2:52:27 PM	H2 valve closed
12/8/2012	2:52:27 PM	BCl3 valve closed
12/8/2012	2:52:27 PM	PH3 valve closed
12/8/2012	2:52:27 PM	SiCl4 pre valve closed
12/8/2012	2:52:27 PM	SiCl4 post valve closed
12/8/2012	2:52:27 PM	Bypass valve closed
12/8/2012	2:52:27 PM	Bubbler valve closed
12/8/2012	2:52:27 PM	Main Vac valve opened
12/8/2012	2:52:27 PM	Helium MFC set to  0.000000
12/8/2012	2:52:27 PM	H2 MFC set to  0.000000
12/8/2012	2:52:27 PM	BCl3 MFC set to  0.000000
12/8/2012	2:52:27 PM	PH3 MFC set to  0.000000
12/8/2012	2:52:27 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:52:27 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:52:27 PM	Tube furnace set to 150
12/8/2012	2:52:57 PM	H2 valve closed
12/8/2012	2:52:57 PM	BCl3 valve closed
12/8/2012	2:52:57 PM	PH3 valve closed
12/8/2012	2:52:57 PM	SiCl4 pre valve closed
12/8/2012	2:52:57 PM	SiCl4 post valve closed
12/8/2012	2:52:57 PM	Bypass valve closed
12/8/2012	2:52:57 PM	Bubbler valve closed
12/8/2012	2:52:57 PM	Helium valve opened
12/8/2012	2:52:57 PM	Main Vac valve opened
12/8/2012	2:52:57 PM	Helium MFC set to  20.000000
12/8/2012	2:52:57 PM	H2 MFC set to  0.000000
12/8/2012	2:52:57 PM	BCl3 MFC set to  0.000000
12/8/2012	2:52:57 PM	PH3 MFC set to  0.000000
12/8/2012	2:52:57 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:52:57 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:52:57 PM	Tube furnace set to 150
12/8/2012	2:53:27 PM	Helium valve closed
12/8/2012	2:53:27 PM	H2 valve closed
12/8/2012	2:53:27 PM	BCl3 valve closed
12/8/2012	2:53:27 PM	PH3 valve closed
12/8/2012	2:53:27 PM	SiCl4 pre valve closed
12/8/2012	2:53:27 PM	SiCl4 post valve closed
12/8/2012	2:53:27 PM	Bypass valve closed
12/8/2012	2:53:27 PM	Bubbler valve closed
12/8/2012	2:53:27 PM	Main Vac valve opened
12/8/2012	2:53:27 PM	Helium MFC set to  0.000000
12/8/2012	2:53:27 PM	H2 MFC set to  0.000000
12/8/2012	2:53:27 PM	BCl3 MFC set to  0.000000
12/8/2012	2:53:27 PM	PH3 MFC set to  0.000000
12/8/2012	2:53:27 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:53:27 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:53:28 PM	Tube furnace set to 150
12/8/2012	2:53:58 PM	H2 valve closed
12/8/2012	2:53:58 PM	BCl3 valve closed
12/8/2012	2:53:58 PM	PH3 valve closed
12/8/2012	2:53:58 PM	SiCl4 pre valve closed
12/8/2012	2:53:58 PM	SiCl4 post valve closed
12/8/2012	2:53:58 PM	Bypass valve closed
12/8/2012	2:53:58 PM	Bubbler valve closed
12/8/2012	2:53:58 PM	Helium valve opened
12/8/2012	2:53:58 PM	Main Vac valve opened
12/8/2012	2:53:58 PM	Helium MFC set to  20.000000
12/8/2012	2:53:58 PM	H2 MFC set to  0.000000
12/8/2012	2:53:58 PM	BCl3 MFC set to  0.000000
12/8/2012	2:53:58 PM	PH3 MFC set to  0.000000
12/8/2012	2:53:58 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:53:58 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:53:58 PM	Tube furnace set to 150
12/8/2012	2:54:28 PM	Helium valve closed
12/8/2012	2:54:28 PM	H2 valve closed
12/8/2012	2:54:28 PM	BCl3 valve closed
12/8/2012	2:54:28 PM	PH3 valve closed
12/8/2012	2:54:28 PM	SiCl4 pre valve closed
12/8/2012	2:54:28 PM	SiCl4 post valve closed
12/8/2012	2:54:28 PM	Bypass valve closed
12/8/2012	2:54:28 PM	Bubbler valve closed
12/8/2012	2:54:28 PM	Main Vac valve opened
12/8/2012	2:54:28 PM	Helium MFC set to  0.000000
12/8/2012	2:54:28 PM	H2 MFC set to  0.000000
12/8/2012	2:54:28 PM	BCl3 MFC set to  0.000000
12/8/2012	2:54:28 PM	PH3 MFC set to  0.000000
12/8/2012	2:54:28 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:54:28 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:54:28 PM	Tube furnace set to 150
12/8/2012	2:54:29 PM	Run finished at 2:54 PM
12/8/2012	2:55:13 PM	Recipe started at 2:55 PM
12/8/2012	2:55:13 PM	Helium valve closed
12/8/2012	2:55:13 PM	H2 valve closed
12/8/2012	2:55:13 PM	BCl3 valve closed
12/8/2012	2:55:13 PM	PH3 valve closed
12/8/2012	2:55:13 PM	SiCl4 pre valve closed
12/8/2012	2:55:13 PM	SiCl4 post valve closed
12/8/2012	2:55:13 PM	Bypass valve closed
12/8/2012	2:55:13 PM	Bubbler valve closed
12/8/2012	2:55:13 PM	Main Vac valve opened
12/8/2012	2:55:13 PM	Helium MFC set to  0.000000
12/8/2012	2:55:13 PM	H2 MFC set to  0.000000
12/8/2012	2:55:13 PM	BCl3 MFC set to  0.000000
12/8/2012	2:55:13 PM	PH3 MFC set to  0.000000
12/8/2012	2:55:13 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:55:13 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:55:13 PM	Tube furnace set to 150
12/8/2012	2:55:16 PM	H2 valve closed
12/8/2012	2:55:16 PM	BCl3 valve closed
12/8/2012	2:55:16 PM	PH3 valve closed
12/8/2012	2:55:16 PM	SiCl4 pre valve closed
12/8/2012	2:55:16 PM	SiCl4 post valve closed
12/8/2012	2:55:16 PM	Bypass valve closed
12/8/2012	2:55:16 PM	Bubbler valve closed
12/8/2012	2:55:16 PM	Helium valve opened
12/8/2012	2:55:16 PM	Main Vac valve opened
12/8/2012	2:55:16 PM	Helium MFC set to  20.000000
12/8/2012	2:55:16 PM	H2 MFC set to  0.000000
12/8/2012	2:55:16 PM	BCl3 MFC set to  0.000000
12/8/2012	2:55:16 PM	PH3 MFC set to  0.000000
12/8/2012	2:55:16 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:55:16 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:55:16 PM	Tube furnace set to 150
12/8/2012	2:55:46 PM	Helium valve closed
12/8/2012	2:55:46 PM	H2 valve closed
12/8/2012	2:55:46 PM	BCl3 valve closed
12/8/2012	2:55:46 PM	PH3 valve closed
12/8/2012	2:55:46 PM	SiCl4 pre valve closed
12/8/2012	2:55:46 PM	SiCl4 post valve closed
12/8/2012	2:55:46 PM	Bypass valve closed
12/8/2012	2:55:46 PM	Bubbler valve closed
12/8/2012	2:55:46 PM	Main Vac valve opened
12/8/2012	2:55:46 PM	Helium MFC set to  0.000000
12/8/2012	2:55:46 PM	H2 MFC set to  0.000000
12/8/2012	2:55:46 PM	BCl3 MFC set to  0.000000
12/8/2012	2:55:46 PM	PH3 MFC set to  0.000000
12/8/2012	2:55:46 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:55:46 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:55:47 PM	Tube furnace set to 150
12/8/2012	2:56:17 PM	H2 valve closed
12/8/2012	2:56:17 PM	BCl3 valve closed
12/8/2012	2:56:17 PM	PH3 valve closed
12/8/2012	2:56:17 PM	SiCl4 pre valve closed
12/8/2012	2:56:17 PM	SiCl4 post valve closed
12/8/2012	2:56:17 PM	Bypass valve closed
12/8/2012	2:56:17 PM	Bubbler valve closed
12/8/2012	2:56:17 PM	Helium valve opened
12/8/2012	2:56:17 PM	Main Vac valve opened
12/8/2012	2:56:17 PM	Helium MFC set to  20.000000
12/8/2012	2:56:17 PM	H2 MFC set to  0.000000
12/8/2012	2:56:17 PM	BCl3 MFC set to  0.000000
12/8/2012	2:56:17 PM	PH3 MFC set to  0.000000
12/8/2012	2:56:17 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:56:17 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:56:17 PM	Tube furnace set to 150
12/8/2012	2:56:47 PM	Helium valve closed
12/8/2012	2:56:47 PM	H2 valve closed
12/8/2012	2:56:47 PM	BCl3 valve closed
12/8/2012	2:56:47 PM	PH3 valve closed
12/8/2012	2:56:47 PM	SiCl4 pre valve closed
12/8/2012	2:56:47 PM	SiCl4 post valve closed
12/8/2012	2:56:47 PM	Bypass valve closed
12/8/2012	2:56:47 PM	Bubbler valve closed
12/8/2012	2:56:47 PM	Main Vac valve opened
12/8/2012	2:56:47 PM	Helium MFC set to  0.000000
12/8/2012	2:56:47 PM	H2 MFC set to  0.000000
12/8/2012	2:56:47 PM	BCl3 MFC set to  0.000000
12/8/2012	2:56:47 PM	PH3 MFC set to  0.000000
12/8/2012	2:56:47 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:56:47 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:56:47 PM	Tube furnace set to 150
12/8/2012	2:57:17 PM	H2 valve closed
12/8/2012	2:57:17 PM	BCl3 valve closed
12/8/2012	2:57:17 PM	PH3 valve closed
12/8/2012	2:57:17 PM	SiCl4 pre valve closed
12/8/2012	2:57:17 PM	SiCl4 post valve closed
12/8/2012	2:57:17 PM	Bypass valve closed
12/8/2012	2:57:17 PM	Bubbler valve closed
12/8/2012	2:57:17 PM	Helium valve opened
12/8/2012	2:57:17 PM	Main Vac valve opened
12/8/2012	2:57:17 PM	Helium MFC set to  20.000000
12/8/2012	2:57:17 PM	H2 MFC set to  0.000000
12/8/2012	2:57:17 PM	BCl3 MFC set to  0.000000
12/8/2012	2:57:17 PM	PH3 MFC set to  0.000000
12/8/2012	2:57:17 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:57:17 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:57:17 PM	Tube furnace set to 150
12/8/2012	2:57:47 PM	Helium valve closed
12/8/2012	2:57:47 PM	H2 valve closed
12/8/2012	2:57:47 PM	BCl3 valve closed
12/8/2012	2:57:47 PM	PH3 valve closed
12/8/2012	2:57:47 PM	SiCl4 pre valve closed
12/8/2012	2:57:47 PM	SiCl4 post valve closed
12/8/2012	2:57:47 PM	Bypass valve closed
12/8/2012	2:57:47 PM	Bubbler valve closed
12/8/2012	2:57:47 PM	Main Vac valve opened
12/8/2012	2:57:47 PM	Helium MFC set to  0.000000
12/8/2012	2:57:47 PM	H2 MFC set to  0.000000
12/8/2012	2:57:47 PM	BCl3 MFC set to  0.000000
12/8/2012	2:57:47 PM	PH3 MFC set to  0.000000
12/8/2012	2:57:47 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:57:47 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:57:48 PM	Tube furnace set to 150
12/8/2012	2:58:18 PM	H2 valve closed
12/8/2012	2:58:18 PM	BCl3 valve closed
12/8/2012	2:58:18 PM	PH3 valve closed
12/8/2012	2:58:18 PM	SiCl4 pre valve closed
12/8/2012	2:58:18 PM	SiCl4 post valve closed
12/8/2012	2:58:18 PM	Bypass valve closed
12/8/2012	2:58:18 PM	Bubbler valve closed
12/8/2012	2:58:18 PM	Helium valve opened
12/8/2012	2:58:18 PM	Main Vac valve opened
12/8/2012	2:58:18 PM	Helium MFC set to  20.000000
12/8/2012	2:58:18 PM	H2 MFC set to  0.000000
12/8/2012	2:58:18 PM	BCl3 MFC set to  0.000000
12/8/2012	2:58:18 PM	PH3 MFC set to  0.000000
12/8/2012	2:58:18 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:58:18 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:58:18 PM	Tube furnace set to 150
12/8/2012	2:58:48 PM	Helium valve closed
12/8/2012	2:58:48 PM	H2 valve closed
12/8/2012	2:58:48 PM	BCl3 valve closed
12/8/2012	2:58:48 PM	PH3 valve closed
12/8/2012	2:58:48 PM	SiCl4 pre valve closed
12/8/2012	2:58:48 PM	SiCl4 post valve closed
12/8/2012	2:58:48 PM	Bypass valve closed
12/8/2012	2:58:48 PM	Bubbler valve closed
12/8/2012	2:58:48 PM	Main Vac valve opened
12/8/2012	2:58:48 PM	Helium MFC set to  0.000000
12/8/2012	2:58:48 PM	H2 MFC set to  0.000000
12/8/2012	2:58:48 PM	BCl3 MFC set to  0.000000
12/8/2012	2:58:48 PM	PH3 MFC set to  0.000000
12/8/2012	2:58:48 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:58:48 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:58:48 PM	Tube furnace set to 150
12/8/2012	2:59:18 PM	H2 valve closed
12/8/2012	2:59:18 PM	BCl3 valve closed
12/8/2012	2:59:18 PM	PH3 valve closed
12/8/2012	2:59:18 PM	SiCl4 pre valve closed
12/8/2012	2:59:18 PM	SiCl4 post valve closed
12/8/2012	2:59:18 PM	Bypass valve closed
12/8/2012	2:59:18 PM	Bubbler valve closed
12/8/2012	2:59:18 PM	Helium valve opened
12/8/2012	2:59:18 PM	Main Vac valve opened
12/8/2012	2:59:18 PM	Helium MFC set to  20.000000
12/8/2012	2:59:18 PM	H2 MFC set to  0.000000
12/8/2012	2:59:18 PM	BCl3 MFC set to  0.000000
12/8/2012	2:59:18 PM	PH3 MFC set to  0.000000
12/8/2012	2:59:18 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:59:18 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:59:18 PM	Tube furnace set to 150
12/8/2012	2:59:48 PM	Helium valve closed
12/8/2012	2:59:48 PM	H2 valve closed
12/8/2012	2:59:48 PM	BCl3 valve closed
12/8/2012	2:59:48 PM	PH3 valve closed
12/8/2012	2:59:48 PM	SiCl4 pre valve closed
12/8/2012	2:59:48 PM	SiCl4 post valve closed
12/8/2012	2:59:48 PM	Bypass valve closed
12/8/2012	2:59:48 PM	Bubbler valve closed
12/8/2012	2:59:48 PM	Main Vac valve opened
12/8/2012	2:59:48 PM	Helium MFC set to  0.000000
12/8/2012	2:59:48 PM	H2 MFC set to  0.000000
12/8/2012	2:59:48 PM	BCl3 MFC set to  0.000000
12/8/2012	2:59:48 PM	PH3 MFC set to  0.000000
12/8/2012	2:59:48 PM	SiCl4 MFC set to  0.000000
12/8/2012	2:59:48 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	2:59:49 PM	Tube furnace set to 150
12/8/2012	3:00:19 PM	H2 valve closed
12/8/2012	3:00:19 PM	BCl3 valve closed
12/8/2012	3:00:19 PM	PH3 valve closed
12/8/2012	3:00:19 PM	SiCl4 pre valve closed
12/8/2012	3:00:19 PM	SiCl4 post valve closed
12/8/2012	3:00:19 PM	Bypass valve closed
12/8/2012	3:00:19 PM	Bubbler valve closed
12/8/2012	3:00:19 PM	Helium valve opened
12/8/2012	3:00:19 PM	Main Vac valve opened
12/8/2012	3:00:19 PM	Helium MFC set to  20.000000
12/8/2012	3:00:19 PM	H2 MFC set to  0.000000
12/8/2012	3:00:19 PM	BCl3 MFC set to  0.000000
12/8/2012	3:00:19 PM	PH3 MFC set to  0.000000
12/8/2012	3:00:19 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:00:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:00:19 PM	Tube furnace set to 150
12/8/2012	3:00:49 PM	Helium valve closed
12/8/2012	3:00:49 PM	H2 valve closed
12/8/2012	3:00:49 PM	BCl3 valve closed
12/8/2012	3:00:49 PM	PH3 valve closed
12/8/2012	3:00:49 PM	SiCl4 pre valve closed
12/8/2012	3:00:49 PM	SiCl4 post valve closed
12/8/2012	3:00:49 PM	Bypass valve closed
12/8/2012	3:00:49 PM	Bubbler valve closed
12/8/2012	3:00:49 PM	Main Vac valve opened
12/8/2012	3:00:49 PM	Helium MFC set to  0.000000
12/8/2012	3:00:49 PM	H2 MFC set to  0.000000
12/8/2012	3:00:49 PM	BCl3 MFC set to  0.000000
12/8/2012	3:00:49 PM	PH3 MFC set to  0.000000
12/8/2012	3:00:49 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:00:49 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:00:49 PM	Tube furnace set to 150
12/8/2012	3:01:19 PM	H2 valve closed
12/8/2012	3:01:19 PM	BCl3 valve closed
12/8/2012	3:01:19 PM	PH3 valve closed
12/8/2012	3:01:19 PM	SiCl4 pre valve closed
12/8/2012	3:01:19 PM	SiCl4 post valve closed
12/8/2012	3:01:19 PM	Bypass valve closed
12/8/2012	3:01:19 PM	Bubbler valve closed
12/8/2012	3:01:19 PM	Helium valve opened
12/8/2012	3:01:19 PM	Main Vac valve opened
12/8/2012	3:01:19 PM	Helium MFC set to  20.000000
12/8/2012	3:01:19 PM	H2 MFC set to  0.000000
12/8/2012	3:01:19 PM	BCl3 MFC set to  0.000000
12/8/2012	3:01:19 PM	PH3 MFC set to  0.000000
12/8/2012	3:01:19 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:01:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:01:19 PM	Tube furnace set to 150
12/8/2012	3:01:49 PM	Helium valve closed
12/8/2012	3:01:49 PM	H2 valve closed
12/8/2012	3:01:49 PM	BCl3 valve closed
12/8/2012	3:01:49 PM	PH3 valve closed
12/8/2012	3:01:49 PM	SiCl4 pre valve closed
12/8/2012	3:01:49 PM	SiCl4 post valve closed
12/8/2012	3:01:49 PM	Bypass valve closed
12/8/2012	3:01:49 PM	Bubbler valve closed
12/8/2012	3:01:49 PM	Main Vac valve opened
12/8/2012	3:01:49 PM	Helium MFC set to  0.000000
12/8/2012	3:01:49 PM	H2 MFC set to  0.000000
12/8/2012	3:01:49 PM	BCl3 MFC set to  0.000000
12/8/2012	3:01:49 PM	PH3 MFC set to  0.000000
12/8/2012	3:01:49 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:01:49 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:01:50 PM	Tube furnace set to 150
12/8/2012	3:02:20 PM	H2 valve closed
12/8/2012	3:02:20 PM	BCl3 valve closed
12/8/2012	3:02:20 PM	PH3 valve closed
12/8/2012	3:02:20 PM	SiCl4 pre valve closed
12/8/2012	3:02:20 PM	SiCl4 post valve closed
12/8/2012	3:02:20 PM	Bypass valve closed
12/8/2012	3:02:20 PM	Bubbler valve closed
12/8/2012	3:02:20 PM	Helium valve opened
12/8/2012	3:02:20 PM	Main Vac valve opened
12/8/2012	3:02:20 PM	Helium MFC set to  20.000000
12/8/2012	3:02:20 PM	H2 MFC set to  0.000000
12/8/2012	3:02:20 PM	BCl3 MFC set to  0.000000
12/8/2012	3:02:20 PM	PH3 MFC set to  0.000000
12/8/2012	3:02:20 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:02:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:02:20 PM	Tube furnace set to 150
12/8/2012	3:02:50 PM	Helium valve closed
12/8/2012	3:02:50 PM	H2 valve closed
12/8/2012	3:02:50 PM	BCl3 valve closed
12/8/2012	3:02:50 PM	PH3 valve closed
12/8/2012	3:02:50 PM	SiCl4 pre valve closed
12/8/2012	3:02:50 PM	SiCl4 post valve closed
12/8/2012	3:02:50 PM	Bypass valve closed
12/8/2012	3:02:50 PM	Bubbler valve closed
12/8/2012	3:02:50 PM	Main Vac valve opened
12/8/2012	3:02:50 PM	Helium MFC set to  0.000000
12/8/2012	3:02:50 PM	H2 MFC set to  0.000000
12/8/2012	3:02:50 PM	BCl3 MFC set to  0.000000
12/8/2012	3:02:50 PM	PH3 MFC set to  0.000000
12/8/2012	3:02:50 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:02:50 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:02:50 PM	Tube furnace set to 150
12/8/2012	3:03:20 PM	H2 valve closed
12/8/2012	3:03:20 PM	BCl3 valve closed
12/8/2012	3:03:20 PM	PH3 valve closed
12/8/2012	3:03:20 PM	SiCl4 pre valve closed
12/8/2012	3:03:20 PM	SiCl4 post valve closed
12/8/2012	3:03:20 PM	Bypass valve closed
12/8/2012	3:03:20 PM	Bubbler valve closed
12/8/2012	3:03:20 PM	Helium valve opened
12/8/2012	3:03:20 PM	Main Vac valve opened
12/8/2012	3:03:20 PM	Helium MFC set to  20.000000
12/8/2012	3:03:20 PM	H2 MFC set to  0.000000
12/8/2012	3:03:20 PM	BCl3 MFC set to  0.000000
12/8/2012	3:03:20 PM	PH3 MFC set to  0.000000
12/8/2012	3:03:20 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:03:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:03:20 PM	Tube furnace set to 150
12/8/2012	3:03:50 PM	Helium valve closed
12/8/2012	3:03:50 PM	H2 valve closed
12/8/2012	3:03:50 PM	BCl3 valve closed
12/8/2012	3:03:50 PM	PH3 valve closed
12/8/2012	3:03:50 PM	SiCl4 pre valve closed
12/8/2012	3:03:50 PM	SiCl4 post valve closed
12/8/2012	3:03:50 PM	Bypass valve closed
12/8/2012	3:03:50 PM	Bubbler valve closed
12/8/2012	3:03:50 PM	Main Vac valve opened
12/8/2012	3:03:50 PM	Helium MFC set to  0.000000
12/8/2012	3:03:50 PM	H2 MFC set to  0.000000
12/8/2012	3:03:50 PM	BCl3 MFC set to  0.000000
12/8/2012	3:03:50 PM	PH3 MFC set to  0.000000
12/8/2012	3:03:50 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:03:50 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:03:50 PM	Tube furnace set to 150
12/8/2012	3:04:20 PM	H2 valve closed
12/8/2012	3:04:20 PM	BCl3 valve closed
12/8/2012	3:04:21 PM	PH3 valve closed
12/8/2012	3:04:21 PM	SiCl4 pre valve closed
12/8/2012	3:04:21 PM	SiCl4 post valve closed
12/8/2012	3:04:21 PM	Bypass valve closed
12/8/2012	3:04:21 PM	Bubbler valve closed
12/8/2012	3:04:21 PM	Helium valve opened
12/8/2012	3:04:21 PM	Main Vac valve opened
12/8/2012	3:04:21 PM	Helium MFC set to  20.000000
12/8/2012	3:04:21 PM	H2 MFC set to  0.000000
12/8/2012	3:04:21 PM	BCl3 MFC set to  0.000000
12/8/2012	3:04:21 PM	PH3 MFC set to  0.000000
12/8/2012	3:04:21 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:04:21 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:04:21 PM	Tube furnace set to 150
12/8/2012	3:04:51 PM	Helium valve closed
12/8/2012	3:04:51 PM	H2 valve closed
12/8/2012	3:04:51 PM	BCl3 valve closed
12/8/2012	3:04:51 PM	PH3 valve closed
12/8/2012	3:04:51 PM	SiCl4 pre valve closed
12/8/2012	3:04:51 PM	SiCl4 post valve closed
12/8/2012	3:04:51 PM	Bypass valve closed
12/8/2012	3:04:51 PM	Bubbler valve closed
12/8/2012	3:04:51 PM	Main Vac valve opened
12/8/2012	3:04:51 PM	Helium MFC set to  0.000000
12/8/2012	3:04:51 PM	H2 MFC set to  0.000000
12/8/2012	3:04:51 PM	BCl3 MFC set to  0.000000
12/8/2012	3:04:51 PM	PH3 MFC set to  0.000000
12/8/2012	3:04:51 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:04:51 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:04:51 PM	Tube furnace set to 150
12/8/2012	3:04:52 PM	Run finished at 3:04 PM
12/8/2012	3:05:30 PM	Main Vac valve closed
12/8/2012	3:05:41 PM	Main Vac valve opened
12/8/2012	3:05:52 PM	Recipe started at 3:05 PM
12/8/2012	3:05:52 PM	Helium valve closed
12/8/2012	3:05:52 PM	H2 valve closed
12/8/2012	3:05:52 PM	BCl3 valve closed
12/8/2012	3:05:52 PM	PH3 valve closed
12/8/2012	3:05:52 PM	SiCl4 pre valve closed
12/8/2012	3:05:52 PM	SiCl4 post valve closed
12/8/2012	3:05:52 PM	Bypass valve closed
12/8/2012	3:05:52 PM	Bubbler valve closed
12/8/2012	3:05:52 PM	Main Vac valve opened
12/8/2012	3:05:52 PM	Helium MFC set to  0.000000
12/8/2012	3:05:52 PM	H2 MFC set to  0.000000
12/8/2012	3:05:52 PM	BCl3 MFC set to  0.000000
12/8/2012	3:05:52 PM	PH3 MFC set to  0.000000
12/8/2012	3:05:52 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:05:52 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:05:52 PM	Tube furnace set to 150
12/8/2012	3:05:57 PM	H2 valve closed
12/8/2012	3:05:57 PM	BCl3 valve closed
12/8/2012	3:05:57 PM	PH3 valve closed
12/8/2012	3:05:57 PM	SiCl4 pre valve closed
12/8/2012	3:05:57 PM	SiCl4 post valve closed
12/8/2012	3:05:57 PM	Bypass valve closed
12/8/2012	3:05:57 PM	Bubbler valve closed
12/8/2012	3:05:57 PM	Helium valve opened
12/8/2012	3:05:57 PM	Main Vac valve opened
12/8/2012	3:05:57 PM	Helium MFC set to  20.000000
12/8/2012	3:05:57 PM	H2 MFC set to  0.000000
12/8/2012	3:05:57 PM	BCl3 MFC set to  0.000000
12/8/2012	3:05:57 PM	PH3 MFC set to  0.000000
12/8/2012	3:05:57 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:05:57 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:05:57 PM	Tube furnace set to 150
12/8/2012	3:06:27 PM	Helium valve closed
12/8/2012	3:06:27 PM	H2 valve closed
12/8/2012	3:06:27 PM	BCl3 valve closed
12/8/2012	3:06:27 PM	PH3 valve closed
12/8/2012	3:06:27 PM	SiCl4 pre valve closed
12/8/2012	3:06:27 PM	SiCl4 post valve closed
12/8/2012	3:06:27 PM	Bypass valve closed
12/8/2012	3:06:27 PM	Bubbler valve closed
12/8/2012	3:06:27 PM	Main Vac valve opened
12/8/2012	3:06:27 PM	Helium MFC set to  0.000000
12/8/2012	3:06:27 PM	H2 MFC set to  0.000000
12/8/2012	3:06:27 PM	BCl3 MFC set to  0.000000
12/8/2012	3:06:27 PM	PH3 MFC set to  0.000000
12/8/2012	3:06:27 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:06:27 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:06:27 PM	Tube furnace set to 150
12/8/2012	3:06:57 PM	H2 valve closed
12/8/2012	3:06:57 PM	BCl3 valve closed
12/8/2012	3:06:57 PM	PH3 valve closed
12/8/2012	3:06:57 PM	SiCl4 pre valve closed
12/8/2012	3:06:57 PM	SiCl4 post valve closed
12/8/2012	3:06:57 PM	Bypass valve closed
12/8/2012	3:06:57 PM	Bubbler valve closed
12/8/2012	3:06:57 PM	Helium valve opened
12/8/2012	3:06:57 PM	Main Vac valve opened
12/8/2012	3:06:57 PM	Helium MFC set to  20.000000
12/8/2012	3:06:57 PM	H2 MFC set to  0.000000
12/8/2012	3:06:57 PM	BCl3 MFC set to  0.000000
12/8/2012	3:06:57 PM	PH3 MFC set to  0.000000
12/8/2012	3:06:57 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:06:57 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:06:58 PM	Tube furnace set to 150
12/8/2012	3:07:28 PM	Helium valve closed
12/8/2012	3:07:28 PM	H2 valve closed
12/8/2012	3:07:28 PM	BCl3 valve closed
12/8/2012	3:07:28 PM	PH3 valve closed
12/8/2012	3:07:28 PM	SiCl4 pre valve closed
12/8/2012	3:07:28 PM	SiCl4 post valve closed
12/8/2012	3:07:28 PM	Bypass valve closed
12/8/2012	3:07:28 PM	Bubbler valve closed
12/8/2012	3:07:28 PM	Main Vac valve opened
12/8/2012	3:07:28 PM	Helium MFC set to  0.000000
12/8/2012	3:07:28 PM	H2 MFC set to  0.000000
12/8/2012	3:07:28 PM	BCl3 MFC set to  0.000000
12/8/2012	3:07:28 PM	PH3 MFC set to  0.000000
12/8/2012	3:07:28 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:07:28 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:07:28 PM	Tube furnace set to 150
12/8/2012	3:07:58 PM	H2 valve closed
12/8/2012	3:07:58 PM	BCl3 valve closed
12/8/2012	3:07:58 PM	PH3 valve closed
12/8/2012	3:07:58 PM	SiCl4 pre valve closed
12/8/2012	3:07:58 PM	SiCl4 post valve closed
12/8/2012	3:07:58 PM	Bypass valve closed
12/8/2012	3:07:58 PM	Bubbler valve closed
12/8/2012	3:07:58 PM	Helium valve opened
12/8/2012	3:07:58 PM	Main Vac valve opened
12/8/2012	3:07:58 PM	Helium MFC set to  20.000000
12/8/2012	3:07:58 PM	H2 MFC set to  0.000000
12/8/2012	3:07:58 PM	BCl3 MFC set to  0.000000
12/8/2012	3:07:58 PM	PH3 MFC set to  0.000000
12/8/2012	3:07:58 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:07:58 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:07:58 PM	Tube furnace set to 150
12/8/2012	3:08:28 PM	Helium valve closed
12/8/2012	3:08:28 PM	H2 valve closed
12/8/2012	3:08:28 PM	BCl3 valve closed
12/8/2012	3:08:28 PM	PH3 valve closed
12/8/2012	3:08:28 PM	SiCl4 pre valve closed
12/8/2012	3:08:28 PM	SiCl4 post valve closed
12/8/2012	3:08:28 PM	Bypass valve closed
12/8/2012	3:08:28 PM	Bubbler valve closed
12/8/2012	3:08:28 PM	Main Vac valve opened
12/8/2012	3:08:28 PM	Helium MFC set to  0.000000
12/8/2012	3:08:28 PM	H2 MFC set to  0.000000
12/8/2012	3:08:28 PM	BCl3 MFC set to  0.000000
12/8/2012	3:08:28 PM	PH3 MFC set to  0.000000
12/8/2012	3:08:28 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:08:28 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:08:28 PM	Tube furnace set to 150
12/8/2012	3:08:58 PM	H2 valve closed
12/8/2012	3:08:58 PM	BCl3 valve closed
12/8/2012	3:08:58 PM	PH3 valve closed
12/8/2012	3:08:58 PM	SiCl4 pre valve closed
12/8/2012	3:08:58 PM	SiCl4 post valve closed
12/8/2012	3:08:58 PM	Bypass valve closed
12/8/2012	3:08:58 PM	Bubbler valve closed
12/8/2012	3:08:58 PM	Helium valve opened
12/8/2012	3:08:58 PM	Main Vac valve opened
12/8/2012	3:08:58 PM	Helium MFC set to  20.000000
12/8/2012	3:08:58 PM	H2 MFC set to  0.000000
12/8/2012	3:08:58 PM	BCl3 MFC set to  0.000000
12/8/2012	3:08:58 PM	PH3 MFC set to  0.000000
12/8/2012	3:08:58 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:08:58 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:08:59 PM	Tube furnace set to 150
12/8/2012	3:09:29 PM	Helium valve closed
12/8/2012	3:09:29 PM	H2 valve closed
12/8/2012	3:09:29 PM	BCl3 valve closed
12/8/2012	3:09:29 PM	PH3 valve closed
12/8/2012	3:09:29 PM	SiCl4 pre valve closed
12/8/2012	3:09:29 PM	SiCl4 post valve closed
12/8/2012	3:09:29 PM	Bypass valve closed
12/8/2012	3:09:29 PM	Bubbler valve closed
12/8/2012	3:09:29 PM	Main Vac valve opened
12/8/2012	3:09:29 PM	Helium MFC set to  0.000000
12/8/2012	3:09:29 PM	H2 MFC set to  0.000000
12/8/2012	3:09:29 PM	BCl3 MFC set to  0.000000
12/8/2012	3:09:29 PM	PH3 MFC set to  0.000000
12/8/2012	3:09:29 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:09:29 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:09:29 PM	Tube furnace set to 150
12/8/2012	3:09:59 PM	H2 valve closed
12/8/2012	3:09:59 PM	BCl3 valve closed
12/8/2012	3:09:59 PM	PH3 valve closed
12/8/2012	3:09:59 PM	SiCl4 pre valve closed
12/8/2012	3:09:59 PM	SiCl4 post valve closed
12/8/2012	3:09:59 PM	Bypass valve closed
12/8/2012	3:09:59 PM	Bubbler valve closed
12/8/2012	3:09:59 PM	Helium valve opened
12/8/2012	3:09:59 PM	Main Vac valve opened
12/8/2012	3:09:59 PM	Helium MFC set to  20.000000
12/8/2012	3:09:59 PM	H2 MFC set to  0.000000
12/8/2012	3:09:59 PM	BCl3 MFC set to  0.000000
12/8/2012	3:09:59 PM	PH3 MFC set to  0.000000
12/8/2012	3:09:59 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:09:59 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:09:59 PM	Tube furnace set to 150
12/8/2012	3:10:29 PM	Helium valve closed
12/8/2012	3:10:29 PM	H2 valve closed
12/8/2012	3:10:29 PM	BCl3 valve closed
12/8/2012	3:10:29 PM	PH3 valve closed
12/8/2012	3:10:29 PM	SiCl4 pre valve closed
12/8/2012	3:10:29 PM	SiCl4 post valve closed
12/8/2012	3:10:29 PM	Bypass valve closed
12/8/2012	3:10:29 PM	Bubbler valve closed
12/8/2012	3:10:29 PM	Main Vac valve opened
12/8/2012	3:10:29 PM	Helium MFC set to  0.000000
12/8/2012	3:10:29 PM	H2 MFC set to  0.000000
12/8/2012	3:10:29 PM	BCl3 MFC set to  0.000000
12/8/2012	3:10:29 PM	PH3 MFC set to  0.000000
12/8/2012	3:10:29 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:10:29 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:10:29 PM	Tube furnace set to 150
12/8/2012	3:10:59 PM	H2 valve closed
12/8/2012	3:10:59 PM	BCl3 valve closed
12/8/2012	3:10:59 PM	PH3 valve closed
12/8/2012	3:10:59 PM	SiCl4 pre valve closed
12/8/2012	3:10:59 PM	SiCl4 post valve closed
12/8/2012	3:10:59 PM	Bypass valve closed
12/8/2012	3:10:59 PM	Bubbler valve closed
12/8/2012	3:10:59 PM	Helium valve opened
12/8/2012	3:10:59 PM	Main Vac valve opened
12/8/2012	3:10:59 PM	Helium MFC set to  20.000000
12/8/2012	3:10:59 PM	H2 MFC set to  0.000000
12/8/2012	3:10:59 PM	BCl3 MFC set to  0.000000
12/8/2012	3:10:59 PM	PH3 MFC set to  0.000000
12/8/2012	3:10:59 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:10:59 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:11:00 PM	Tube furnace set to 150
12/8/2012	3:11:30 PM	Helium valve closed
12/8/2012	3:11:30 PM	H2 valve closed
12/8/2012	3:11:30 PM	BCl3 valve closed
12/8/2012	3:11:30 PM	PH3 valve closed
12/8/2012	3:11:30 PM	SiCl4 pre valve closed
12/8/2012	3:11:30 PM	SiCl4 post valve closed
12/8/2012	3:11:30 PM	Bypass valve closed
12/8/2012	3:11:30 PM	Bubbler valve closed
12/8/2012	3:11:30 PM	Main Vac valve opened
12/8/2012	3:11:30 PM	Helium MFC set to  0.000000
12/8/2012	3:11:30 PM	H2 MFC set to  0.000000
12/8/2012	3:11:30 PM	BCl3 MFC set to  0.000000
12/8/2012	3:11:30 PM	PH3 MFC set to  0.000000
12/8/2012	3:11:30 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:11:30 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:11:30 PM	Tube furnace set to 150
12/8/2012	3:12:00 PM	H2 valve closed
12/8/2012	3:12:00 PM	BCl3 valve closed
12/8/2012	3:12:00 PM	PH3 valve closed
12/8/2012	3:12:00 PM	SiCl4 pre valve closed
12/8/2012	3:12:00 PM	SiCl4 post valve closed
12/8/2012	3:12:00 PM	Bypass valve closed
12/8/2012	3:12:00 PM	Bubbler valve closed
12/8/2012	3:12:00 PM	Helium valve opened
12/8/2012	3:12:00 PM	Main Vac valve opened
12/8/2012	3:12:00 PM	Helium MFC set to  20.000000
12/8/2012	3:12:00 PM	H2 MFC set to  0.000000
12/8/2012	3:12:00 PM	BCl3 MFC set to  0.000000
12/8/2012	3:12:00 PM	PH3 MFC set to  0.000000
12/8/2012	3:12:00 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:12:00 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:12:00 PM	Tube furnace set to 150
12/8/2012	3:12:30 PM	Helium valve closed
12/8/2012	3:12:30 PM	H2 valve closed
12/8/2012	3:12:30 PM	BCl3 valve closed
12/8/2012	3:12:30 PM	PH3 valve closed
12/8/2012	3:12:30 PM	SiCl4 pre valve closed
12/8/2012	3:12:30 PM	SiCl4 post valve closed
12/8/2012	3:12:30 PM	Bypass valve closed
12/8/2012	3:12:30 PM	Bubbler valve closed
12/8/2012	3:12:30 PM	Main Vac valve opened
12/8/2012	3:12:30 PM	Helium MFC set to  0.000000
12/8/2012	3:12:30 PM	H2 MFC set to  0.000000
12/8/2012	3:12:30 PM	BCl3 MFC set to  0.000000
12/8/2012	3:12:30 PM	PH3 MFC set to  0.000000
12/8/2012	3:12:30 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:12:30 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:12:30 PM	Tube furnace set to 150
12/8/2012	3:13:00 PM	H2 valve closed
12/8/2012	3:13:00 PM	BCl3 valve closed
12/8/2012	3:13:00 PM	PH3 valve closed
12/8/2012	3:13:00 PM	SiCl4 pre valve closed
12/8/2012	3:13:00 PM	SiCl4 post valve closed
12/8/2012	3:13:00 PM	Bypass valve closed
12/8/2012	3:13:00 PM	Bubbler valve closed
12/8/2012	3:13:00 PM	Helium valve opened
12/8/2012	3:13:00 PM	Main Vac valve opened
12/8/2012	3:13:00 PM	Helium MFC set to  20.000000
12/8/2012	3:13:00 PM	H2 MFC set to  0.000000
12/8/2012	3:13:00 PM	BCl3 MFC set to  0.000000
12/8/2012	3:13:00 PM	PH3 MFC set to  0.000000
12/8/2012	3:13:00 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:13:00 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:13:00 PM	Tube furnace set to 150
12/8/2012	3:13:31 PM	Helium valve closed
12/8/2012	3:13:31 PM	H2 valve closed
12/8/2012	3:13:31 PM	BCl3 valve closed
12/8/2012	3:13:31 PM	PH3 valve closed
12/8/2012	3:13:31 PM	SiCl4 pre valve closed
12/8/2012	3:13:31 PM	SiCl4 post valve closed
12/8/2012	3:13:31 PM	Bypass valve closed
12/8/2012	3:13:31 PM	Bubbler valve closed
12/8/2012	3:13:31 PM	Main Vac valve opened
12/8/2012	3:13:31 PM	Helium MFC set to  0.000000
12/8/2012	3:13:31 PM	H2 MFC set to  0.000000
12/8/2012	3:13:31 PM	BCl3 MFC set to  0.000000
12/8/2012	3:13:31 PM	PH3 MFC set to  0.000000
12/8/2012	3:13:31 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:13:31 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:13:31 PM	Tube furnace set to 150
12/8/2012	3:14:01 PM	H2 valve closed
12/8/2012	3:14:01 PM	BCl3 valve closed
12/8/2012	3:14:01 PM	PH3 valve closed
12/8/2012	3:14:01 PM	SiCl4 pre valve closed
12/8/2012	3:14:01 PM	SiCl4 post valve closed
12/8/2012	3:14:01 PM	Bypass valve closed
12/8/2012	3:14:01 PM	Bubbler valve closed
12/8/2012	3:14:01 PM	Helium valve opened
12/8/2012	3:14:01 PM	Main Vac valve opened
12/8/2012	3:14:01 PM	Helium MFC set to  20.000000
12/8/2012	3:14:01 PM	H2 MFC set to  0.000000
12/8/2012	3:14:01 PM	BCl3 MFC set to  0.000000
12/8/2012	3:14:01 PM	PH3 MFC set to  0.000000
12/8/2012	3:14:01 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:14:01 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:14:01 PM	Tube furnace set to 150
12/8/2012	3:14:31 PM	Helium valve closed
12/8/2012	3:14:31 PM	H2 valve closed
12/8/2012	3:14:31 PM	BCl3 valve closed
12/8/2012	3:14:31 PM	PH3 valve closed
12/8/2012	3:14:31 PM	SiCl4 pre valve closed
12/8/2012	3:14:31 PM	SiCl4 post valve closed
12/8/2012	3:14:31 PM	Bypass valve closed
12/8/2012	3:14:31 PM	Bubbler valve closed
12/8/2012	3:14:31 PM	Main Vac valve opened
12/8/2012	3:14:31 PM	Helium MFC set to  0.000000
12/8/2012	3:14:31 PM	H2 MFC set to  0.000000
12/8/2012	3:14:31 PM	BCl3 MFC set to  0.000000
12/8/2012	3:14:31 PM	PH3 MFC set to  0.000000
12/8/2012	3:14:31 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:14:31 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:14:31 PM	Tube furnace set to 150
12/8/2012	3:15:01 PM	H2 valve closed
12/8/2012	3:15:01 PM	BCl3 valve closed
12/8/2012	3:15:01 PM	PH3 valve closed
12/8/2012	3:15:01 PM	SiCl4 pre valve closed
12/8/2012	3:15:01 PM	SiCl4 post valve closed
12/8/2012	3:15:01 PM	Bypass valve closed
12/8/2012	3:15:01 PM	Bubbler valve closed
12/8/2012	3:15:01 PM	Helium valve opened
12/8/2012	3:15:01 PM	Main Vac valve opened
12/8/2012	3:15:01 PM	Helium MFC set to  20.000000
12/8/2012	3:15:01 PM	H2 MFC set to  0.000000
12/8/2012	3:15:01 PM	BCl3 MFC set to  0.000000
12/8/2012	3:15:01 PM	PH3 MFC set to  0.000000
12/8/2012	3:15:01 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:15:01 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:15:01 PM	Tube furnace set to 150
12/8/2012	3:15:32 PM	Helium valve closed
12/8/2012	3:15:32 PM	H2 valve closed
12/8/2012	3:15:32 PM	BCl3 valve closed
12/8/2012	3:15:32 PM	PH3 valve closed
12/8/2012	3:15:32 PM	SiCl4 pre valve closed
12/8/2012	3:15:32 PM	SiCl4 post valve closed
12/8/2012	3:15:32 PM	Bypass valve closed
12/8/2012	3:15:32 PM	Bubbler valve closed
12/8/2012	3:15:32 PM	Main Vac valve opened
12/8/2012	3:15:32 PM	Helium MFC set to  0.000000
12/8/2012	3:15:32 PM	H2 MFC set to  0.000000
12/8/2012	3:15:32 PM	BCl3 MFC set to  0.000000
12/8/2012	3:15:32 PM	PH3 MFC set to  0.000000
12/8/2012	3:15:32 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:15:32 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:15:32 PM	Tube furnace set to 150
12/8/2012	3:15:33 PM	Run finished at 3:15 PM
12/8/2012	3:17:09 PM	Main Vac valve closed
12/8/2012	3:17:25 PM	Main Vac valve opened
12/8/2012	3:19:28 PM	Recipe started at 3:19 PM
12/8/2012	3:19:28 PM	Helium valve closed
12/8/2012	3:19:28 PM	H2 valve closed
12/8/2012	3:19:28 PM	BCl3 valve closed
12/8/2012	3:19:28 PM	PH3 valve closed
12/8/2012	3:19:28 PM	SiCl4 pre valve closed
12/8/2012	3:19:28 PM	SiCl4 post valve closed
12/8/2012	3:19:28 PM	Main Vac valve closed
12/8/2012	3:19:28 PM	Bypass valve closed
12/8/2012	3:19:28 PM	Bubbler valve closed
12/8/2012	3:19:28 PM	Helium MFC set to  0.000000
12/8/2012	3:19:28 PM	H2 MFC set to  0.000000
12/8/2012	3:19:28 PM	BCl3 MFC set to  0.000000
12/8/2012	3:19:28 PM	PH3 MFC set to  0.000000
12/8/2012	3:19:28 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:19:28 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:19:28 PM	Tube furnace set to 0
12/8/2012	3:19:31 PM	Helium valve closed
12/8/2012	3:19:31 PM	BCl3 valve closed
12/8/2012	3:19:31 PM	PH3 valve closed
12/8/2012	3:19:31 PM	SiCl4 pre valve closed
12/8/2012	3:19:31 PM	SiCl4 post valve closed
12/8/2012	3:19:31 PM	Main Vac valve closed
12/8/2012	3:19:31 PM	Bypass valve closed
12/8/2012	3:19:31 PM	Bubbler valve closed
12/8/2012	3:19:31 PM	H2 valve opened
12/8/2012	3:19:31 PM	Helium MFC set to  0.000000
12/8/2012	3:19:31 PM	H2 MFC set to  500.000000
12/8/2012	3:19:31 PM	BCl3 MFC set to  0.000000
12/8/2012	3:19:31 PM	PH3 MFC set to  0.000000
12/8/2012	3:19:31 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:19:31 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:19:32 PM	Tube furnace set to 0
12/8/2012	3:20:44 PM	Helium valve closed
12/8/2012	3:20:44 PM	BCl3 valve closed
12/8/2012	3:20:44 PM	PH3 valve closed
12/8/2012	3:20:44 PM	SiCl4 pre valve closed
12/8/2012	3:20:44 PM	SiCl4 post valve closed
12/8/2012	3:20:44 PM	Main Vac valve closed
12/8/2012	3:20:44 PM	Bypass valve closed
12/8/2012	3:20:44 PM	H2 valve opened
12/8/2012	3:20:44 PM	Bubbler valve opened
12/8/2012	3:20:44 PM	Helium MFC set to  0.000000
12/8/2012	3:20:44 PM	H2 MFC set to  500.000000
12/8/2012	3:20:44 PM	BCl3 MFC set to  0.000000
12/8/2012	3:20:44 PM	PH3 MFC set to  0.000000
12/8/2012	3:20:44 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:20:44 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:20:44 PM	Tube furnace set to 0
12/8/2012	3:20:45 PM	Helium valve closed
12/8/2012	3:20:45 PM	BCl3 valve closed
12/8/2012	3:20:45 PM	PH3 valve closed
12/8/2012	3:20:45 PM	SiCl4 pre valve closed
12/8/2012	3:20:45 PM	SiCl4 post valve closed
12/8/2012	3:20:45 PM	Main Vac valve closed
12/8/2012	3:20:45 PM	Bypass valve closed
12/8/2012	3:20:45 PM	H2 valve opened
12/8/2012	3:20:45 PM	Bubbler valve opened
12/8/2012	3:20:45 PM	Helium MFC set to  0.000000
12/8/2012	3:20:45 PM	H2 MFC set to  450.000000
12/8/2012	3:20:45 PM	BCl3 MFC set to  0.000000
12/8/2012	3:20:45 PM	PH3 MFC set to  0.000000
12/8/2012	3:20:45 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:20:45 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:20:45 PM	Tube furnace set to 1000
12/8/2012	3:45:45 PM	Helium valve closed
12/8/2012	3:45:45 PM	PH3 valve closed
12/8/2012	3:45:45 PM	Main Vac valve closed
12/8/2012	3:45:45 PM	Bypass valve closed
12/8/2012	3:45:45 PM	H2 valve opened
12/8/2012	3:45:45 PM	BCl3 valve opened
12/8/2012	3:45:45 PM	SiCl4 pre valve opened
12/8/2012	3:45:45 PM	SiCl4 post valve opened
12/8/2012	3:45:45 PM	Bubbler valve opened
12/8/2012	3:45:45 PM	Helium MFC set to  0.000000
12/8/2012	3:45:45 PM	H2 MFC set to  450.000000
12/8/2012	3:45:45 PM	BCl3 MFC set to  1.500000
12/8/2012	3:45:45 PM	PH3 MFC set to  0.000000
12/8/2012	3:45:45 PM	SiCl4 MFC set to  50.000000
12/8/2012	3:45:45 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:45:46 PM	Tube furnace set to 1000
12/8/2012	3:53:46 PM	Helium valve closed
12/8/2012	3:53:46 PM	BCl3 valve closed
12/8/2012	3:53:46 PM	PH3 valve closed
12/8/2012	3:53:46 PM	SiCl4 pre valve closed
12/8/2012	3:53:46 PM	SiCl4 post valve closed
12/8/2012	3:53:46 PM	Main Vac valve closed
12/8/2012	3:53:46 PM	Bypass valve closed
12/8/2012	3:53:46 PM	H2 valve opened
12/8/2012	3:53:46 PM	Bubbler valve opened
12/8/2012	3:53:46 PM	Helium MFC set to  0.000000
12/8/2012	3:53:46 PM	H2 MFC set to  500.000000
12/8/2012	3:53:46 PM	BCl3 MFC set to  0.000000
12/8/2012	3:53:46 PM	PH3 MFC set to  0.000000
12/8/2012	3:53:46 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:53:46 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:53:46 PM	Tube furnace set to 750
12/8/2012	3:58:46 PM	H2 valve closed
12/8/2012	3:58:46 PM	BCl3 valve closed
12/8/2012	3:58:46 PM	PH3 valve closed
12/8/2012	3:58:46 PM	SiCl4 pre valve closed
12/8/2012	3:58:46 PM	SiCl4 post valve closed
12/8/2012	3:58:46 PM	Main Vac valve closed
12/8/2012	3:58:46 PM	Bypass valve closed
12/8/2012	3:58:46 PM	Helium valve opened
12/8/2012	3:58:46 PM	Bubbler valve opened
12/8/2012	3:58:46 PM	Helium MFC set to  500.000000
12/8/2012	3:58:46 PM	H2 MFC set to  0.000000
12/8/2012	3:58:46 PM	BCl3 MFC set to  0.000000
12/8/2012	3:58:46 PM	PH3 MFC set to  0.000000
12/8/2012	3:58:46 PM	SiCl4 MFC set to  0.000000
12/8/2012	3:58:46 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	3:58:46 PM	Tube furnace set to 0
12/8/2012	4:08:10 PM	Helium valve closed
12/8/2012	4:08:10 PM	H2 valve closed
12/8/2012	4:08:10 PM	BCl3 valve closed
12/8/2012	4:08:10 PM	PH3 valve closed
12/8/2012	4:08:10 PM	SiCl4 pre valve closed
12/8/2012	4:08:10 PM	SiCl4 post valve closed
12/8/2012	4:08:10 PM	Main Vac valve closed
12/8/2012	4:08:10 PM	Bypass valve closed
12/8/2012	4:08:10 PM	Bubbler valve closed
12/8/2012	4:08:10 PM	Helium MFC set to  0.000000
12/8/2012	4:08:10 PM	H2 MFC set to  0.000000
12/8/2012	4:08:10 PM	BCl3 MFC set to  0.000000
12/8/2012	4:08:10 PM	PH3 MFC set to  0.000000
12/8/2012	4:08:10 PM	SiCl4 MFC set to  0.000000
12/8/2012	4:08:10 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	4:08:11 PM	Tube furnace set to 0
12/8/2012	4:08:12 PM	Run finished at 4:08 PM
12/8/2012	4:08:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2012	4:08:15 PM	Recipe started at 4:08 PM
12/8/2012	4:08:15 PM	Helium valve closed
12/8/2012	4:08:15 PM	H2 valve closed
12/8/2012	4:08:15 PM	BCl3 valve closed
12/8/2012	4:08:15 PM	PH3 valve closed
12/8/2012	4:08:15 PM	SiCl4 pre valve closed
12/8/2012	4:08:15 PM	SiCl4 post valve closed
12/8/2012	4:08:15 PM	Main Vac valve closed
12/8/2012	4:08:15 PM	Bypass valve closed
12/8/2012	4:08:15 PM	Bubbler valve closed
12/8/2012	4:08:15 PM	Helium MFC set to  0.000000
12/8/2012	4:08:15 PM	H2 MFC set to  0.000000
12/8/2012	4:08:15 PM	BCl3 MFC set to  0.000000
12/8/2012	4:08:15 PM	PH3 MFC set to  0.000000
12/8/2012	4:08:15 PM	SiCl4 MFC set to  0.000000
12/8/2012	4:08:15 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	4:08:15 PM	Tube furnace set to 0
12/8/2012	4:08:18 PM	H2 valve closed
12/8/2012	4:08:18 PM	BCl3 valve closed
12/8/2012	4:08:18 PM	PH3 valve closed
12/8/2012	4:08:18 PM	SiCl4 pre valve closed
12/8/2012	4:08:18 PM	SiCl4 post valve closed
12/8/2012	4:08:18 PM	Main Vac valve closed
12/8/2012	4:08:18 PM	Bypass valve closed
12/8/2012	4:08:18 PM	Bubbler valve closed
12/8/2012	4:08:18 PM	Helium valve opened
12/8/2012	4:08:18 PM	Helium MFC set to  500.000000
12/8/2012	4:08:18 PM	H2 MFC set to  0.000000
12/8/2012	4:08:18 PM	BCl3 MFC set to  0.000000
12/8/2012	4:08:18 PM	PH3 MFC set to  0.000000
12/8/2012	4:08:18 PM	SiCl4 MFC set to  0.000000
12/8/2012	4:08:18 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	4:08:18 PM	Tube furnace set to 0
12/8/2012	4:08:19 PM	Helium valve closed
12/8/2012	4:08:19 PM	H2 valve closed
12/8/2012	4:08:19 PM	BCl3 valve closed
12/8/2012	4:08:19 PM	PH3 valve closed
12/8/2012	4:08:19 PM	SiCl4 pre valve closed
12/8/2012	4:08:19 PM	SiCl4 post valve closed
12/8/2012	4:08:19 PM	Main Vac valve closed
12/8/2012	4:08:19 PM	Bypass valve closed
12/8/2012	4:08:19 PM	Bubbler valve closed
12/8/2012	4:08:19 PM	Helium MFC set to  0.000000
12/8/2012	4:08:19 PM	H2 MFC set to  0.000000
12/8/2012	4:08:19 PM	BCl3 MFC set to  0.000000
12/8/2012	4:08:19 PM	PH3 MFC set to  0.000000
12/8/2012	4:08:19 PM	SiCl4 MFC set to  0.000000
12/8/2012	4:08:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	4:08:19 PM	Tube furnace set to 0
12/8/2012	4:08:20 PM	Run finished at 4:08 PM
12/8/2012	4:08:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2012	4:13:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2012	4:13:04 PM	Recipe started at 4:13 PM
12/8/2012	4:13:04 PM	Helium valve closed
12/8/2012	4:13:04 PM	H2 valve closed
12/8/2012	4:13:04 PM	BCl3 valve closed
12/8/2012	4:13:04 PM	PH3 valve closed
12/8/2012	4:13:04 PM	SiCl4 pre valve closed
12/8/2012	4:13:04 PM	SiCl4 post valve closed
12/8/2012	4:13:04 PM	Main Vac valve closed
12/8/2012	4:13:05 PM	Bubbler valve closed
12/8/2012	4:13:05 PM	Bypass valve opened
12/8/2012	4:13:05 PM	Helium MFC set to  0.000000
12/8/2012	4:13:05 PM	H2 MFC set to  0.000000
12/8/2012	4:13:05 PM	BCl3 MFC set to  0.000000
12/8/2012	4:13:05 PM	PH3 MFC set to  0.000000
12/8/2012	4:13:05 PM	SiCl4 MFC set to  0.000000
12/8/2012	4:13:05 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	4:13:05 PM	Tube furnace set to 0
12/8/2012	4:14:22 PM	Helium valve closed
12/8/2012	4:14:22 PM	H2 valve closed
12/8/2012	4:14:22 PM	BCl3 valve closed
12/8/2012	4:14:22 PM	PH3 valve closed
12/8/2012	4:14:22 PM	SiCl4 pre valve closed
12/8/2012	4:14:22 PM	SiCl4 post valve closed
12/8/2012	4:14:22 PM	Main Vac valve closed
12/8/2012	4:14:22 PM	Bubbler valve closed
12/8/2012	4:14:22 PM	Bypass valve opened
12/8/2012	4:14:22 PM	Helium MFC set to  0.000000
12/8/2012	4:14:22 PM	H2 MFC set to  0.000000
12/8/2012	4:14:22 PM	BCl3 MFC set to  0.000000
12/8/2012	4:14:22 PM	PH3 MFC set to  0.000000
12/8/2012	4:14:22 PM	SiCl4 MFC set to  0.000000
12/8/2012	4:14:22 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	4:14:22 PM	Tube furnace set to 0
12/8/2012	4:15:22 PM	Helium valve closed
12/8/2012	4:15:22 PM	H2 valve closed
12/8/2012	4:15:22 PM	BCl3 valve closed
12/8/2012	4:15:22 PM	PH3 valve closed
12/8/2012	4:15:22 PM	SiCl4 pre valve closed
12/8/2012	4:15:22 PM	SiCl4 post valve closed
12/8/2012	4:15:22 PM	Bypass valve closed
12/8/2012	4:15:22 PM	Bubbler valve closed
12/8/2012	4:15:22 PM	Main Vac valve opened
12/8/2012	4:15:22 PM	Helium MFC set to  0.000000
12/8/2012	4:15:22 PM	H2 MFC set to  0.000000
12/8/2012	4:15:22 PM	BCl3 MFC set to  0.000000
12/8/2012	4:15:23 PM	PH3 MFC set to  0.000000
12/8/2012	4:15:23 PM	SiCl4 MFC set to  0.000000
12/8/2012	4:15:23 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	4:15:23 PM	Tube furnace set to 0
12/8/2012	4:15:24 PM	Run finished at 4:15 PM
12/8/2012	4:15:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2012	4:18:37 PM	Recipe started at 4:18 PM
12/8/2012	4:18:37 PM	Helium valve closed
12/8/2012	4:18:37 PM	H2 valve closed
12/8/2012	4:18:37 PM	BCl3 valve closed
12/8/2012	4:18:37 PM	PH3 valve closed
12/8/2012	4:18:37 PM	SiCl4 pre valve closed
12/8/2012	4:18:37 PM	SiCl4 post valve closed
12/8/2012	4:18:37 PM	Bypass valve closed
12/8/2012	4:18:37 PM	Bubbler valve closed
12/8/2012	4:18:37 PM	Main Vac valve opened
12/8/2012	4:18:37 PM	Helium MFC set to  0.000000
12/8/2012	4:18:37 PM	H2 MFC set to  0.000000
12/8/2012	4:18:37 PM	BCl3 MFC set to  0.000000
12/8/2012	4:18:37 PM	PH3 MFC set to  0.000000
12/8/2012	4:18:37 PM	SiCl4 MFC set to  0.000000
12/8/2012	4:18:37 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	4:18:37 PM	Tube furnace set to 150
12/8/2012	5:35:18 PM	H2 valve closed
12/8/2012	5:35:18 PM	BCl3 valve closed
12/8/2012	5:35:18 PM	PH3 valve closed
12/8/2012	5:35:18 PM	SiCl4 pre valve closed
12/8/2012	5:35:18 PM	SiCl4 post valve closed
12/8/2012	5:35:18 PM	Bypass valve closed
12/8/2012	5:35:18 PM	Bubbler valve closed
12/8/2012	5:35:18 PM	Helium valve opened
12/8/2012	5:35:19 PM	Main Vac valve opened
12/8/2012	5:35:19 PM	Helium MFC set to  20.000000
12/8/2012	5:35:19 PM	H2 MFC set to  0.000000
12/8/2012	5:35:19 PM	BCl3 MFC set to  0.000000
12/8/2012	5:35:19 PM	PH3 MFC set to  0.000000
12/8/2012	5:35:19 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:35:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:35:19 PM	Tube furnace set to 150
12/8/2012	5:35:49 PM	Helium valve closed
12/8/2012	5:35:49 PM	H2 valve closed
12/8/2012	5:35:49 PM	BCl3 valve closed
12/8/2012	5:35:49 PM	PH3 valve closed
12/8/2012	5:35:49 PM	SiCl4 pre valve closed
12/8/2012	5:35:49 PM	SiCl4 post valve closed
12/8/2012	5:35:49 PM	Bypass valve closed
12/8/2012	5:35:49 PM	Bubbler valve closed
12/8/2012	5:35:49 PM	Main Vac valve opened
12/8/2012	5:35:49 PM	Helium MFC set to  0.000000
12/8/2012	5:35:49 PM	H2 MFC set to  0.000000
12/8/2012	5:35:49 PM	BCl3 MFC set to  0.000000
12/8/2012	5:35:49 PM	PH3 MFC set to  0.000000
12/8/2012	5:35:49 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:35:49 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:35:49 PM	Tube furnace set to 150
12/8/2012	5:36:19 PM	H2 valve closed
12/8/2012	5:36:19 PM	BCl3 valve closed
12/8/2012	5:36:19 PM	PH3 valve closed
12/8/2012	5:36:19 PM	SiCl4 pre valve closed
12/8/2012	5:36:19 PM	SiCl4 post valve closed
12/8/2012	5:36:19 PM	Bypass valve closed
12/8/2012	5:36:19 PM	Bubbler valve closed
12/8/2012	5:36:19 PM	Helium valve opened
12/8/2012	5:36:19 PM	Main Vac valve opened
12/8/2012	5:36:19 PM	Helium MFC set to  20.000000
12/8/2012	5:36:19 PM	H2 MFC set to  0.000000
12/8/2012	5:36:19 PM	BCl3 MFC set to  0.000000
12/8/2012	5:36:19 PM	PH3 MFC set to  0.000000
12/8/2012	5:36:19 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:36:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:36:19 PM	Tube furnace set to 150
12/8/2012	5:36:49 PM	Helium valve closed
12/8/2012	5:36:49 PM	H2 valve closed
12/8/2012	5:36:49 PM	BCl3 valve closed
12/8/2012	5:36:49 PM	PH3 valve closed
12/8/2012	5:36:49 PM	SiCl4 pre valve closed
12/8/2012	5:36:49 PM	SiCl4 post valve closed
12/8/2012	5:36:49 PM	Bypass valve closed
12/8/2012	5:36:49 PM	Bubbler valve closed
12/8/2012	5:36:49 PM	Main Vac valve opened
12/8/2012	5:36:49 PM	Helium MFC set to  0.000000
12/8/2012	5:36:49 PM	H2 MFC set to  0.000000
12/8/2012	5:36:49 PM	BCl3 MFC set to  0.000000
12/8/2012	5:36:49 PM	PH3 MFC set to  0.000000
12/8/2012	5:36:49 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:36:49 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:36:49 PM	Tube furnace set to 150
12/8/2012	5:37:19 PM	H2 valve closed
12/8/2012	5:37:19 PM	BCl3 valve closed
12/8/2012	5:37:19 PM	PH3 valve closed
12/8/2012	5:37:19 PM	SiCl4 pre valve closed
12/8/2012	5:37:19 PM	SiCl4 post valve closed
12/8/2012	5:37:19 PM	Bypass valve closed
12/8/2012	5:37:19 PM	Bubbler valve closed
12/8/2012	5:37:19 PM	Helium valve opened
12/8/2012	5:37:19 PM	Main Vac valve opened
12/8/2012	5:37:19 PM	Helium MFC set to  20.000000
12/8/2012	5:37:19 PM	H2 MFC set to  0.000000
12/8/2012	5:37:20 PM	BCl3 MFC set to  0.000000
12/8/2012	5:37:20 PM	PH3 MFC set to  0.000000
12/8/2012	5:37:20 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:37:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:37:20 PM	Tube furnace set to 150
12/8/2012	5:37:50 PM	Helium valve closed
12/8/2012	5:37:50 PM	H2 valve closed
12/8/2012	5:37:50 PM	BCl3 valve closed
12/8/2012	5:37:50 PM	PH3 valve closed
12/8/2012	5:37:50 PM	SiCl4 pre valve closed
12/8/2012	5:37:50 PM	SiCl4 post valve closed
12/8/2012	5:37:50 PM	Bypass valve closed
12/8/2012	5:37:50 PM	Bubbler valve closed
12/8/2012	5:37:50 PM	Main Vac valve opened
12/8/2012	5:37:50 PM	Helium MFC set to  0.000000
12/8/2012	5:37:50 PM	H2 MFC set to  0.000000
12/8/2012	5:37:50 PM	BCl3 MFC set to  0.000000
12/8/2012	5:37:50 PM	PH3 MFC set to  0.000000
12/8/2012	5:37:50 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:37:50 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:37:50 PM	Tube furnace set to 150
12/8/2012	5:38:20 PM	H2 valve closed
12/8/2012	5:38:20 PM	BCl3 valve closed
12/8/2012	5:38:20 PM	PH3 valve closed
12/8/2012	5:38:20 PM	SiCl4 pre valve closed
12/8/2012	5:38:20 PM	SiCl4 post valve closed
12/8/2012	5:38:20 PM	Bypass valve closed
12/8/2012	5:38:20 PM	Bubbler valve closed
12/8/2012	5:38:20 PM	Helium valve opened
12/8/2012	5:38:20 PM	Main Vac valve opened
12/8/2012	5:38:20 PM	Helium MFC set to  20.000000
12/8/2012	5:38:20 PM	H2 MFC set to  0.000000
12/8/2012	5:38:20 PM	BCl3 MFC set to  0.000000
12/8/2012	5:38:20 PM	PH3 MFC set to  0.000000
12/8/2012	5:38:20 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:38:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:38:20 PM	Tube furnace set to 150
12/8/2012	5:38:50 PM	Helium valve closed
12/8/2012	5:38:50 PM	H2 valve closed
12/8/2012	5:38:50 PM	BCl3 valve closed
12/8/2012	5:38:50 PM	PH3 valve closed
12/8/2012	5:38:50 PM	SiCl4 pre valve closed
12/8/2012	5:38:50 PM	SiCl4 post valve closed
12/8/2012	5:38:50 PM	Bypass valve closed
12/8/2012	5:38:50 PM	Bubbler valve closed
12/8/2012	5:38:50 PM	Main Vac valve opened
12/8/2012	5:38:50 PM	Helium MFC set to  0.000000
12/8/2012	5:38:50 PM	H2 MFC set to  0.000000
12/8/2012	5:38:50 PM	BCl3 MFC set to  0.000000
12/8/2012	5:38:50 PM	PH3 MFC set to  0.000000
12/8/2012	5:38:50 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:38:50 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:38:50 PM	Tube furnace set to 150
12/8/2012	5:39:20 PM	H2 valve closed
12/8/2012	5:39:20 PM	BCl3 valve closed
12/8/2012	5:39:20 PM	PH3 valve closed
12/8/2012	5:39:20 PM	SiCl4 pre valve closed
12/8/2012	5:39:20 PM	SiCl4 post valve closed
12/8/2012	5:39:20 PM	Bypass valve closed
12/8/2012	5:39:20 PM	Bubbler valve closed
12/8/2012	5:39:20 PM	Helium valve opened
12/8/2012	5:39:20 PM	Main Vac valve opened
12/8/2012	5:39:20 PM	Helium MFC set to  20.000000
12/8/2012	5:39:20 PM	H2 MFC set to  0.000000
12/8/2012	5:39:20 PM	BCl3 MFC set to  0.000000
12/8/2012	5:39:20 PM	PH3 MFC set to  0.000000
12/8/2012	5:39:20 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:39:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:39:21 PM	Tube furnace set to 150
12/8/2012	5:39:51 PM	Helium valve closed
12/8/2012	5:39:51 PM	H2 valve closed
12/8/2012	5:39:51 PM	BCl3 valve closed
12/8/2012	5:39:51 PM	PH3 valve closed
12/8/2012	5:39:51 PM	SiCl4 pre valve closed
12/8/2012	5:39:51 PM	SiCl4 post valve closed
12/8/2012	5:39:51 PM	Bypass valve closed
12/8/2012	5:39:51 PM	Bubbler valve closed
12/8/2012	5:39:51 PM	Main Vac valve opened
12/8/2012	5:39:51 PM	Helium MFC set to  0.000000
12/8/2012	5:39:51 PM	H2 MFC set to  0.000000
12/8/2012	5:39:51 PM	BCl3 MFC set to  0.000000
12/8/2012	5:39:51 PM	PH3 MFC set to  0.000000
12/8/2012	5:39:51 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:39:51 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:39:51 PM	Tube furnace set to 150
12/8/2012	5:40:21 PM	H2 valve closed
12/8/2012	5:40:21 PM	BCl3 valve closed
12/8/2012	5:40:21 PM	PH3 valve closed
12/8/2012	5:40:21 PM	SiCl4 pre valve closed
12/8/2012	5:40:21 PM	SiCl4 post valve closed
12/8/2012	5:40:21 PM	Bypass valve closed
12/8/2012	5:40:21 PM	Bubbler valve closed
12/8/2012	5:40:21 PM	Helium valve opened
12/8/2012	5:40:21 PM	Main Vac valve opened
12/8/2012	5:40:21 PM	Helium MFC set to  20.000000
12/8/2012	5:40:21 PM	H2 MFC set to  0.000000
12/8/2012	5:40:21 PM	BCl3 MFC set to  0.000000
12/8/2012	5:40:21 PM	PH3 MFC set to  0.000000
12/8/2012	5:40:21 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:40:21 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:40:21 PM	Tube furnace set to 150
12/8/2012	5:40:51 PM	Helium valve closed
12/8/2012	5:40:51 PM	H2 valve closed
12/8/2012	5:40:51 PM	BCl3 valve closed
12/8/2012	5:40:51 PM	PH3 valve closed
12/8/2012	5:40:51 PM	SiCl4 pre valve closed
12/8/2012	5:40:51 PM	SiCl4 post valve closed
12/8/2012	5:40:51 PM	Bypass valve closed
12/8/2012	5:40:51 PM	Bubbler valve closed
12/8/2012	5:40:51 PM	Main Vac valve opened
12/8/2012	5:40:51 PM	Helium MFC set to  0.000000
12/8/2012	5:40:51 PM	H2 MFC set to  0.000000
12/8/2012	5:40:51 PM	BCl3 MFC set to  0.000000
12/8/2012	5:40:51 PM	PH3 MFC set to  0.000000
12/8/2012	5:40:51 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:40:51 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:40:51 PM	Tube furnace set to 150
12/8/2012	5:41:21 PM	H2 valve closed
12/8/2012	5:41:21 PM	BCl3 valve closed
12/8/2012	5:41:21 PM	PH3 valve closed
12/8/2012	5:41:21 PM	SiCl4 pre valve closed
12/8/2012	5:41:21 PM	SiCl4 post valve closed
12/8/2012	5:41:21 PM	Bypass valve closed
12/8/2012	5:41:21 PM	Bubbler valve closed
12/8/2012	5:41:21 PM	Helium valve opened
12/8/2012	5:41:21 PM	Main Vac valve opened
12/8/2012	5:41:21 PM	Helium MFC set to  20.000000
12/8/2012	5:41:21 PM	H2 MFC set to  0.000000
12/8/2012	5:41:21 PM	BCl3 MFC set to  0.000000
12/8/2012	5:41:21 PM	PH3 MFC set to  0.000000
12/8/2012	5:41:21 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:41:21 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:41:22 PM	Tube furnace set to 150
12/8/2012	5:41:52 PM	Helium valve closed
12/8/2012	5:41:52 PM	H2 valve closed
12/8/2012	5:41:52 PM	BCl3 valve closed
12/8/2012	5:41:52 PM	PH3 valve closed
12/8/2012	5:41:52 PM	SiCl4 pre valve closed
12/8/2012	5:41:52 PM	SiCl4 post valve closed
12/8/2012	5:41:52 PM	Bypass valve closed
12/8/2012	5:41:52 PM	Bubbler valve closed
12/8/2012	5:41:52 PM	Main Vac valve opened
12/8/2012	5:41:52 PM	Helium MFC set to  0.000000
12/8/2012	5:41:52 PM	H2 MFC set to  0.000000
12/8/2012	5:41:52 PM	BCl3 MFC set to  0.000000
12/8/2012	5:41:52 PM	PH3 MFC set to  0.000000
12/8/2012	5:41:52 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:41:52 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:41:52 PM	Tube furnace set to 150
12/8/2012	5:42:22 PM	H2 valve closed
12/8/2012	5:42:22 PM	BCl3 valve closed
12/8/2012	5:42:22 PM	PH3 valve closed
12/8/2012	5:42:22 PM	SiCl4 pre valve closed
12/8/2012	5:42:22 PM	SiCl4 post valve closed
12/8/2012	5:42:22 PM	Bypass valve closed
12/8/2012	5:42:22 PM	Bubbler valve closed
12/8/2012	5:42:22 PM	Helium valve opened
12/8/2012	5:42:22 PM	Main Vac valve opened
12/8/2012	5:42:22 PM	Helium MFC set to  20.000000
12/8/2012	5:42:22 PM	H2 MFC set to  0.000000
12/8/2012	5:42:22 PM	BCl3 MFC set to  0.000000
12/8/2012	5:42:22 PM	PH3 MFC set to  0.000000
12/8/2012	5:42:22 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:42:22 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:42:22 PM	Tube furnace set to 150
12/8/2012	5:42:52 PM	Helium valve closed
12/8/2012	5:42:52 PM	H2 valve closed
12/8/2012	5:42:52 PM	BCl3 valve closed
12/8/2012	5:42:52 PM	PH3 valve closed
12/8/2012	5:42:52 PM	SiCl4 pre valve closed
12/8/2012	5:42:52 PM	SiCl4 post valve closed
12/8/2012	5:42:52 PM	Bypass valve closed
12/8/2012	5:42:52 PM	Bubbler valve closed
12/8/2012	5:42:52 PM	Main Vac valve opened
12/8/2012	5:42:52 PM	Helium MFC set to  0.000000
12/8/2012	5:42:52 PM	H2 MFC set to  0.000000
12/8/2012	5:42:52 PM	BCl3 MFC set to  0.000000
12/8/2012	5:42:52 PM	PH3 MFC set to  0.000000
12/8/2012	5:42:52 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:42:52 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:42:52 PM	Tube furnace set to 150
12/8/2012	5:43:22 PM	H2 valve closed
12/8/2012	5:43:22 PM	BCl3 valve closed
12/8/2012	5:43:22 PM	PH3 valve closed
12/8/2012	5:43:22 PM	SiCl4 pre valve closed
12/8/2012	5:43:22 PM	SiCl4 post valve closed
12/8/2012	5:43:22 PM	Bypass valve closed
12/8/2012	5:43:22 PM	Bubbler valve closed
12/8/2012	5:43:22 PM	Helium valve opened
12/8/2012	5:43:22 PM	Main Vac valve opened
12/8/2012	5:43:22 PM	Helium MFC set to  20.000000
12/8/2012	5:43:22 PM	H2 MFC set to  0.000000
12/8/2012	5:43:22 PM	BCl3 MFC set to  0.000000
12/8/2012	5:43:22 PM	PH3 MFC set to  0.000000
12/8/2012	5:43:22 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:43:22 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:43:23 PM	Tube furnace set to 150
12/8/2012	5:43:53 PM	Helium valve closed
12/8/2012	5:43:53 PM	H2 valve closed
12/8/2012	5:43:53 PM	BCl3 valve closed
12/8/2012	5:43:53 PM	PH3 valve closed
12/8/2012	5:43:53 PM	SiCl4 pre valve closed
12/8/2012	5:43:53 PM	SiCl4 post valve closed
12/8/2012	5:43:53 PM	Bypass valve closed
12/8/2012	5:43:53 PM	Bubbler valve closed
12/8/2012	5:43:53 PM	Main Vac valve opened
12/8/2012	5:43:53 PM	Helium MFC set to  0.000000
12/8/2012	5:43:53 PM	H2 MFC set to  0.000000
12/8/2012	5:43:53 PM	BCl3 MFC set to  0.000000
12/8/2012	5:43:53 PM	PH3 MFC set to  0.000000
12/8/2012	5:43:53 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:43:53 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:43:53 PM	Tube furnace set to 150
12/8/2012	5:44:23 PM	H2 valve closed
12/8/2012	5:44:23 PM	BCl3 valve closed
12/8/2012	5:44:23 PM	PH3 valve closed
12/8/2012	5:44:23 PM	SiCl4 pre valve closed
12/8/2012	5:44:23 PM	SiCl4 post valve closed
12/8/2012	5:44:23 PM	Bypass valve closed
12/8/2012	5:44:23 PM	Bubbler valve closed
12/8/2012	5:44:23 PM	Helium valve opened
12/8/2012	5:44:23 PM	Main Vac valve opened
12/8/2012	5:44:23 PM	Helium MFC set to  20.000000
12/8/2012	5:44:23 PM	H2 MFC set to  0.000000
12/8/2012	5:44:23 PM	BCl3 MFC set to  0.000000
12/8/2012	5:44:23 PM	PH3 MFC set to  0.000000
12/8/2012	5:44:23 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:44:23 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:44:23 PM	Tube furnace set to 150
12/8/2012	5:44:53 PM	Helium valve closed
12/8/2012	5:44:53 PM	H2 valve closed
12/8/2012	5:44:53 PM	BCl3 valve closed
12/8/2012	5:44:53 PM	PH3 valve closed
12/8/2012	5:44:53 PM	SiCl4 pre valve closed
12/8/2012	5:44:53 PM	SiCl4 post valve closed
12/8/2012	5:44:53 PM	Bypass valve closed
12/8/2012	5:44:53 PM	Bubbler valve closed
12/8/2012	5:44:53 PM	Main Vac valve opened
12/8/2012	5:44:53 PM	Helium MFC set to  0.000000
12/8/2012	5:44:53 PM	H2 MFC set to  0.000000
12/8/2012	5:44:53 PM	BCl3 MFC set to  0.000000
12/8/2012	5:44:53 PM	PH3 MFC set to  0.000000
12/8/2012	5:44:53 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:44:53 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:44:53 PM	Tube furnace set to 150
12/8/2012	5:44:54 PM	Run finished at 5:44 PM
12/8/2012	5:45:22 PM	Main Vac valve closed
12/8/2012	5:45:33 PM	Main Vac valve opened
12/8/2012	5:45:42 PM	Recipe started at 5:45 PM
12/8/2012	5:45:42 PM	Helium valve closed
12/8/2012	5:45:42 PM	H2 valve closed
12/8/2012	5:45:42 PM	BCl3 valve closed
12/8/2012	5:45:42 PM	PH3 valve closed
12/8/2012	5:45:43 PM	SiCl4 pre valve closed
12/8/2012	5:45:43 PM	SiCl4 post valve closed
12/8/2012	5:45:43 PM	Bypass valve closed
12/8/2012	5:45:43 PM	Bubbler valve closed
12/8/2012	5:45:43 PM	Main Vac valve opened
12/8/2012	5:45:43 PM	Helium MFC set to  0.000000
12/8/2012	5:45:43 PM	H2 MFC set to  0.000000
12/8/2012	5:45:43 PM	BCl3 MFC set to  0.000000
12/8/2012	5:45:43 PM	PH3 MFC set to  0.000000
12/8/2012	5:45:43 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:45:43 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:45:43 PM	Tube furnace set to 150
12/8/2012	5:45:46 PM	H2 valve closed
12/8/2012	5:45:46 PM	BCl3 valve closed
12/8/2012	5:45:46 PM	PH3 valve closed
12/8/2012	5:45:46 PM	SiCl4 pre valve closed
12/8/2012	5:45:46 PM	SiCl4 post valve closed
12/8/2012	5:45:46 PM	Bypass valve closed
12/8/2012	5:45:46 PM	Bubbler valve closed
12/8/2012	5:45:46 PM	Helium valve opened
12/8/2012	5:45:46 PM	Main Vac valve opened
12/8/2012	5:45:46 PM	Helium MFC set to  20.000000
12/8/2012	5:45:46 PM	H2 MFC set to  0.000000
12/8/2012	5:45:46 PM	BCl3 MFC set to  0.000000
12/8/2012	5:45:46 PM	PH3 MFC set to  0.000000
12/8/2012	5:45:46 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:45:46 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:45:46 PM	Tube furnace set to 150
12/8/2012	5:46:16 PM	Helium valve closed
12/8/2012	5:46:16 PM	H2 valve closed
12/8/2012	5:46:16 PM	BCl3 valve closed
12/8/2012	5:46:16 PM	PH3 valve closed
12/8/2012	5:46:16 PM	SiCl4 pre valve closed
12/8/2012	5:46:16 PM	SiCl4 post valve closed
12/8/2012	5:46:16 PM	Bypass valve closed
12/8/2012	5:46:16 PM	Bubbler valve closed
12/8/2012	5:46:16 PM	Main Vac valve opened
12/8/2012	5:46:16 PM	Helium MFC set to  0.000000
12/8/2012	5:46:16 PM	H2 MFC set to  0.000000
12/8/2012	5:46:16 PM	BCl3 MFC set to  0.000000
12/8/2012	5:46:16 PM	PH3 MFC set to  0.000000
12/8/2012	5:46:16 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:46:16 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:46:16 PM	Tube furnace set to 150
12/8/2012	5:46:46 PM	H2 valve closed
12/8/2012	5:46:46 PM	BCl3 valve closed
12/8/2012	5:46:46 PM	PH3 valve closed
12/8/2012	5:46:46 PM	SiCl4 pre valve closed
12/8/2012	5:46:46 PM	SiCl4 post valve closed
12/8/2012	5:46:46 PM	Bypass valve closed
12/8/2012	5:46:46 PM	Bubbler valve closed
12/8/2012	5:46:46 PM	Helium valve opened
12/8/2012	5:46:46 PM	Main Vac valve opened
12/8/2012	5:46:46 PM	Helium MFC set to  20.000000
12/8/2012	5:46:46 PM	H2 MFC set to  0.000000
12/8/2012	5:46:46 PM	BCl3 MFC set to  0.000000
12/8/2012	5:46:46 PM	PH3 MFC set to  0.000000
12/8/2012	5:46:46 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:46:46 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:46:46 PM	Tube furnace set to 150
12/8/2012	5:47:16 PM	Helium valve closed
12/8/2012	5:47:16 PM	H2 valve closed
12/8/2012	5:47:16 PM	BCl3 valve closed
12/8/2012	5:47:16 PM	PH3 valve closed
12/8/2012	5:47:16 PM	SiCl4 pre valve closed
12/8/2012	5:47:16 PM	SiCl4 post valve closed
12/8/2012	5:47:17 PM	Bypass valve closed
12/8/2012	5:47:17 PM	Bubbler valve closed
12/8/2012	5:47:17 PM	Main Vac valve opened
12/8/2012	5:47:17 PM	Helium MFC set to  0.000000
12/8/2012	5:47:17 PM	H2 MFC set to  0.000000
12/8/2012	5:47:17 PM	BCl3 MFC set to  0.000000
12/8/2012	5:47:17 PM	PH3 MFC set to  0.000000
12/8/2012	5:47:17 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:47:17 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:47:17 PM	Tube furnace set to 150
12/8/2012	5:47:47 PM	H2 valve closed
12/8/2012	5:47:47 PM	BCl3 valve closed
12/8/2012	5:47:47 PM	PH3 valve closed
12/8/2012	5:47:47 PM	SiCl4 pre valve closed
12/8/2012	5:47:47 PM	SiCl4 post valve closed
12/8/2012	5:47:47 PM	Bypass valve closed
12/8/2012	5:47:47 PM	Bubbler valve closed
12/8/2012	5:47:47 PM	Helium valve opened
12/8/2012	5:47:47 PM	Main Vac valve opened
12/8/2012	5:47:47 PM	Helium MFC set to  20.000000
12/8/2012	5:47:47 PM	H2 MFC set to  0.000000
12/8/2012	5:47:47 PM	BCl3 MFC set to  0.000000
12/8/2012	5:47:47 PM	PH3 MFC set to  0.000000
12/8/2012	5:47:47 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:47:47 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:47:47 PM	Tube furnace set to 150
12/8/2012	5:48:17 PM	Helium valve closed
12/8/2012	5:48:17 PM	H2 valve closed
12/8/2012	5:48:17 PM	BCl3 valve closed
12/8/2012	5:48:17 PM	PH3 valve closed
12/8/2012	5:48:17 PM	SiCl4 pre valve closed
12/8/2012	5:48:17 PM	SiCl4 post valve closed
12/8/2012	5:48:17 PM	Bypass valve closed
12/8/2012	5:48:17 PM	Bubbler valve closed
12/8/2012	5:48:17 PM	Main Vac valve opened
12/8/2012	5:48:17 PM	Helium MFC set to  0.000000
12/8/2012	5:48:17 PM	H2 MFC set to  0.000000
12/8/2012	5:48:17 PM	BCl3 MFC set to  0.000000
12/8/2012	5:48:17 PM	PH3 MFC set to  0.000000
12/8/2012	5:48:17 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:48:17 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:48:17 PM	Tube furnace set to 150
12/8/2012	5:48:47 PM	H2 valve closed
12/8/2012	5:48:47 PM	BCl3 valve closed
12/8/2012	5:48:47 PM	PH3 valve closed
12/8/2012	5:48:47 PM	SiCl4 pre valve closed
12/8/2012	5:48:47 PM	SiCl4 post valve closed
12/8/2012	5:48:47 PM	Bypass valve closed
12/8/2012	5:48:47 PM	Bubbler valve closed
12/8/2012	5:48:47 PM	Helium valve opened
12/8/2012	5:48:47 PM	Main Vac valve opened
12/8/2012	5:48:47 PM	Helium MFC set to  20.000000
12/8/2012	5:48:47 PM	H2 MFC set to  0.000000
12/8/2012	5:48:47 PM	BCl3 MFC set to  0.000000
12/8/2012	5:48:47 PM	PH3 MFC set to  0.000000
12/8/2012	5:48:47 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:48:47 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:48:47 PM	Tube furnace set to 150
12/8/2012	5:49:17 PM	Helium valve closed
12/8/2012	5:49:17 PM	H2 valve closed
12/8/2012	5:49:17 PM	BCl3 valve closed
12/8/2012	5:49:17 PM	PH3 valve closed
12/8/2012	5:49:17 PM	SiCl4 pre valve closed
12/8/2012	5:49:17 PM	SiCl4 post valve closed
12/8/2012	5:49:17 PM	Bypass valve closed
12/8/2012	5:49:17 PM	Bubbler valve closed
12/8/2012	5:49:17 PM	Main Vac valve opened
12/8/2012	5:49:17 PM	Helium MFC set to  0.000000
12/8/2012	5:49:18 PM	H2 MFC set to  0.000000
12/8/2012	5:49:18 PM	BCl3 MFC set to  0.000000
12/8/2012	5:49:18 PM	PH3 MFC set to  0.000000
12/8/2012	5:49:18 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:49:18 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:49:18 PM	Tube furnace set to 150
12/8/2012	5:49:48 PM	H2 valve closed
12/8/2012	5:49:48 PM	BCl3 valve closed
12/8/2012	5:49:48 PM	PH3 valve closed
12/8/2012	5:49:48 PM	SiCl4 pre valve closed
12/8/2012	5:49:48 PM	SiCl4 post valve closed
12/8/2012	5:49:48 PM	Bypass valve closed
12/8/2012	5:49:48 PM	Bubbler valve closed
12/8/2012	5:49:48 PM	Helium valve opened
12/8/2012	5:49:48 PM	Main Vac valve opened
12/8/2012	5:49:48 PM	Helium MFC set to  20.000000
12/8/2012	5:49:48 PM	H2 MFC set to  0.000000
12/8/2012	5:49:48 PM	BCl3 MFC set to  0.000000
12/8/2012	5:49:48 PM	PH3 MFC set to  0.000000
12/8/2012	5:49:48 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:49:48 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:49:48 PM	Tube furnace set to 150
12/8/2012	5:50:18 PM	Helium valve closed
12/8/2012	5:50:18 PM	H2 valve closed
12/8/2012	5:50:18 PM	BCl3 valve closed
12/8/2012	5:50:18 PM	PH3 valve closed
12/8/2012	5:50:18 PM	SiCl4 pre valve closed
12/8/2012	5:50:18 PM	SiCl4 post valve closed
12/8/2012	5:50:18 PM	Bypass valve closed
12/8/2012	5:50:18 PM	Bubbler valve closed
12/8/2012	5:50:18 PM	Main Vac valve opened
12/8/2012	5:50:18 PM	Helium MFC set to  0.000000
12/8/2012	5:50:18 PM	H2 MFC set to  0.000000
12/8/2012	5:50:18 PM	BCl3 MFC set to  0.000000
12/8/2012	5:50:18 PM	PH3 MFC set to  0.000000
12/8/2012	5:50:18 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:50:18 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:50:18 PM	Tube furnace set to 150
12/8/2012	5:50:48 PM	H2 valve closed
12/8/2012	5:50:48 PM	BCl3 valve closed
12/8/2012	5:50:48 PM	PH3 valve closed
12/8/2012	5:50:48 PM	SiCl4 pre valve closed
12/8/2012	5:50:48 PM	SiCl4 post valve closed
12/8/2012	5:50:48 PM	Bypass valve closed
12/8/2012	5:50:48 PM	Bubbler valve closed
12/8/2012	5:50:48 PM	Helium valve opened
12/8/2012	5:50:48 PM	Main Vac valve opened
12/8/2012	5:50:48 PM	Helium MFC set to  20.000000
12/8/2012	5:50:48 PM	H2 MFC set to  0.000000
12/8/2012	5:50:48 PM	BCl3 MFC set to  0.000000
12/8/2012	5:50:48 PM	PH3 MFC set to  0.000000
12/8/2012	5:50:48 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:50:48 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:50:48 PM	Tube furnace set to 150
12/8/2012	5:51:18 PM	Helium valve closed
12/8/2012	5:51:18 PM	H2 valve closed
12/8/2012	5:51:18 PM	BCl3 valve closed
12/8/2012	5:51:18 PM	PH3 valve closed
12/8/2012	5:51:18 PM	SiCl4 pre valve closed
12/8/2012	5:51:18 PM	SiCl4 post valve closed
12/8/2012	5:51:18 PM	Bypass valve closed
12/8/2012	5:51:18 PM	Bubbler valve closed
12/8/2012	5:51:18 PM	Main Vac valve opened
12/8/2012	5:51:18 PM	Helium MFC set to  0.000000
12/8/2012	5:51:18 PM	H2 MFC set to  0.000000
12/8/2012	5:51:19 PM	BCl3 MFC set to  0.000000
12/8/2012	5:51:19 PM	PH3 MFC set to  0.000000
12/8/2012	5:51:19 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:51:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:51:19 PM	Tube furnace set to 150
12/8/2012	5:51:49 PM	H2 valve closed
12/8/2012	5:51:49 PM	BCl3 valve closed
12/8/2012	5:51:49 PM	PH3 valve closed
12/8/2012	5:51:49 PM	SiCl4 pre valve closed
12/8/2012	5:51:49 PM	SiCl4 post valve closed
12/8/2012	5:51:49 PM	Bypass valve closed
12/8/2012	5:51:49 PM	Bubbler valve closed
12/8/2012	5:51:49 PM	Helium valve opened
12/8/2012	5:51:49 PM	Main Vac valve opened
12/8/2012	5:51:49 PM	Helium MFC set to  20.000000
12/8/2012	5:51:49 PM	H2 MFC set to  0.000000
12/8/2012	5:51:49 PM	BCl3 MFC set to  0.000000
12/8/2012	5:51:49 PM	PH3 MFC set to  0.000000
12/8/2012	5:51:49 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:51:49 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:51:49 PM	Tube furnace set to 150
12/8/2012	5:52:19 PM	Helium valve closed
12/8/2012	5:52:19 PM	H2 valve closed
12/8/2012	5:52:19 PM	BCl3 valve closed
12/8/2012	5:52:19 PM	PH3 valve closed
12/8/2012	5:52:19 PM	SiCl4 pre valve closed
12/8/2012	5:52:19 PM	SiCl4 post valve closed
12/8/2012	5:52:19 PM	Bypass valve closed
12/8/2012	5:52:19 PM	Bubbler valve closed
12/8/2012	5:52:19 PM	Main Vac valve opened
12/8/2012	5:52:19 PM	Helium MFC set to  0.000000
12/8/2012	5:52:19 PM	H2 MFC set to  0.000000
12/8/2012	5:52:19 PM	BCl3 MFC set to  0.000000
12/8/2012	5:52:19 PM	PH3 MFC set to  0.000000
12/8/2012	5:52:19 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:52:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:52:19 PM	Tube furnace set to 150
12/8/2012	5:52:49 PM	H2 valve closed
12/8/2012	5:52:49 PM	BCl3 valve closed
12/8/2012	5:52:49 PM	PH3 valve closed
12/8/2012	5:52:49 PM	SiCl4 pre valve closed
12/8/2012	5:52:49 PM	SiCl4 post valve closed
12/8/2012	5:52:49 PM	Bypass valve closed
12/8/2012	5:52:49 PM	Bubbler valve closed
12/8/2012	5:52:49 PM	Helium valve opened
12/8/2012	5:52:49 PM	Main Vac valve opened
12/8/2012	5:52:49 PM	Helium MFC set to  20.000000
12/8/2012	5:52:49 PM	H2 MFC set to  0.000000
12/8/2012	5:52:49 PM	BCl3 MFC set to  0.000000
12/8/2012	5:52:49 PM	PH3 MFC set to  0.000000
12/8/2012	5:52:49 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:52:49 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:52:49 PM	Tube furnace set to 150
12/8/2012	5:53:19 PM	Helium valve closed
12/8/2012	5:53:19 PM	H2 valve closed
12/8/2012	5:53:19 PM	BCl3 valve closed
12/8/2012	5:53:19 PM	PH3 valve closed
12/8/2012	5:53:19 PM	SiCl4 pre valve closed
12/8/2012	5:53:19 PM	SiCl4 post valve closed
12/8/2012	5:53:19 PM	Bypass valve closed
12/8/2012	5:53:19 PM	Bubbler valve closed
12/8/2012	5:53:19 PM	Main Vac valve opened
12/8/2012	5:53:19 PM	Helium MFC set to  0.000000
12/8/2012	5:53:19 PM	H2 MFC set to  0.000000
12/8/2012	5:53:19 PM	BCl3 MFC set to  0.000000
12/8/2012	5:53:20 PM	PH3 MFC set to  0.000000
12/8/2012	5:53:20 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:53:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:53:20 PM	Tube furnace set to 150
12/8/2012	5:53:50 PM	H2 valve closed
12/8/2012	5:53:50 PM	BCl3 valve closed
12/8/2012	5:53:50 PM	PH3 valve closed
12/8/2012	5:53:50 PM	SiCl4 pre valve closed
12/8/2012	5:53:50 PM	SiCl4 post valve closed
12/8/2012	5:53:50 PM	Bypass valve closed
12/8/2012	5:53:50 PM	Bubbler valve closed
12/8/2012	5:53:50 PM	Helium valve opened
12/8/2012	5:53:50 PM	Main Vac valve opened
12/8/2012	5:53:50 PM	Helium MFC set to  20.000000
12/8/2012	5:53:50 PM	H2 MFC set to  0.000000
12/8/2012	5:53:50 PM	BCl3 MFC set to  0.000000
12/8/2012	5:53:50 PM	PH3 MFC set to  0.000000
12/8/2012	5:53:50 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:53:50 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:53:50 PM	Tube furnace set to 150
12/8/2012	5:54:20 PM	Helium valve closed
12/8/2012	5:54:20 PM	H2 valve closed
12/8/2012	5:54:20 PM	BCl3 valve closed
12/8/2012	5:54:20 PM	PH3 valve closed
12/8/2012	5:54:20 PM	SiCl4 pre valve closed
12/8/2012	5:54:20 PM	SiCl4 post valve closed
12/8/2012	5:54:20 PM	Bypass valve closed
12/8/2012	5:54:20 PM	Bubbler valve closed
12/8/2012	5:54:20 PM	Main Vac valve opened
12/8/2012	5:54:20 PM	Helium MFC set to  0.000000
12/8/2012	5:54:20 PM	H2 MFC set to  0.000000
12/8/2012	5:54:20 PM	BCl3 MFC set to  0.000000
12/8/2012	5:54:20 PM	PH3 MFC set to  0.000000
12/8/2012	5:54:20 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:54:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:54:20 PM	Tube furnace set to 150
12/8/2012	5:54:50 PM	H2 valve closed
12/8/2012	5:54:50 PM	BCl3 valve closed
12/8/2012	5:54:50 PM	PH3 valve closed
12/8/2012	5:54:50 PM	SiCl4 pre valve closed
12/8/2012	5:54:50 PM	SiCl4 post valve closed
12/8/2012	5:54:50 PM	Bypass valve closed
12/8/2012	5:54:50 PM	Bubbler valve closed
12/8/2012	5:54:50 PM	Helium valve opened
12/8/2012	5:54:50 PM	Main Vac valve opened
12/8/2012	5:54:50 PM	Helium MFC set to  20.000000
12/8/2012	5:54:50 PM	H2 MFC set to  0.000000
12/8/2012	5:54:50 PM	BCl3 MFC set to  0.000000
12/8/2012	5:54:50 PM	PH3 MFC set to  0.000000
12/8/2012	5:54:50 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:54:50 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:54:50 PM	Tube furnace set to 150
12/8/2012	5:55:20 PM	Helium valve closed
12/8/2012	5:55:20 PM	H2 valve closed
12/8/2012	5:55:20 PM	BCl3 valve closed
12/8/2012	5:55:20 PM	PH3 valve closed
12/8/2012	5:55:20 PM	SiCl4 pre valve closed
12/8/2012	5:55:20 PM	SiCl4 post valve closed
12/8/2012	5:55:20 PM	Bypass valve closed
12/8/2012	5:55:20 PM	Bubbler valve closed
12/8/2012	5:55:20 PM	Main Vac valve opened
12/8/2012	5:55:20 PM	Helium MFC set to  0.000000
12/8/2012	5:55:20 PM	H2 MFC set to  0.000000
12/8/2012	5:55:20 PM	BCl3 MFC set to  0.000000
12/8/2012	5:55:20 PM	PH3 MFC set to  0.000000
12/8/2012	5:55:20 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:55:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:55:21 PM	Tube furnace set to 150
12/8/2012	5:55:22 PM	Run finished at 5:55 PM
12/8/2012	5:55:43 PM	Main Vac valve closed
12/8/2012	5:55:56 PM	Main Vac valve opened
12/8/2012	5:56:55 PM	Recipe started at 5:56 PM
12/8/2012	5:56:56 PM	Helium valve closed
12/8/2012	5:56:56 PM	H2 valve closed
12/8/2012	5:56:56 PM	BCl3 valve closed
12/8/2012	5:56:56 PM	PH3 valve closed
12/8/2012	5:56:56 PM	SiCl4 pre valve closed
12/8/2012	5:56:56 PM	SiCl4 post valve closed
12/8/2012	5:56:56 PM	Main Vac valve closed
12/8/2012	5:56:56 PM	Bypass valve closed
12/8/2012	5:56:56 PM	Bubbler valve closed
12/8/2012	5:56:56 PM	Helium MFC set to  0.000000
12/8/2012	5:56:56 PM	H2 MFC set to  0.000000
12/8/2012	5:56:56 PM	BCl3 MFC set to  0.000000
12/8/2012	5:56:56 PM	PH3 MFC set to  0.000000
12/8/2012	5:56:56 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:56:56 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:56:56 PM	Tube furnace set to 0
12/8/2012	5:56:59 PM	Helium valve closed
12/8/2012	5:56:59 PM	BCl3 valve closed
12/8/2012	5:56:59 PM	PH3 valve closed
12/8/2012	5:56:59 PM	SiCl4 pre valve closed
12/8/2012	5:56:59 PM	SiCl4 post valve closed
12/8/2012	5:56:59 PM	Main Vac valve closed
12/8/2012	5:56:59 PM	Bypass valve closed
12/8/2012	5:56:59 PM	Bubbler valve closed
12/8/2012	5:56:59 PM	H2 valve opened
12/8/2012	5:56:59 PM	Helium MFC set to  0.000000
12/8/2012	5:56:59 PM	H2 MFC set to  500.000000
12/8/2012	5:56:59 PM	BCl3 MFC set to  0.000000
12/8/2012	5:56:59 PM	PH3 MFC set to  0.000000
12/8/2012	5:56:59 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:56:59 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:56:59 PM	Tube furnace set to 0
12/8/2012	5:58:11 PM	Helium valve closed
12/8/2012	5:58:11 PM	BCl3 valve closed
12/8/2012	5:58:11 PM	PH3 valve closed
12/8/2012	5:58:11 PM	SiCl4 pre valve closed
12/8/2012	5:58:11 PM	SiCl4 post valve closed
12/8/2012	5:58:11 PM	Main Vac valve closed
12/8/2012	5:58:11 PM	Bypass valve closed
12/8/2012	5:58:11 PM	H2 valve opened
12/8/2012	5:58:11 PM	Bubbler valve opened
12/8/2012	5:58:11 PM	Helium MFC set to  0.000000
12/8/2012	5:58:11 PM	H2 MFC set to  500.000000
12/8/2012	5:58:11 PM	BCl3 MFC set to  0.000000
12/8/2012	5:58:11 PM	PH3 MFC set to  0.000000
12/8/2012	5:58:11 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:58:11 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:58:11 PM	Tube furnace set to 0
12/8/2012	5:58:12 PM	Helium valve closed
12/8/2012	5:58:12 PM	BCl3 valve closed
12/8/2012	5:58:12 PM	PH3 valve closed
12/8/2012	5:58:12 PM	SiCl4 pre valve closed
12/8/2012	5:58:13 PM	SiCl4 post valve closed
12/8/2012	5:58:13 PM	Main Vac valve closed
12/8/2012	5:58:13 PM	Bypass valve closed
12/8/2012	5:58:13 PM	H2 valve opened
12/8/2012	5:58:13 PM	Bubbler valve opened
12/8/2012	5:58:13 PM	Helium MFC set to  0.000000
12/8/2012	5:58:13 PM	H2 MFC set to  450.000000
12/8/2012	5:58:13 PM	BCl3 MFC set to  0.000000
12/8/2012	5:58:13 PM	PH3 MFC set to  0.000000
12/8/2012	5:58:13 PM	SiCl4 MFC set to  0.000000
12/8/2012	5:58:13 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	5:58:13 PM	Tube furnace set to 1000
12/8/2012	6:23:13 PM	Helium valve closed
12/8/2012	6:23:13 PM	PH3 valve closed
12/8/2012	6:23:13 PM	Main Vac valve closed
12/8/2012	6:23:13 PM	Bypass valve closed
12/8/2012	6:23:13 PM	H2 valve opened
12/8/2012	6:23:13 PM	BCl3 valve opened
12/8/2012	6:23:13 PM	SiCl4 pre valve opened
12/8/2012	6:23:13 PM	SiCl4 post valve opened
12/8/2012	6:23:13 PM	Bubbler valve opened
12/8/2012	6:23:13 PM	Helium MFC set to  0.000000
12/8/2012	6:23:13 PM	H2 MFC set to  450.000000
12/8/2012	6:23:13 PM	BCl3 MFC set to  1.500000
12/8/2012	6:23:13 PM	PH3 MFC set to  0.000000
12/8/2012	6:23:13 PM	SiCl4 MFC set to  50.000000
12/8/2012	6:23:13 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	6:23:13 PM	Tube furnace set to 1000
12/8/2012	6:28:13 PM	Helium valve closed
12/8/2012	6:28:13 PM	BCl3 valve closed
12/8/2012	6:28:13 PM	PH3 valve closed
12/8/2012	6:28:13 PM	SiCl4 pre valve closed
12/8/2012	6:28:13 PM	SiCl4 post valve closed
12/8/2012	6:28:13 PM	Main Vac valve closed
12/8/2012	6:28:13 PM	Bypass valve closed
12/8/2012	6:28:13 PM	H2 valve opened
12/8/2012	6:28:13 PM	Bubbler valve opened
12/8/2012	6:28:13 PM	Helium MFC set to  0.000000
12/8/2012	6:28:13 PM	H2 MFC set to  500.000000
12/8/2012	6:28:13 PM	BCl3 MFC set to  0.000000
12/8/2012	6:28:13 PM	PH3 MFC set to  0.000000
12/8/2012	6:28:13 PM	SiCl4 MFC set to  0.000000
12/8/2012	6:28:13 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	6:28:13 PM	Tube furnace set to 750
12/8/2012	6:33:13 PM	H2 valve closed
12/8/2012	6:33:13 PM	BCl3 valve closed
12/8/2012	6:33:13 PM	PH3 valve closed
12/8/2012	6:33:13 PM	SiCl4 pre valve closed
12/8/2012	6:33:13 PM	SiCl4 post valve closed
12/8/2012	6:33:13 PM	Main Vac valve closed
12/8/2012	6:33:13 PM	Bypass valve closed
12/8/2012	6:33:13 PM	Helium valve opened
12/8/2012	6:33:13 PM	Bubbler valve opened
12/8/2012	6:33:13 PM	Helium MFC set to  500.000000
12/8/2012	6:33:13 PM	H2 MFC set to  0.000000
12/8/2012	6:33:13 PM	BCl3 MFC set to  0.000000
12/8/2012	6:33:13 PM	PH3 MFC set to  0.000000
12/8/2012	6:33:13 PM	SiCl4 MFC set to  0.000000
12/8/2012	6:33:13 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	6:33:13 PM	Tube furnace set to 0
12/8/2012	6:53:13 PM	Helium valve closed
12/8/2012	6:53:13 PM	H2 valve closed
12/8/2012	6:53:13 PM	BCl3 valve closed
12/8/2012	6:53:13 PM	PH3 valve closed
12/8/2012	6:53:13 PM	SiCl4 pre valve closed
12/8/2012	6:53:13 PM	SiCl4 post valve closed
12/8/2012	6:53:13 PM	Main Vac valve closed
12/8/2012	6:53:13 PM	Bypass valve closed
12/8/2012	6:53:13 PM	Bubbler valve closed
12/8/2012	6:53:13 PM	Helium MFC set to  0.000000
12/8/2012	6:53:13 PM	H2 MFC set to  0.000000
12/8/2012	6:53:13 PM	BCl3 MFC set to  0.000000
12/8/2012	6:53:13 PM	PH3 MFC set to  0.000000
12/8/2012	6:53:13 PM	SiCl4 MFC set to  0.000000
12/8/2012	6:53:13 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	6:53:14 PM	Tube furnace set to 0
12/8/2012	6:53:15 PM	Run finished at 6:53 PM
12/8/2012	8:26:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2012	8:26:51 PM	Recipe started at 8:26 PM
12/8/2012	8:26:51 PM	Helium valve closed
12/8/2012	8:26:51 PM	H2 valve closed
12/8/2012	8:26:51 PM	BCl3 valve closed
12/8/2012	8:26:51 PM	PH3 valve closed
12/8/2012	8:26:51 PM	SiCl4 pre valve closed
12/8/2012	8:26:51 PM	SiCl4 post valve closed
12/8/2012	8:26:51 PM	Main Vac valve closed
12/8/2012	8:26:51 PM	Bypass valve closed
12/8/2012	8:26:51 PM	Bubbler valve closed
12/8/2012	8:26:51 PM	Helium MFC set to  0.000000
12/8/2012	8:26:51 PM	H2 MFC set to  0.000000
12/8/2012	8:26:51 PM	BCl3 MFC set to  0.000000
12/8/2012	8:26:52 PM	PH3 MFC set to  0.000000
12/8/2012	8:26:52 PM	SiCl4 MFC set to  0.000000
12/8/2012	8:26:52 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	8:26:52 PM	Tube furnace set to 0
12/8/2012	8:26:55 PM	H2 valve closed
12/8/2012	8:26:55 PM	BCl3 valve closed
12/8/2012	8:26:55 PM	PH3 valve closed
12/8/2012	8:26:55 PM	SiCl4 pre valve closed
12/8/2012	8:26:55 PM	SiCl4 post valve closed
12/8/2012	8:26:55 PM	Main Vac valve closed
12/8/2012	8:26:55 PM	Bypass valve closed
12/8/2012	8:26:55 PM	Bubbler valve closed
12/8/2012	8:26:55 PM	Helium valve opened
12/8/2012	8:26:55 PM	Helium MFC set to  500.000000
12/8/2012	8:26:55 PM	H2 MFC set to  0.000000
12/8/2012	8:26:55 PM	BCl3 MFC set to  0.000000
12/8/2012	8:26:55 PM	PH3 MFC set to  0.000000
12/8/2012	8:26:55 PM	SiCl4 MFC set to  0.000000
12/8/2012	8:26:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	8:26:55 PM	Tube furnace set to 0
12/8/2012	8:26:59 PM	Helium valve closed
12/8/2012	8:26:59 PM	H2 valve closed
12/8/2012	8:26:59 PM	BCl3 valve closed
12/8/2012	8:26:59 PM	PH3 valve closed
12/8/2012	8:26:59 PM	SiCl4 pre valve closed
12/8/2012	8:26:59 PM	SiCl4 post valve closed
12/8/2012	8:26:59 PM	Main Vac valve closed
12/8/2012	8:26:59 PM	Bypass valve closed
12/8/2012	8:26:59 PM	Bubbler valve closed
12/8/2012	8:26:59 PM	Helium MFC set to  0.000000
12/8/2012	8:26:59 PM	H2 MFC set to  0.000000
12/8/2012	8:26:59 PM	BCl3 MFC set to  0.000000
12/8/2012	8:26:59 PM	PH3 MFC set to  0.000000
12/8/2012	8:26:59 PM	SiCl4 MFC set to  0.000000
12/8/2012	8:26:59 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	8:26:59 PM	Tube furnace set to 0
12/8/2012	8:27:00 PM	Run finished at 8:27 PM
12/8/2012	8:27:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2012	8:34:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2012	8:34:42 PM	Recipe started at 8:34 PM
12/8/2012	8:34:42 PM	Helium valve closed
12/8/2012	8:34:42 PM	H2 valve closed
12/8/2012	8:34:42 PM	BCl3 valve closed
12/8/2012	8:34:42 PM	PH3 valve closed
12/8/2012	8:34:42 PM	SiCl4 pre valve closed
12/8/2012	8:34:42 PM	SiCl4 post valve closed
12/8/2012	8:34:42 PM	Main Vac valve closed
12/8/2012	8:34:42 PM	Bubbler valve closed
12/8/2012	8:34:42 PM	Bypass valve opened
12/8/2012	8:34:42 PM	Helium MFC set to  0.000000
12/8/2012	8:34:42 PM	H2 MFC set to  0.000000
12/8/2012	8:34:42 PM	BCl3 MFC set to  0.000000
12/8/2012	8:34:42 PM	PH3 MFC set to  0.000000
12/8/2012	8:34:42 PM	SiCl4 MFC set to  0.000000
12/8/2012	8:34:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	8:34:42 PM	Tube furnace set to 0
12/8/2012	8:36:10 PM	Helium valve closed
12/8/2012	8:36:10 PM	H2 valve closed
12/8/2012	8:36:10 PM	BCl3 valve closed
12/8/2012	8:36:10 PM	PH3 valve closed
12/8/2012	8:36:10 PM	SiCl4 pre valve closed
12/8/2012	8:36:10 PM	SiCl4 post valve closed
12/8/2012	8:36:10 PM	Main Vac valve closed
12/8/2012	8:36:10 PM	Bubbler valve closed
12/8/2012	8:36:10 PM	Bypass valve opened
12/8/2012	8:36:10 PM	Helium MFC set to  0.000000
12/8/2012	8:36:10 PM	H2 MFC set to  0.000000
12/8/2012	8:36:10 PM	BCl3 MFC set to  0.000000
12/8/2012	8:36:10 PM	PH3 MFC set to  0.000000
12/8/2012	8:36:10 PM	SiCl4 MFC set to  0.000000
12/8/2012	8:36:10 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	8:36:10 PM	Tube furnace set to 0
12/8/2012	8:36:56 PM	Helium valve closed
12/8/2012	8:36:56 PM	H2 valve closed
12/8/2012	8:36:56 PM	BCl3 valve closed
12/8/2012	8:36:56 PM	PH3 valve closed
12/8/2012	8:36:56 PM	SiCl4 pre valve closed
12/8/2012	8:36:56 PM	SiCl4 post valve closed
12/8/2012	8:36:56 PM	Bypass valve closed
12/8/2012	8:36:56 PM	Bubbler valve closed
12/8/2012	8:36:56 PM	Main Vac valve opened
12/8/2012	8:36:56 PM	Helium MFC set to  0.000000
12/8/2012	8:36:56 PM	H2 MFC set to  0.000000
12/8/2012	8:36:56 PM	BCl3 MFC set to  0.000000
12/8/2012	8:36:56 PM	PH3 MFC set to  0.000000
12/8/2012	8:36:56 PM	SiCl4 MFC set to  0.000000
12/8/2012	8:36:56 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	8:36:56 PM	Tube furnace set to 0
12/8/2012	8:36:57 PM	Run finished at 8:36 PM
12/8/2012	8:36:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2012	8:37:04 PM	Tube furnace set to 150
12/8/2012	8:39:11 PM	Recipe started at 8:39 PM
12/8/2012	8:39:11 PM	Helium valve closed
12/8/2012	8:39:11 PM	H2 valve closed
12/8/2012	8:39:11 PM	BCl3 valve closed
12/8/2012	8:39:11 PM	PH3 valve closed
12/8/2012	8:39:11 PM	SiCl4 pre valve closed
12/8/2012	8:39:11 PM	SiCl4 post valve closed
12/8/2012	8:39:11 PM	Bypass valve closed
12/8/2012	8:39:11 PM	Bubbler valve closed
12/8/2012	8:39:11 PM	Main Vac valve opened
12/8/2012	8:39:11 PM	Helium MFC set to  0.000000
12/8/2012	8:39:11 PM	H2 MFC set to  0.000000
12/8/2012	8:39:11 PM	BCl3 MFC set to  0.000000
12/8/2012	8:39:11 PM	PH3 MFC set to  0.000000
12/8/2012	8:39:11 PM	SiCl4 MFC set to  0.000000
12/8/2012	8:39:11 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	8:39:12 PM	Tube furnace set to 150
12/8/2012	9:09:12 PM	H2 valve closed
12/8/2012	9:09:12 PM	BCl3 valve closed
12/8/2012	9:09:12 PM	PH3 valve closed
12/8/2012	9:09:12 PM	SiCl4 pre valve closed
12/8/2012	9:09:12 PM	SiCl4 post valve closed
12/8/2012	9:09:12 PM	Bypass valve closed
12/8/2012	9:09:12 PM	Bubbler valve closed
12/8/2012	9:09:12 PM	Helium valve opened
12/8/2012	9:09:12 PM	Main Vac valve opened
12/8/2012	9:09:12 PM	Helium MFC set to  20.000000
12/8/2012	9:09:12 PM	H2 MFC set to  0.000000
12/8/2012	9:09:12 PM	BCl3 MFC set to  0.000000
12/8/2012	9:09:12 PM	PH3 MFC set to  0.000000
12/8/2012	9:09:12 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:09:12 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:09:12 PM	Tube furnace set to 150
12/8/2012	9:09:42 PM	Helium valve closed
12/8/2012	9:09:42 PM	H2 valve closed
12/8/2012	9:09:42 PM	BCl3 valve closed
12/8/2012	9:09:42 PM	PH3 valve closed
12/8/2012	9:09:42 PM	SiCl4 pre valve closed
12/8/2012	9:09:42 PM	SiCl4 post valve closed
12/8/2012	9:09:42 PM	Bypass valve closed
12/8/2012	9:09:42 PM	Bubbler valve closed
12/8/2012	9:09:42 PM	Main Vac valve opened
12/8/2012	9:09:42 PM	Helium MFC set to  0.000000
12/8/2012	9:09:42 PM	H2 MFC set to  0.000000
12/8/2012	9:09:42 PM	BCl3 MFC set to  0.000000
12/8/2012	9:09:42 PM	PH3 MFC set to  0.000000
12/8/2012	9:09:42 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:09:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:09:42 PM	Tube furnace set to 150
12/8/2012	9:10:12 PM	H2 valve closed
12/8/2012	9:10:12 PM	BCl3 valve closed
12/8/2012	9:10:12 PM	PH3 valve closed
12/8/2012	9:10:12 PM	SiCl4 pre valve closed
12/8/2012	9:10:12 PM	SiCl4 post valve closed
12/8/2012	9:10:12 PM	Bypass valve closed
12/8/2012	9:10:12 PM	Bubbler valve closed
12/8/2012	9:10:12 PM	Helium valve opened
12/8/2012	9:10:12 PM	Main Vac valve opened
12/8/2012	9:10:12 PM	Helium MFC set to  20.000000
12/8/2012	9:10:12 PM	H2 MFC set to  0.000000
12/8/2012	9:10:12 PM	BCl3 MFC set to  0.000000
12/8/2012	9:10:12 PM	PH3 MFC set to  0.000000
12/8/2012	9:10:12 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:10:12 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:10:12 PM	Tube furnace set to 150
12/8/2012	9:10:42 PM	Helium valve closed
12/8/2012	9:10:42 PM	H2 valve closed
12/8/2012	9:10:42 PM	BCl3 valve closed
12/8/2012	9:10:42 PM	PH3 valve closed
12/8/2012	9:10:42 PM	SiCl4 pre valve closed
12/8/2012	9:10:42 PM	SiCl4 post valve closed
12/8/2012	9:10:42 PM	Bypass valve closed
12/8/2012	9:10:42 PM	Bubbler valve closed
12/8/2012	9:10:42 PM	Main Vac valve opened
12/8/2012	9:10:42 PM	Helium MFC set to  0.000000
12/8/2012	9:10:42 PM	H2 MFC set to  0.000000
12/8/2012	9:10:42 PM	BCl3 MFC set to  0.000000
12/8/2012	9:10:42 PM	PH3 MFC set to  0.000000
12/8/2012	9:10:42 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:10:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:10:43 PM	Tube furnace set to 150
12/8/2012	9:11:13 PM	H2 valve closed
12/8/2012	9:11:13 PM	BCl3 valve closed
12/8/2012	9:11:13 PM	PH3 valve closed
12/8/2012	9:11:13 PM	SiCl4 pre valve closed
12/8/2012	9:11:13 PM	SiCl4 post valve closed
12/8/2012	9:11:13 PM	Bypass valve closed
12/8/2012	9:11:13 PM	Bubbler valve closed
12/8/2012	9:11:13 PM	Helium valve opened
12/8/2012	9:11:13 PM	Main Vac valve opened
12/8/2012	9:11:13 PM	Helium MFC set to  20.000000
12/8/2012	9:11:13 PM	H2 MFC set to  0.000000
12/8/2012	9:11:13 PM	BCl3 MFC set to  0.000000
12/8/2012	9:11:13 PM	PH3 MFC set to  0.000000
12/8/2012	9:11:13 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:11:13 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:11:13 PM	Tube furnace set to 150
12/8/2012	9:11:43 PM	Helium valve closed
12/8/2012	9:11:43 PM	H2 valve closed
12/8/2012	9:11:43 PM	BCl3 valve closed
12/8/2012	9:11:43 PM	PH3 valve closed
12/8/2012	9:11:43 PM	SiCl4 pre valve closed
12/8/2012	9:11:43 PM	SiCl4 post valve closed
12/8/2012	9:11:43 PM	Bypass valve closed
12/8/2012	9:11:43 PM	Bubbler valve closed
12/8/2012	9:11:43 PM	Main Vac valve opened
12/8/2012	9:11:43 PM	Helium MFC set to  0.000000
12/8/2012	9:11:43 PM	H2 MFC set to  0.000000
12/8/2012	9:11:43 PM	BCl3 MFC set to  0.000000
12/8/2012	9:11:43 PM	PH3 MFC set to  0.000000
12/8/2012	9:11:43 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:11:43 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:11:43 PM	Tube furnace set to 150
12/8/2012	9:12:13 PM	H2 valve closed
12/8/2012	9:12:13 PM	BCl3 valve closed
12/8/2012	9:12:13 PM	PH3 valve closed
12/8/2012	9:12:13 PM	SiCl4 pre valve closed
12/8/2012	9:12:13 PM	SiCl4 post valve closed
12/8/2012	9:12:13 PM	Bypass valve closed
12/8/2012	9:12:13 PM	Bubbler valve closed
12/8/2012	9:12:13 PM	Helium valve opened
12/8/2012	9:12:13 PM	Main Vac valve opened
12/8/2012	9:12:13 PM	Helium MFC set to  20.000000
12/8/2012	9:12:13 PM	H2 MFC set to  0.000000
12/8/2012	9:12:13 PM	BCl3 MFC set to  0.000000
12/8/2012	9:12:13 PM	PH3 MFC set to  0.000000
12/8/2012	9:12:13 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:12:13 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:12:13 PM	Tube furnace set to 150
12/8/2012	9:12:43 PM	Helium valve closed
12/8/2012	9:12:43 PM	H2 valve closed
12/8/2012	9:12:43 PM	BCl3 valve closed
12/8/2012	9:12:43 PM	PH3 valve closed
12/8/2012	9:12:43 PM	SiCl4 pre valve closed
12/8/2012	9:12:43 PM	SiCl4 post valve closed
12/8/2012	9:12:43 PM	Bypass valve closed
12/8/2012	9:12:43 PM	Bubbler valve closed
12/8/2012	9:12:43 PM	Main Vac valve opened
12/8/2012	9:12:43 PM	Helium MFC set to  0.000000
12/8/2012	9:12:43 PM	H2 MFC set to  0.000000
12/8/2012	9:12:43 PM	BCl3 MFC set to  0.000000
12/8/2012	9:12:43 PM	PH3 MFC set to  0.000000
12/8/2012	9:12:43 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:12:43 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:12:43 PM	Tube furnace set to 150
12/8/2012	9:13:14 PM	H2 valve closed
12/8/2012	9:13:14 PM	BCl3 valve closed
12/8/2012	9:13:14 PM	PH3 valve closed
12/8/2012	9:13:14 PM	SiCl4 pre valve closed
12/8/2012	9:13:14 PM	SiCl4 post valve closed
12/8/2012	9:13:14 PM	Bypass valve closed
12/8/2012	9:13:14 PM	Bubbler valve closed
12/8/2012	9:13:14 PM	Helium valve opened
12/8/2012	9:13:14 PM	Main Vac valve opened
12/8/2012	9:13:14 PM	Helium MFC set to  20.000000
12/8/2012	9:13:14 PM	H2 MFC set to  0.000000
12/8/2012	9:13:14 PM	BCl3 MFC set to  0.000000
12/8/2012	9:13:14 PM	PH3 MFC set to  0.000000
12/8/2012	9:13:14 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:13:14 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:13:14 PM	Tube furnace set to 150
12/8/2012	9:13:44 PM	Helium valve closed
12/8/2012	9:13:44 PM	H2 valve closed
12/8/2012	9:13:44 PM	BCl3 valve closed
12/8/2012	9:13:44 PM	PH3 valve closed
12/8/2012	9:13:44 PM	SiCl4 pre valve closed
12/8/2012	9:13:44 PM	SiCl4 post valve closed
12/8/2012	9:13:44 PM	Bypass valve closed
12/8/2012	9:13:44 PM	Bubbler valve closed
12/8/2012	9:13:44 PM	Main Vac valve opened
12/8/2012	9:13:44 PM	Helium MFC set to  0.000000
12/8/2012	9:13:44 PM	H2 MFC set to  0.000000
12/8/2012	9:13:44 PM	BCl3 MFC set to  0.000000
12/8/2012	9:13:44 PM	PH3 MFC set to  0.000000
12/8/2012	9:13:44 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:13:44 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:13:44 PM	Tube furnace set to 150
12/8/2012	9:14:14 PM	H2 valve closed
12/8/2012	9:14:14 PM	BCl3 valve closed
12/8/2012	9:14:14 PM	PH3 valve closed
12/8/2012	9:14:14 PM	SiCl4 pre valve closed
12/8/2012	9:14:14 PM	SiCl4 post valve closed
12/8/2012	9:14:14 PM	Bypass valve closed
12/8/2012	9:14:14 PM	Bubbler valve closed
12/8/2012	9:14:14 PM	Helium valve opened
12/8/2012	9:14:14 PM	Main Vac valve opened
12/8/2012	9:14:14 PM	Helium MFC set to  20.000000
12/8/2012	9:14:14 PM	H2 MFC set to  0.000000
12/8/2012	9:14:14 PM	BCl3 MFC set to  0.000000
12/8/2012	9:14:14 PM	PH3 MFC set to  0.000000
12/8/2012	9:14:14 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:14:14 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:14:14 PM	Tube furnace set to 150
12/8/2012	9:14:44 PM	Helium valve closed
12/8/2012	9:14:44 PM	H2 valve closed
12/8/2012	9:14:44 PM	BCl3 valve closed
12/8/2012	9:14:44 PM	PH3 valve closed
12/8/2012	9:14:44 PM	SiCl4 pre valve closed
12/8/2012	9:14:44 PM	SiCl4 post valve closed
12/8/2012	9:14:44 PM	Bypass valve closed
12/8/2012	9:14:44 PM	Bubbler valve closed
12/8/2012	9:14:44 PM	Main Vac valve opened
12/8/2012	9:14:44 PM	Helium MFC set to  0.000000
12/8/2012	9:14:44 PM	H2 MFC set to  0.000000
12/8/2012	9:14:44 PM	BCl3 MFC set to  0.000000
12/8/2012	9:14:44 PM	PH3 MFC set to  0.000000
12/8/2012	9:14:44 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:14:44 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:14:44 PM	Tube furnace set to 150
12/8/2012	9:15:15 PM	H2 valve closed
12/8/2012	9:15:15 PM	BCl3 valve closed
12/8/2012	9:15:15 PM	PH3 valve closed
12/8/2012	9:15:15 PM	SiCl4 pre valve closed
12/8/2012	9:15:15 PM	SiCl4 post valve closed
12/8/2012	9:15:15 PM	Bypass valve closed
12/8/2012	9:15:15 PM	Bubbler valve closed
12/8/2012	9:15:15 PM	Helium valve opened
12/8/2012	9:15:15 PM	Main Vac valve opened
12/8/2012	9:15:15 PM	Helium MFC set to  20.000000
12/8/2012	9:15:15 PM	H2 MFC set to  0.000000
12/8/2012	9:15:15 PM	BCl3 MFC set to  0.000000
12/8/2012	9:15:15 PM	PH3 MFC set to  0.000000
12/8/2012	9:15:15 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:15:15 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:15:15 PM	Tube furnace set to 150
12/8/2012	9:15:45 PM	Helium valve closed
12/8/2012	9:15:45 PM	H2 valve closed
12/8/2012	9:15:45 PM	BCl3 valve closed
12/8/2012	9:15:45 PM	PH3 valve closed
12/8/2012	9:15:45 PM	SiCl4 pre valve closed
12/8/2012	9:15:45 PM	SiCl4 post valve closed
12/8/2012	9:15:45 PM	Bypass valve closed
12/8/2012	9:15:45 PM	Bubbler valve closed
12/8/2012	9:15:45 PM	Main Vac valve opened
12/8/2012	9:15:45 PM	Helium MFC set to  0.000000
12/8/2012	9:15:45 PM	H2 MFC set to  0.000000
12/8/2012	9:15:45 PM	BCl3 MFC set to  0.000000
12/8/2012	9:15:45 PM	PH3 MFC set to  0.000000
12/8/2012	9:15:45 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:15:45 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:15:45 PM	Tube furnace set to 150
12/8/2012	9:16:15 PM	H2 valve closed
12/8/2012	9:16:15 PM	BCl3 valve closed
12/8/2012	9:16:15 PM	PH3 valve closed
12/8/2012	9:16:15 PM	SiCl4 pre valve closed
12/8/2012	9:16:15 PM	SiCl4 post valve closed
12/8/2012	9:16:15 PM	Bypass valve closed
12/8/2012	9:16:15 PM	Bubbler valve closed
12/8/2012	9:16:15 PM	Helium valve opened
12/8/2012	9:16:15 PM	Main Vac valve opened
12/8/2012	9:16:15 PM	Helium MFC set to  20.000000
12/8/2012	9:16:15 PM	H2 MFC set to  0.000000
12/8/2012	9:16:15 PM	BCl3 MFC set to  0.000000
12/8/2012	9:16:15 PM	PH3 MFC set to  0.000000
12/8/2012	9:16:15 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:16:15 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:16:15 PM	Tube furnace set to 150
12/8/2012	9:16:45 PM	Helium valve closed
12/8/2012	9:16:45 PM	H2 valve closed
12/8/2012	9:16:45 PM	BCl3 valve closed
12/8/2012	9:16:45 PM	PH3 valve closed
12/8/2012	9:16:45 PM	SiCl4 pre valve closed
12/8/2012	9:16:45 PM	SiCl4 post valve closed
12/8/2012	9:16:45 PM	Bypass valve closed
12/8/2012	9:16:45 PM	Bubbler valve closed
12/8/2012	9:16:45 PM	Main Vac valve opened
12/8/2012	9:16:45 PM	Helium MFC set to  0.000000
12/8/2012	9:16:45 PM	H2 MFC set to  0.000000
12/8/2012	9:16:45 PM	BCl3 MFC set to  0.000000
12/8/2012	9:16:45 PM	PH3 MFC set to  0.000000
12/8/2012	9:16:45 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:16:45 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:16:45 PM	Tube furnace set to 150
12/8/2012	9:17:15 PM	H2 valve closed
12/8/2012	9:17:15 PM	BCl3 valve closed
12/8/2012	9:17:15 PM	PH3 valve closed
12/8/2012	9:17:16 PM	SiCl4 pre valve closed
12/8/2012	9:17:16 PM	SiCl4 post valve closed
12/8/2012	9:17:16 PM	Bypass valve closed
12/8/2012	9:17:16 PM	Bubbler valve closed
12/8/2012	9:17:16 PM	Helium valve opened
12/8/2012	9:17:16 PM	Main Vac valve opened
12/8/2012	9:17:16 PM	Helium MFC set to  20.000000
12/8/2012	9:17:16 PM	H2 MFC set to  0.000000
12/8/2012	9:17:16 PM	BCl3 MFC set to  0.000000
12/8/2012	9:17:16 PM	PH3 MFC set to  0.000000
12/8/2012	9:17:16 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:17:16 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:17:16 PM	Tube furnace set to 150
12/8/2012	9:17:46 PM	Helium valve closed
12/8/2012	9:17:46 PM	H2 valve closed
12/8/2012	9:17:46 PM	BCl3 valve closed
12/8/2012	9:17:46 PM	PH3 valve closed
12/8/2012	9:17:46 PM	SiCl4 pre valve closed
12/8/2012	9:17:46 PM	SiCl4 post valve closed
12/8/2012	9:17:46 PM	Bypass valve closed
12/8/2012	9:17:46 PM	Bubbler valve closed
12/8/2012	9:17:46 PM	Main Vac valve opened
12/8/2012	9:17:46 PM	Helium MFC set to  0.000000
12/8/2012	9:17:46 PM	H2 MFC set to  0.000000
12/8/2012	9:17:46 PM	BCl3 MFC set to  0.000000
12/8/2012	9:17:46 PM	PH3 MFC set to  0.000000
12/8/2012	9:17:46 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:17:46 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:17:46 PM	Tube furnace set to 150
12/8/2012	9:18:16 PM	H2 valve closed
12/8/2012	9:18:16 PM	BCl3 valve closed
12/8/2012	9:18:16 PM	PH3 valve closed
12/8/2012	9:18:16 PM	SiCl4 pre valve closed
12/8/2012	9:18:16 PM	SiCl4 post valve closed
12/8/2012	9:18:16 PM	Bypass valve closed
12/8/2012	9:18:16 PM	Bubbler valve closed
12/8/2012	9:18:16 PM	Helium valve opened
12/8/2012	9:18:16 PM	Main Vac valve opened
12/8/2012	9:18:16 PM	Helium MFC set to  20.000000
12/8/2012	9:18:16 PM	H2 MFC set to  0.000000
12/8/2012	9:18:16 PM	BCl3 MFC set to  0.000000
12/8/2012	9:18:16 PM	PH3 MFC set to  0.000000
12/8/2012	9:18:16 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:18:16 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:18:16 PM	Tube furnace set to 150
12/8/2012	9:18:46 PM	Helium valve closed
12/8/2012	9:18:46 PM	H2 valve closed
12/8/2012	9:18:46 PM	BCl3 valve closed
12/8/2012	9:18:46 PM	PH3 valve closed
12/8/2012	9:18:46 PM	SiCl4 pre valve closed
12/8/2012	9:18:46 PM	SiCl4 post valve closed
12/8/2012	9:18:46 PM	Bypass valve closed
12/8/2012	9:18:46 PM	Bubbler valve closed
12/8/2012	9:18:46 PM	Main Vac valve opened
12/8/2012	9:18:46 PM	Helium MFC set to  0.000000
12/8/2012	9:18:46 PM	H2 MFC set to  0.000000
12/8/2012	9:18:46 PM	BCl3 MFC set to  0.000000
12/8/2012	9:18:46 PM	PH3 MFC set to  0.000000
12/8/2012	9:18:46 PM	SiCl4 MFC set to  0.000000
12/8/2012	9:18:46 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	9:18:46 PM	Tube furnace set to 150
12/8/2012	9:18:47 PM	Run finished at 9:18 PM
12/8/2012	10:05:13 PM	Recipe started at 10:05 PM
12/8/2012	10:05:13 PM	Helium valve closed
12/8/2012	10:05:13 PM	H2 valve closed
12/8/2012	10:05:13 PM	BCl3 valve closed
12/8/2012	10:05:13 PM	PH3 valve closed
12/8/2012	10:05:13 PM	SiCl4 pre valve closed
12/8/2012	10:05:13 PM	SiCl4 post valve closed
12/8/2012	10:05:13 PM	Bypass valve closed
12/8/2012	10:05:13 PM	Bubbler valve closed
12/8/2012	10:05:13 PM	Main Vac valve opened
12/8/2012	10:05:13 PM	Helium MFC set to  0.000000
12/8/2012	10:05:13 PM	H2 MFC set to  0.000000
12/8/2012	10:05:13 PM	BCl3 MFC set to  0.000000
12/8/2012	10:05:13 PM	PH3 MFC set to  0.000000
12/8/2012	10:05:13 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:05:13 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:05:13 PM	Tube furnace set to 150
12/8/2012	10:05:15 PM	H2 valve closed
12/8/2012	10:05:15 PM	BCl3 valve closed
12/8/2012	10:05:15 PM	PH3 valve closed
12/8/2012	10:05:15 PM	SiCl4 pre valve closed
12/8/2012	10:05:15 PM	SiCl4 post valve closed
12/8/2012	10:05:15 PM	Bypass valve closed
12/8/2012	10:05:15 PM	Bubbler valve closed
12/8/2012	10:05:15 PM	Helium valve opened
12/8/2012	10:05:15 PM	Main Vac valve opened
12/8/2012	10:05:15 PM	Helium MFC set to  20.000000
12/8/2012	10:05:15 PM	H2 MFC set to  0.000000
12/8/2012	10:05:15 PM	BCl3 MFC set to  0.000000
12/8/2012	10:05:15 PM	PH3 MFC set to  0.000000
12/8/2012	10:05:15 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:05:15 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:05:15 PM	Tube furnace set to 150
12/8/2012	10:05:45 PM	Helium valve closed
12/8/2012	10:05:45 PM	H2 valve closed
12/8/2012	10:05:45 PM	BCl3 valve closed
12/8/2012	10:05:45 PM	PH3 valve closed
12/8/2012	10:05:45 PM	SiCl4 pre valve closed
12/8/2012	10:05:45 PM	SiCl4 post valve closed
12/8/2012	10:05:45 PM	Bypass valve closed
12/8/2012	10:05:45 PM	Bubbler valve closed
12/8/2012	10:05:45 PM	Main Vac valve opened
12/8/2012	10:05:45 PM	Helium MFC set to  0.000000
12/8/2012	10:05:45 PM	H2 MFC set to  0.000000
12/8/2012	10:05:45 PM	BCl3 MFC set to  0.000000
12/8/2012	10:05:45 PM	PH3 MFC set to  0.000000
12/8/2012	10:05:45 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:05:45 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:05:45 PM	Tube furnace set to 150
12/8/2012	10:06:15 PM	H2 valve closed
12/8/2012	10:06:15 PM	BCl3 valve closed
12/8/2012	10:06:15 PM	PH3 valve closed
12/8/2012	10:06:15 PM	SiCl4 pre valve closed
12/8/2012	10:06:15 PM	SiCl4 post valve closed
12/8/2012	10:06:15 PM	Bypass valve closed
12/8/2012	10:06:15 PM	Bubbler valve closed
12/8/2012	10:06:15 PM	Helium valve opened
12/8/2012	10:06:15 PM	Main Vac valve opened
12/8/2012	10:06:15 PM	Helium MFC set to  20.000000
12/8/2012	10:06:15 PM	H2 MFC set to  0.000000
12/8/2012	10:06:15 PM	BCl3 MFC set to  0.000000
12/8/2012	10:06:15 PM	PH3 MFC set to  0.000000
12/8/2012	10:06:15 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:06:15 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:06:15 PM	Tube furnace set to 150
12/8/2012	10:06:45 PM	Helium valve closed
12/8/2012	10:06:45 PM	H2 valve closed
12/8/2012	10:06:45 PM	BCl3 valve closed
12/8/2012	10:06:45 PM	PH3 valve closed
12/8/2012	10:06:45 PM	SiCl4 pre valve closed
12/8/2012	10:06:45 PM	SiCl4 post valve closed
12/8/2012	10:06:45 PM	Bypass valve closed
12/8/2012	10:06:45 PM	Bubbler valve closed
12/8/2012	10:06:45 PM	Main Vac valve opened
12/8/2012	10:06:45 PM	Helium MFC set to  0.000000
12/8/2012	10:06:45 PM	H2 MFC set to  0.000000
12/8/2012	10:06:45 PM	BCl3 MFC set to  0.000000
12/8/2012	10:06:45 PM	PH3 MFC set to  0.000000
12/8/2012	10:06:45 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:06:45 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:06:46 PM	Tube furnace set to 150
12/8/2012	10:07:16 PM	H2 valve closed
12/8/2012	10:07:16 PM	BCl3 valve closed
12/8/2012	10:07:16 PM	PH3 valve closed
12/8/2012	10:07:16 PM	SiCl4 pre valve closed
12/8/2012	10:07:16 PM	SiCl4 post valve closed
12/8/2012	10:07:16 PM	Bypass valve closed
12/8/2012	10:07:16 PM	Bubbler valve closed
12/8/2012	10:07:16 PM	Helium valve opened
12/8/2012	10:07:16 PM	Main Vac valve opened
12/8/2012	10:07:16 PM	Helium MFC set to  20.000000
12/8/2012	10:07:16 PM	H2 MFC set to  0.000000
12/8/2012	10:07:16 PM	BCl3 MFC set to  0.000000
12/8/2012	10:07:16 PM	PH3 MFC set to  0.000000
12/8/2012	10:07:16 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:07:16 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:07:16 PM	Tube furnace set to 150
12/8/2012	10:07:46 PM	Helium valve closed
12/8/2012	10:07:46 PM	H2 valve closed
12/8/2012	10:07:46 PM	BCl3 valve closed
12/8/2012	10:07:46 PM	PH3 valve closed
12/8/2012	10:07:46 PM	SiCl4 pre valve closed
12/8/2012	10:07:46 PM	SiCl4 post valve closed
12/8/2012	10:07:46 PM	Bypass valve closed
12/8/2012	10:07:46 PM	Bubbler valve closed
12/8/2012	10:07:46 PM	Main Vac valve opened
12/8/2012	10:07:46 PM	Helium MFC set to  0.000000
12/8/2012	10:07:46 PM	H2 MFC set to  0.000000
12/8/2012	10:07:46 PM	BCl3 MFC set to  0.000000
12/8/2012	10:07:46 PM	PH3 MFC set to  0.000000
12/8/2012	10:07:46 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:07:46 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:07:46 PM	Tube furnace set to 150
12/8/2012	10:08:16 PM	H2 valve closed
12/8/2012	10:08:16 PM	BCl3 valve closed
12/8/2012	10:08:16 PM	PH3 valve closed
12/8/2012	10:08:16 PM	SiCl4 pre valve closed
12/8/2012	10:08:16 PM	SiCl4 post valve closed
12/8/2012	10:08:16 PM	Bypass valve closed
12/8/2012	10:08:16 PM	Bubbler valve closed
12/8/2012	10:08:16 PM	Helium valve opened
12/8/2012	10:08:16 PM	Main Vac valve opened
12/8/2012	10:08:16 PM	Helium MFC set to  20.000000
12/8/2012	10:08:16 PM	H2 MFC set to  0.000000
12/8/2012	10:08:16 PM	BCl3 MFC set to  0.000000
12/8/2012	10:08:16 PM	PH3 MFC set to  0.000000
12/8/2012	10:08:16 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:08:16 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:08:16 PM	Tube furnace set to 150
12/8/2012	10:08:46 PM	Helium valve closed
12/8/2012	10:08:46 PM	H2 valve closed
12/8/2012	10:08:46 PM	BCl3 valve closed
12/8/2012	10:08:46 PM	PH3 valve closed
12/8/2012	10:08:46 PM	SiCl4 pre valve closed
12/8/2012	10:08:46 PM	SiCl4 post valve closed
12/8/2012	10:08:46 PM	Bypass valve closed
12/8/2012	10:08:46 PM	Bubbler valve closed
12/8/2012	10:08:46 PM	Main Vac valve opened
12/8/2012	10:08:46 PM	Helium MFC set to  0.000000
12/8/2012	10:08:46 PM	H2 MFC set to  0.000000
12/8/2012	10:08:46 PM	BCl3 MFC set to  0.000000
12/8/2012	10:08:46 PM	PH3 MFC set to  0.000000
12/8/2012	10:08:46 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:08:46 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:08:47 PM	Tube furnace set to 150
12/8/2012	10:09:17 PM	H2 valve closed
12/8/2012	10:09:17 PM	BCl3 valve closed
12/8/2012	10:09:17 PM	PH3 valve closed
12/8/2012	10:09:17 PM	SiCl4 pre valve closed
12/8/2012	10:09:17 PM	SiCl4 post valve closed
12/8/2012	10:09:17 PM	Bypass valve closed
12/8/2012	10:09:17 PM	Bubbler valve closed
12/8/2012	10:09:17 PM	Helium valve opened
12/8/2012	10:09:17 PM	Main Vac valve opened
12/8/2012	10:09:17 PM	Helium MFC set to  20.000000
12/8/2012	10:09:17 PM	H2 MFC set to  0.000000
12/8/2012	10:09:17 PM	BCl3 MFC set to  0.000000
12/8/2012	10:09:17 PM	PH3 MFC set to  0.000000
12/8/2012	10:09:17 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:09:17 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:09:17 PM	Tube furnace set to 150
12/8/2012	10:09:47 PM	Helium valve closed
12/8/2012	10:09:47 PM	H2 valve closed
12/8/2012	10:09:47 PM	BCl3 valve closed
12/8/2012	10:09:47 PM	PH3 valve closed
12/8/2012	10:09:47 PM	SiCl4 pre valve closed
12/8/2012	10:09:47 PM	SiCl4 post valve closed
12/8/2012	10:09:47 PM	Bypass valve closed
12/8/2012	10:09:47 PM	Bubbler valve closed
12/8/2012	10:09:47 PM	Main Vac valve opened
12/8/2012	10:09:47 PM	Helium MFC set to  0.000000
12/8/2012	10:09:47 PM	H2 MFC set to  0.000000
12/8/2012	10:09:47 PM	BCl3 MFC set to  0.000000
12/8/2012	10:09:47 PM	PH3 MFC set to  0.000000
12/8/2012	10:09:47 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:09:47 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:09:47 PM	Tube furnace set to 150
12/8/2012	10:10:17 PM	H2 valve closed
12/8/2012	10:10:17 PM	BCl3 valve closed
12/8/2012	10:10:17 PM	PH3 valve closed
12/8/2012	10:10:17 PM	SiCl4 pre valve closed
12/8/2012	10:10:17 PM	SiCl4 post valve closed
12/8/2012	10:10:17 PM	Bypass valve closed
12/8/2012	10:10:17 PM	Bubbler valve closed
12/8/2012	10:10:17 PM	Helium valve opened
12/8/2012	10:10:17 PM	Main Vac valve opened
12/8/2012	10:10:17 PM	Helium MFC set to  20.000000
12/8/2012	10:10:17 PM	H2 MFC set to  0.000000
12/8/2012	10:10:17 PM	BCl3 MFC set to  0.000000
12/8/2012	10:10:17 PM	PH3 MFC set to  0.000000
12/8/2012	10:10:17 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:10:17 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:10:17 PM	Tube furnace set to 150
12/8/2012	10:10:47 PM	Helium valve closed
12/8/2012	10:10:47 PM	H2 valve closed
12/8/2012	10:10:47 PM	BCl3 valve closed
12/8/2012	10:10:47 PM	PH3 valve closed
12/8/2012	10:10:47 PM	SiCl4 pre valve closed
12/8/2012	10:10:47 PM	SiCl4 post valve closed
12/8/2012	10:10:47 PM	Bypass valve closed
12/8/2012	10:10:47 PM	Bubbler valve closed
12/8/2012	10:10:47 PM	Main Vac valve opened
12/8/2012	10:10:47 PM	Helium MFC set to  0.000000
12/8/2012	10:10:47 PM	H2 MFC set to  0.000000
12/8/2012	10:10:47 PM	BCl3 MFC set to  0.000000
12/8/2012	10:10:47 PM	PH3 MFC set to  0.000000
12/8/2012	10:10:47 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:10:47 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:10:48 PM	Tube furnace set to 150
12/8/2012	10:11:18 PM	H2 valve closed
12/8/2012	10:11:18 PM	BCl3 valve closed
12/8/2012	10:11:18 PM	PH3 valve closed
12/8/2012	10:11:18 PM	SiCl4 pre valve closed
12/8/2012	10:11:18 PM	SiCl4 post valve closed
12/8/2012	10:11:18 PM	Bypass valve closed
12/8/2012	10:11:18 PM	Bubbler valve closed
12/8/2012	10:11:18 PM	Helium valve opened
12/8/2012	10:11:18 PM	Main Vac valve opened
12/8/2012	10:11:18 PM	Helium MFC set to  20.000000
12/8/2012	10:11:18 PM	H2 MFC set to  0.000000
12/8/2012	10:11:18 PM	BCl3 MFC set to  0.000000
12/8/2012	10:11:18 PM	PH3 MFC set to  0.000000
12/8/2012	10:11:18 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:11:18 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:11:18 PM	Tube furnace set to 150
12/8/2012	10:11:48 PM	Helium valve closed
12/8/2012	10:11:48 PM	H2 valve closed
12/8/2012	10:11:48 PM	BCl3 valve closed
12/8/2012	10:11:48 PM	PH3 valve closed
12/8/2012	10:11:48 PM	SiCl4 pre valve closed
12/8/2012	10:11:48 PM	SiCl4 post valve closed
12/8/2012	10:11:48 PM	Bypass valve closed
12/8/2012	10:11:48 PM	Bubbler valve closed
12/8/2012	10:11:48 PM	Main Vac valve opened
12/8/2012	10:11:48 PM	Helium MFC set to  0.000000
12/8/2012	10:11:48 PM	H2 MFC set to  0.000000
12/8/2012	10:11:48 PM	BCl3 MFC set to  0.000000
12/8/2012	10:11:48 PM	PH3 MFC set to  0.000000
12/8/2012	10:11:48 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:11:48 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:11:48 PM	Tube furnace set to 150
12/8/2012	10:12:18 PM	H2 valve closed
12/8/2012	10:12:18 PM	BCl3 valve closed
12/8/2012	10:12:18 PM	PH3 valve closed
12/8/2012	10:12:18 PM	SiCl4 pre valve closed
12/8/2012	10:12:18 PM	SiCl4 post valve closed
12/8/2012	10:12:18 PM	Bypass valve closed
12/8/2012	10:12:18 PM	Bubbler valve closed
12/8/2012	10:12:18 PM	Helium valve opened
12/8/2012	10:12:18 PM	Main Vac valve opened
12/8/2012	10:12:18 PM	Helium MFC set to  20.000000
12/8/2012	10:12:18 PM	H2 MFC set to  0.000000
12/8/2012	10:12:18 PM	BCl3 MFC set to  0.000000
12/8/2012	10:12:18 PM	PH3 MFC set to  0.000000
12/8/2012	10:12:18 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:12:18 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:12:18 PM	Tube furnace set to 150
12/8/2012	10:12:48 PM	Helium valve closed
12/8/2012	10:12:48 PM	H2 valve closed
12/8/2012	10:12:48 PM	BCl3 valve closed
12/8/2012	10:12:48 PM	PH3 valve closed
12/8/2012	10:12:48 PM	SiCl4 pre valve closed
12/8/2012	10:12:48 PM	SiCl4 post valve closed
12/8/2012	10:12:48 PM	Bypass valve closed
12/8/2012	10:12:48 PM	Bubbler valve closed
12/8/2012	10:12:48 PM	Main Vac valve opened
12/8/2012	10:12:48 PM	Helium MFC set to  0.000000
12/8/2012	10:12:48 PM	H2 MFC set to  0.000000
12/8/2012	10:12:48 PM	BCl3 MFC set to  0.000000
12/8/2012	10:12:48 PM	PH3 MFC set to  0.000000
12/8/2012	10:12:48 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:12:48 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:12:49 PM	Tube furnace set to 150
12/8/2012	10:13:19 PM	H2 valve closed
12/8/2012	10:13:19 PM	BCl3 valve closed
12/8/2012	10:13:19 PM	PH3 valve closed
12/8/2012	10:13:19 PM	SiCl4 pre valve closed
12/8/2012	10:13:19 PM	SiCl4 post valve closed
12/8/2012	10:13:19 PM	Bypass valve closed
12/8/2012	10:13:19 PM	Bubbler valve closed
12/8/2012	10:13:19 PM	Helium valve opened
12/8/2012	10:13:19 PM	Main Vac valve opened
12/8/2012	10:13:19 PM	Helium MFC set to  20.000000
12/8/2012	10:13:19 PM	H2 MFC set to  0.000000
12/8/2012	10:13:19 PM	BCl3 MFC set to  0.000000
12/8/2012	10:13:19 PM	PH3 MFC set to  0.000000
12/8/2012	10:13:19 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:13:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:13:19 PM	Tube furnace set to 150
12/8/2012	10:13:49 PM	Helium valve closed
12/8/2012	10:13:49 PM	H2 valve closed
12/8/2012	10:13:49 PM	BCl3 valve closed
12/8/2012	10:13:49 PM	PH3 valve closed
12/8/2012	10:13:49 PM	SiCl4 pre valve closed
12/8/2012	10:13:49 PM	SiCl4 post valve closed
12/8/2012	10:13:49 PM	Bypass valve closed
12/8/2012	10:13:49 PM	Bubbler valve closed
12/8/2012	10:13:49 PM	Main Vac valve opened
12/8/2012	10:13:49 PM	Helium MFC set to  0.000000
12/8/2012	10:13:49 PM	H2 MFC set to  0.000000
12/8/2012	10:13:49 PM	BCl3 MFC set to  0.000000
12/8/2012	10:13:49 PM	PH3 MFC set to  0.000000
12/8/2012	10:13:49 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:13:49 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:13:49 PM	Tube furnace set to 150
12/8/2012	10:14:19 PM	H2 valve closed
12/8/2012	10:14:19 PM	BCl3 valve closed
12/8/2012	10:14:19 PM	PH3 valve closed
12/8/2012	10:14:19 PM	SiCl4 pre valve closed
12/8/2012	10:14:19 PM	SiCl4 post valve closed
12/8/2012	10:14:19 PM	Bypass valve closed
12/8/2012	10:14:19 PM	Bubbler valve closed
12/8/2012	10:14:19 PM	Helium valve opened
12/8/2012	10:14:19 PM	Main Vac valve opened
12/8/2012	10:14:19 PM	Helium MFC set to  20.000000
12/8/2012	10:14:19 PM	H2 MFC set to  0.000000
12/8/2012	10:14:19 PM	BCl3 MFC set to  0.000000
12/8/2012	10:14:19 PM	PH3 MFC set to  0.000000
12/8/2012	10:14:19 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:14:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:14:19 PM	Tube furnace set to 150
12/8/2012	10:14:49 PM	Helium valve closed
12/8/2012	10:14:49 PM	H2 valve closed
12/8/2012	10:14:49 PM	BCl3 valve closed
12/8/2012	10:14:49 PM	PH3 valve closed
12/8/2012	10:14:49 PM	SiCl4 pre valve closed
12/8/2012	10:14:49 PM	SiCl4 post valve closed
12/8/2012	10:14:49 PM	Bypass valve closed
12/8/2012	10:14:49 PM	Bubbler valve closed
12/8/2012	10:14:49 PM	Main Vac valve opened
12/8/2012	10:14:49 PM	Helium MFC set to  0.000000
12/8/2012	10:14:49 PM	H2 MFC set to  0.000000
12/8/2012	10:14:49 PM	BCl3 MFC set to  0.000000
12/8/2012	10:14:49 PM	PH3 MFC set to  0.000000
12/8/2012	10:14:49 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:14:49 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:14:50 PM	Tube furnace set to 150
12/8/2012	10:14:51 PM	Run finished at 10:14 PM
12/8/2012	10:22:46 PM	Main Vac valve closed
12/8/2012	10:22:54 PM	Main Vac valve opened
12/8/2012	10:23:05 PM	Recipe started at 10:22 PM
12/8/2012	10:23:05 PM	Helium valve closed
12/8/2012	10:23:05 PM	H2 valve closed
12/8/2012	10:23:05 PM	BCl3 valve closed
12/8/2012	10:23:05 PM	PH3 valve closed
12/8/2012	10:23:05 PM	SiCl4 pre valve closed
12/8/2012	10:23:05 PM	SiCl4 post valve closed
12/8/2012	10:23:05 PM	Bypass valve closed
12/8/2012	10:23:05 PM	Bubbler valve closed
12/8/2012	10:23:05 PM	Main Vac valve opened
12/8/2012	10:23:05 PM	Helium MFC set to  0.000000
12/8/2012	10:23:05 PM	H2 MFC set to  0.000000
12/8/2012	10:23:05 PM	BCl3 MFC set to  0.000000
12/8/2012	10:23:05 PM	PH3 MFC set to  0.000000
12/8/2012	10:23:05 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:23:05 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:23:05 PM	Tube furnace set to 150
12/8/2012	10:23:10 PM	H2 valve closed
12/8/2012	10:23:10 PM	BCl3 valve closed
12/8/2012	10:23:10 PM	PH3 valve closed
12/8/2012	10:23:10 PM	SiCl4 pre valve closed
12/8/2012	10:23:10 PM	SiCl4 post valve closed
12/8/2012	10:23:10 PM	Bypass valve closed
12/8/2012	10:23:10 PM	Bubbler valve closed
12/8/2012	10:23:10 PM	Helium valve opened
12/8/2012	10:23:10 PM	Main Vac valve opened
12/8/2012	10:23:10 PM	Helium MFC set to  20.000000
12/8/2012	10:23:10 PM	H2 MFC set to  0.000000
12/8/2012	10:23:10 PM	BCl3 MFC set to  0.000000
12/8/2012	10:23:10 PM	PH3 MFC set to  0.000000
12/8/2012	10:23:10 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:23:10 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:23:10 PM	Tube furnace set to 150
12/8/2012	10:23:40 PM	Helium valve closed
12/8/2012	10:23:40 PM	H2 valve closed
12/8/2012	10:23:40 PM	BCl3 valve closed
12/8/2012	10:23:40 PM	PH3 valve closed
12/8/2012	10:23:40 PM	SiCl4 pre valve closed
12/8/2012	10:23:40 PM	SiCl4 post valve closed
12/8/2012	10:23:40 PM	Bypass valve closed
12/8/2012	10:23:40 PM	Bubbler valve closed
12/8/2012	10:23:40 PM	Main Vac valve opened
12/8/2012	10:23:40 PM	Helium MFC set to  0.000000
12/8/2012	10:23:40 PM	H2 MFC set to  0.000000
12/8/2012	10:23:40 PM	BCl3 MFC set to  0.000000
12/8/2012	10:23:40 PM	PH3 MFC set to  0.000000
12/8/2012	10:23:40 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:23:40 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:23:40 PM	Tube furnace set to 150
12/8/2012	10:24:10 PM	H2 valve closed
12/8/2012	10:24:10 PM	BCl3 valve closed
12/8/2012	10:24:10 PM	PH3 valve closed
12/8/2012	10:24:10 PM	SiCl4 pre valve closed
12/8/2012	10:24:10 PM	SiCl4 post valve closed
12/8/2012	10:24:10 PM	Bypass valve closed
12/8/2012	10:24:10 PM	Bubbler valve closed
12/8/2012	10:24:10 PM	Helium valve opened
12/8/2012	10:24:10 PM	Main Vac valve opened
12/8/2012	10:24:10 PM	Helium MFC set to  20.000000
12/8/2012	10:24:10 PM	H2 MFC set to  0.000000
12/8/2012	10:24:10 PM	BCl3 MFC set to  0.000000
12/8/2012	10:24:10 PM	PH3 MFC set to  0.000000
12/8/2012	10:24:10 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:24:10 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:24:11 PM	Tube furnace set to 150
12/8/2012	10:24:41 PM	Helium valve closed
12/8/2012	10:24:41 PM	H2 valve closed
12/8/2012	10:24:41 PM	BCl3 valve closed
12/8/2012	10:24:41 PM	PH3 valve closed
12/8/2012	10:24:41 PM	SiCl4 pre valve closed
12/8/2012	10:24:41 PM	SiCl4 post valve closed
12/8/2012	10:24:41 PM	Bypass valve closed
12/8/2012	10:24:41 PM	Bubbler valve closed
12/8/2012	10:24:41 PM	Main Vac valve opened
12/8/2012	10:24:41 PM	Helium MFC set to  0.000000
12/8/2012	10:24:41 PM	H2 MFC set to  0.000000
12/8/2012	10:24:41 PM	BCl3 MFC set to  0.000000
12/8/2012	10:24:41 PM	PH3 MFC set to  0.000000
12/8/2012	10:24:41 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:24:41 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:24:41 PM	Tube furnace set to 150
12/8/2012	10:25:11 PM	H2 valve closed
12/8/2012	10:25:11 PM	BCl3 valve closed
12/8/2012	10:25:11 PM	PH3 valve closed
12/8/2012	10:25:11 PM	SiCl4 pre valve closed
12/8/2012	10:25:11 PM	SiCl4 post valve closed
12/8/2012	10:25:11 PM	Bypass valve closed
12/8/2012	10:25:11 PM	Bubbler valve closed
12/8/2012	10:25:11 PM	Helium valve opened
12/8/2012	10:25:11 PM	Main Vac valve opened
12/8/2012	10:25:11 PM	Helium MFC set to  20.000000
12/8/2012	10:25:11 PM	H2 MFC set to  0.000000
12/8/2012	10:25:11 PM	BCl3 MFC set to  0.000000
12/8/2012	10:25:11 PM	PH3 MFC set to  0.000000
12/8/2012	10:25:11 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:25:11 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:25:11 PM	Tube furnace set to 150
12/8/2012	10:25:41 PM	Helium valve closed
12/8/2012	10:25:41 PM	H2 valve closed
12/8/2012	10:25:41 PM	BCl3 valve closed
12/8/2012	10:25:41 PM	PH3 valve closed
12/8/2012	10:25:41 PM	SiCl4 pre valve closed
12/8/2012	10:25:41 PM	SiCl4 post valve closed
12/8/2012	10:25:41 PM	Bypass valve closed
12/8/2012	10:25:41 PM	Bubbler valve closed
12/8/2012	10:25:41 PM	Main Vac valve opened
12/8/2012	10:25:41 PM	Helium MFC set to  0.000000
12/8/2012	10:25:41 PM	H2 MFC set to  0.000000
12/8/2012	10:25:41 PM	BCl3 MFC set to  0.000000
12/8/2012	10:25:41 PM	PH3 MFC set to  0.000000
12/8/2012	10:25:41 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:25:41 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:25:41 PM	Tube furnace set to 150
12/8/2012	10:26:11 PM	H2 valve closed
12/8/2012	10:26:11 PM	BCl3 valve closed
12/8/2012	10:26:11 PM	PH3 valve closed
12/8/2012	10:26:11 PM	SiCl4 pre valve closed
12/8/2012	10:26:11 PM	SiCl4 post valve closed
12/8/2012	10:26:11 PM	Bypass valve closed
12/8/2012	10:26:11 PM	Bubbler valve closed
12/8/2012	10:26:11 PM	Helium valve opened
12/8/2012	10:26:11 PM	Main Vac valve opened
12/8/2012	10:26:11 PM	Helium MFC set to  20.000000
12/8/2012	10:26:11 PM	H2 MFC set to  0.000000
12/8/2012	10:26:11 PM	BCl3 MFC set to  0.000000
12/8/2012	10:26:11 PM	PH3 MFC set to  0.000000
12/8/2012	10:26:11 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:26:11 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:26:12 PM	Tube furnace set to 150
12/8/2012	10:26:42 PM	Helium valve closed
12/8/2012	10:26:42 PM	H2 valve closed
12/8/2012	10:26:42 PM	BCl3 valve closed
12/8/2012	10:26:42 PM	PH3 valve closed
12/8/2012	10:26:42 PM	SiCl4 pre valve closed
12/8/2012	10:26:42 PM	SiCl4 post valve closed
12/8/2012	10:26:42 PM	Bypass valve closed
12/8/2012	10:26:42 PM	Bubbler valve closed
12/8/2012	10:26:42 PM	Main Vac valve opened
12/8/2012	10:26:42 PM	Helium MFC set to  0.000000
12/8/2012	10:26:42 PM	H2 MFC set to  0.000000
12/8/2012	10:26:42 PM	BCl3 MFC set to  0.000000
12/8/2012	10:26:42 PM	PH3 MFC set to  0.000000
12/8/2012	10:26:42 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:26:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:26:42 PM	Tube furnace set to 150
12/8/2012	10:27:12 PM	H2 valve closed
12/8/2012	10:27:12 PM	BCl3 valve closed
12/8/2012	10:27:12 PM	PH3 valve closed
12/8/2012	10:27:12 PM	SiCl4 pre valve closed
12/8/2012	10:27:12 PM	SiCl4 post valve closed
12/8/2012	10:27:12 PM	Bypass valve closed
12/8/2012	10:27:12 PM	Bubbler valve closed
12/8/2012	10:27:12 PM	Helium valve opened
12/8/2012	10:27:12 PM	Main Vac valve opened
12/8/2012	10:27:12 PM	Helium MFC set to  20.000000
12/8/2012	10:27:12 PM	H2 MFC set to  0.000000
12/8/2012	10:27:12 PM	BCl3 MFC set to  0.000000
12/8/2012	10:27:12 PM	PH3 MFC set to  0.000000
12/8/2012	10:27:12 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:27:12 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:27:12 PM	Tube furnace set to 150
12/8/2012	10:27:42 PM	Helium valve closed
12/8/2012	10:27:42 PM	H2 valve closed
12/8/2012	10:27:42 PM	BCl3 valve closed
12/8/2012	10:27:42 PM	PH3 valve closed
12/8/2012	10:27:42 PM	SiCl4 pre valve closed
12/8/2012	10:27:42 PM	SiCl4 post valve closed
12/8/2012	10:27:42 PM	Bypass valve closed
12/8/2012	10:27:42 PM	Bubbler valve closed
12/8/2012	10:27:42 PM	Main Vac valve opened
12/8/2012	10:27:42 PM	Helium MFC set to  0.000000
12/8/2012	10:27:42 PM	H2 MFC set to  0.000000
12/8/2012	10:27:42 PM	BCl3 MFC set to  0.000000
12/8/2012	10:27:42 PM	PH3 MFC set to  0.000000
12/8/2012	10:27:42 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:27:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:27:42 PM	Tube furnace set to 150
12/8/2012	10:28:12 PM	H2 valve closed
12/8/2012	10:28:12 PM	BCl3 valve closed
12/8/2012	10:28:12 PM	PH3 valve closed
12/8/2012	10:28:12 PM	SiCl4 pre valve closed
12/8/2012	10:28:12 PM	SiCl4 post valve closed
12/8/2012	10:28:12 PM	Bypass valve closed
12/8/2012	10:28:12 PM	Bubbler valve closed
12/8/2012	10:28:12 PM	Helium valve opened
12/8/2012	10:28:12 PM	Main Vac valve opened
12/8/2012	10:28:12 PM	Helium MFC set to  20.000000
12/8/2012	10:28:12 PM	H2 MFC set to  0.000000
12/8/2012	10:28:12 PM	BCl3 MFC set to  0.000000
12/8/2012	10:28:12 PM	PH3 MFC set to  0.000000
12/8/2012	10:28:12 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:28:12 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:28:13 PM	Tube furnace set to 150
12/8/2012	10:28:43 PM	Helium valve closed
12/8/2012	10:28:43 PM	H2 valve closed
12/8/2012	10:28:43 PM	BCl3 valve closed
12/8/2012	10:28:43 PM	PH3 valve closed
12/8/2012	10:28:43 PM	SiCl4 pre valve closed
12/8/2012	10:28:43 PM	SiCl4 post valve closed
12/8/2012	10:28:43 PM	Bypass valve closed
12/8/2012	10:28:43 PM	Bubbler valve closed
12/8/2012	10:28:43 PM	Main Vac valve opened
12/8/2012	10:28:43 PM	Helium MFC set to  0.000000
12/8/2012	10:28:43 PM	H2 MFC set to  0.000000
12/8/2012	10:28:43 PM	BCl3 MFC set to  0.000000
12/8/2012	10:28:43 PM	PH3 MFC set to  0.000000
12/8/2012	10:28:43 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:28:43 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:28:43 PM	Tube furnace set to 150
12/8/2012	10:29:13 PM	H2 valve closed
12/8/2012	10:29:13 PM	BCl3 valve closed
12/8/2012	10:29:13 PM	PH3 valve closed
12/8/2012	10:29:13 PM	SiCl4 pre valve closed
12/8/2012	10:29:13 PM	SiCl4 post valve closed
12/8/2012	10:29:13 PM	Bypass valve closed
12/8/2012	10:29:13 PM	Bubbler valve closed
12/8/2012	10:29:13 PM	Helium valve opened
12/8/2012	10:29:13 PM	Main Vac valve opened
12/8/2012	10:29:13 PM	Helium MFC set to  20.000000
12/8/2012	10:29:13 PM	H2 MFC set to  0.000000
12/8/2012	10:29:13 PM	BCl3 MFC set to  0.000000
12/8/2012	10:29:13 PM	PH3 MFC set to  0.000000
12/8/2012	10:29:13 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:29:13 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:29:13 PM	Tube furnace set to 150
12/8/2012	10:29:43 PM	Helium valve closed
12/8/2012	10:29:43 PM	H2 valve closed
12/8/2012	10:29:43 PM	BCl3 valve closed
12/8/2012	10:29:43 PM	PH3 valve closed
12/8/2012	10:29:43 PM	SiCl4 pre valve closed
12/8/2012	10:29:43 PM	SiCl4 post valve closed
12/8/2012	10:29:43 PM	Bypass valve closed
12/8/2012	10:29:43 PM	Bubbler valve closed
12/8/2012	10:29:43 PM	Main Vac valve opened
12/8/2012	10:29:43 PM	Helium MFC set to  0.000000
12/8/2012	10:29:43 PM	H2 MFC set to  0.000000
12/8/2012	10:29:43 PM	BCl3 MFC set to  0.000000
12/8/2012	10:29:43 PM	PH3 MFC set to  0.000000
12/8/2012	10:29:43 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:29:43 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:29:43 PM	Tube furnace set to 150
12/8/2012	10:30:13 PM	H2 valve closed
12/8/2012	10:30:13 PM	BCl3 valve closed
12/8/2012	10:30:13 PM	PH3 valve closed
12/8/2012	10:30:13 PM	SiCl4 pre valve closed
12/8/2012	10:30:13 PM	SiCl4 post valve closed
12/8/2012	10:30:13 PM	Bypass valve closed
12/8/2012	10:30:13 PM	Bubbler valve closed
12/8/2012	10:30:13 PM	Helium valve opened
12/8/2012	10:30:13 PM	Main Vac valve opened
12/8/2012	10:30:13 PM	Helium MFC set to  20.000000
12/8/2012	10:30:13 PM	H2 MFC set to  0.000000
12/8/2012	10:30:13 PM	BCl3 MFC set to  0.000000
12/8/2012	10:30:13 PM	PH3 MFC set to  0.000000
12/8/2012	10:30:13 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:30:13 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:30:14 PM	Tube furnace set to 150
12/8/2012	10:30:44 PM	Helium valve closed
12/8/2012	10:30:44 PM	H2 valve closed
12/8/2012	10:30:44 PM	BCl3 valve closed
12/8/2012	10:30:44 PM	PH3 valve closed
12/8/2012	10:30:44 PM	SiCl4 pre valve closed
12/8/2012	10:30:44 PM	SiCl4 post valve closed
12/8/2012	10:30:44 PM	Bypass valve closed
12/8/2012	10:30:44 PM	Bubbler valve closed
12/8/2012	10:30:44 PM	Main Vac valve opened
12/8/2012	10:30:44 PM	Helium MFC set to  0.000000
12/8/2012	10:30:44 PM	H2 MFC set to  0.000000
12/8/2012	10:30:44 PM	BCl3 MFC set to  0.000000
12/8/2012	10:30:44 PM	PH3 MFC set to  0.000000
12/8/2012	10:30:44 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:30:44 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:30:44 PM	Tube furnace set to 150
12/8/2012	10:31:14 PM	H2 valve closed
12/8/2012	10:31:14 PM	BCl3 valve closed
12/8/2012	10:31:14 PM	PH3 valve closed
12/8/2012	10:31:14 PM	SiCl4 pre valve closed
12/8/2012	10:31:14 PM	SiCl4 post valve closed
12/8/2012	10:31:14 PM	Bypass valve closed
12/8/2012	10:31:14 PM	Bubbler valve closed
12/8/2012	10:31:14 PM	Helium valve opened
12/8/2012	10:31:14 PM	Main Vac valve opened
12/8/2012	10:31:14 PM	Helium MFC set to  20.000000
12/8/2012	10:31:14 PM	H2 MFC set to  0.000000
12/8/2012	10:31:14 PM	BCl3 MFC set to  0.000000
12/8/2012	10:31:14 PM	PH3 MFC set to  0.000000
12/8/2012	10:31:14 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:31:14 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:31:14 PM	Tube furnace set to 150
12/8/2012	10:31:44 PM	Helium valve closed
12/8/2012	10:31:44 PM	H2 valve closed
12/8/2012	10:31:44 PM	BCl3 valve closed
12/8/2012	10:31:44 PM	PH3 valve closed
12/8/2012	10:31:44 PM	SiCl4 pre valve closed
12/8/2012	10:31:44 PM	SiCl4 post valve closed
12/8/2012	10:31:44 PM	Bypass valve closed
12/8/2012	10:31:44 PM	Bubbler valve closed
12/8/2012	10:31:44 PM	Main Vac valve opened
12/8/2012	10:31:44 PM	Helium MFC set to  0.000000
12/8/2012	10:31:44 PM	H2 MFC set to  0.000000
12/8/2012	10:31:44 PM	BCl3 MFC set to  0.000000
12/8/2012	10:31:44 PM	PH3 MFC set to  0.000000
12/8/2012	10:31:44 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:31:44 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:31:44 PM	Tube furnace set to 150
12/8/2012	10:32:14 PM	H2 valve closed
12/8/2012	10:32:14 PM	BCl3 valve closed
12/8/2012	10:32:14 PM	PH3 valve closed
12/8/2012	10:32:14 PM	SiCl4 pre valve closed
12/8/2012	10:32:14 PM	SiCl4 post valve closed
12/8/2012	10:32:14 PM	Bypass valve closed
12/8/2012	10:32:14 PM	Bubbler valve closed
12/8/2012	10:32:14 PM	Helium valve opened
12/8/2012	10:32:14 PM	Main Vac valve opened
12/8/2012	10:32:14 PM	Helium MFC set to  20.000000
12/8/2012	10:32:14 PM	H2 MFC set to  0.000000
12/8/2012	10:32:14 PM	BCl3 MFC set to  0.000000
12/8/2012	10:32:14 PM	PH3 MFC set to  0.000000
12/8/2012	10:32:14 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:32:14 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:32:14 PM	Tube furnace set to 150
12/8/2012	10:32:45 PM	Helium valve closed
12/8/2012	10:32:45 PM	H2 valve closed
12/8/2012	10:32:45 PM	BCl3 valve closed
12/8/2012	10:32:45 PM	PH3 valve closed
12/8/2012	10:32:45 PM	SiCl4 pre valve closed
12/8/2012	10:32:45 PM	SiCl4 post valve closed
12/8/2012	10:32:45 PM	Bypass valve closed
12/8/2012	10:32:45 PM	Bubbler valve closed
12/8/2012	10:32:45 PM	Main Vac valve opened
12/8/2012	10:32:45 PM	Helium MFC set to  0.000000
12/8/2012	10:32:45 PM	H2 MFC set to  0.000000
12/8/2012	10:32:45 PM	BCl3 MFC set to  0.000000
12/8/2012	10:32:45 PM	PH3 MFC set to  0.000000
12/8/2012	10:32:45 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:32:45 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:32:45 PM	Tube furnace set to 150
12/8/2012	10:32:46 PM	Run finished at 10:32 PM
12/8/2012	10:34:47 PM	Main Vac valve closed
12/8/2012	10:34:58 PM	Main Vac valve opened
12/8/2012	10:35:14 PM	Recipe started at 10:35 PM
12/8/2012	10:35:14 PM	Helium valve closed
12/8/2012	10:35:14 PM	H2 valve closed
12/8/2012	10:35:14 PM	BCl3 valve closed
12/8/2012	10:35:14 PM	PH3 valve closed
12/8/2012	10:35:14 PM	SiCl4 pre valve closed
12/8/2012	10:35:14 PM	SiCl4 post valve closed
12/8/2012	10:35:14 PM	Bypass valve closed
12/8/2012	10:35:14 PM	Bubbler valve closed
12/8/2012	10:35:14 PM	Main Vac valve opened
12/8/2012	10:35:14 PM	Helium MFC set to  0.000000
12/8/2012	10:35:14 PM	H2 MFC set to  0.000000
12/8/2012	10:35:14 PM	BCl3 MFC set to  0.000000
12/8/2012	10:35:14 PM	PH3 MFC set to  0.000000
12/8/2012	10:35:14 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:35:14 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:35:14 PM	Tube furnace set to 150
12/8/2012	10:35:19 PM	H2 valve closed
12/8/2012	10:35:19 PM	BCl3 valve closed
12/8/2012	10:35:19 PM	PH3 valve closed
12/8/2012	10:35:19 PM	SiCl4 pre valve closed
12/8/2012	10:35:19 PM	SiCl4 post valve closed
12/8/2012	10:35:19 PM	Bypass valve closed
12/8/2012	10:35:19 PM	Bubbler valve closed
12/8/2012	10:35:19 PM	Helium valve opened
12/8/2012	10:35:19 PM	Main Vac valve opened
12/8/2012	10:35:19 PM	Helium MFC set to  20.000000
12/8/2012	10:35:19 PM	H2 MFC set to  0.000000
12/8/2012	10:35:19 PM	BCl3 MFC set to  0.000000
12/8/2012	10:35:19 PM	PH3 MFC set to  0.000000
12/8/2012	10:35:19 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:35:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:35:19 PM	Tube furnace set to 150
12/8/2012	10:35:49 PM	Helium valve closed
12/8/2012	10:35:49 PM	H2 valve closed
12/8/2012	10:35:49 PM	BCl3 valve closed
12/8/2012	10:35:49 PM	PH3 valve closed
12/8/2012	10:35:49 PM	SiCl4 pre valve closed
12/8/2012	10:35:49 PM	SiCl4 post valve closed
12/8/2012	10:35:49 PM	Bypass valve closed
12/8/2012	10:35:49 PM	Bubbler valve closed
12/8/2012	10:35:49 PM	Main Vac valve opened
12/8/2012	10:35:49 PM	Helium MFC set to  0.000000
12/8/2012	10:35:49 PM	H2 MFC set to  0.000000
12/8/2012	10:35:49 PM	BCl3 MFC set to  0.000000
12/8/2012	10:35:49 PM	PH3 MFC set to  0.000000
12/8/2012	10:35:50 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:35:50 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:35:50 PM	Tube furnace set to 150
12/8/2012	10:36:20 PM	H2 valve closed
12/8/2012	10:36:20 PM	BCl3 valve closed
12/8/2012	10:36:20 PM	PH3 valve closed
12/8/2012	10:36:20 PM	SiCl4 pre valve closed
12/8/2012	10:36:20 PM	SiCl4 post valve closed
12/8/2012	10:36:20 PM	Bypass valve closed
12/8/2012	10:36:20 PM	Bubbler valve closed
12/8/2012	10:36:20 PM	Helium valve opened
12/8/2012	10:36:20 PM	Main Vac valve opened
12/8/2012	10:36:20 PM	Helium MFC set to  20.000000
12/8/2012	10:36:20 PM	H2 MFC set to  0.000000
12/8/2012	10:36:20 PM	BCl3 MFC set to  0.000000
12/8/2012	10:36:20 PM	PH3 MFC set to  0.000000
12/8/2012	10:36:20 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:36:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:36:20 PM	Tube furnace set to 150
12/8/2012	10:36:50 PM	Helium valve closed
12/8/2012	10:36:50 PM	H2 valve closed
12/8/2012	10:36:50 PM	BCl3 valve closed
12/8/2012	10:36:50 PM	PH3 valve closed
12/8/2012	10:36:50 PM	SiCl4 pre valve closed
12/8/2012	10:36:50 PM	SiCl4 post valve closed
12/8/2012	10:36:50 PM	Bypass valve closed
12/8/2012	10:36:50 PM	Bubbler valve closed
12/8/2012	10:36:50 PM	Main Vac valve opened
12/8/2012	10:36:50 PM	Helium MFC set to  0.000000
12/8/2012	10:36:50 PM	H2 MFC set to  0.000000
12/8/2012	10:36:50 PM	BCl3 MFC set to  0.000000
12/8/2012	10:36:50 PM	PH3 MFC set to  0.000000
12/8/2012	10:36:50 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:36:50 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:36:50 PM	Tube furnace set to 150
12/8/2012	10:37:20 PM	H2 valve closed
12/8/2012	10:37:20 PM	BCl3 valve closed
12/8/2012	10:37:20 PM	PH3 valve closed
12/8/2012	10:37:20 PM	SiCl4 pre valve closed
12/8/2012	10:37:20 PM	SiCl4 post valve closed
12/8/2012	10:37:20 PM	Bypass valve closed
12/8/2012	10:37:20 PM	Bubbler valve closed
12/8/2012	10:37:20 PM	Helium valve opened
12/8/2012	10:37:20 PM	Main Vac valve opened
12/8/2012	10:37:20 PM	Helium MFC set to  20.000000
12/8/2012	10:37:20 PM	H2 MFC set to  0.000000
12/8/2012	10:37:20 PM	BCl3 MFC set to  0.000000
12/8/2012	10:37:20 PM	PH3 MFC set to  0.000000
12/8/2012	10:37:20 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:37:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:37:20 PM	Tube furnace set to 150
12/8/2012	10:37:50 PM	Helium valve closed
12/8/2012	10:37:50 PM	H2 valve closed
12/8/2012	10:37:50 PM	BCl3 valve closed
12/8/2012	10:37:50 PM	PH3 valve closed
12/8/2012	10:37:50 PM	SiCl4 pre valve closed
12/8/2012	10:37:50 PM	SiCl4 post valve closed
12/8/2012	10:37:50 PM	Bypass valve closed
12/8/2012	10:37:50 PM	Bubbler valve closed
12/8/2012	10:37:50 PM	Main Vac valve opened
12/8/2012	10:37:50 PM	Helium MFC set to  0.000000
12/8/2012	10:37:50 PM	H2 MFC set to  0.000000
12/8/2012	10:37:50 PM	BCl3 MFC set to  0.000000
12/8/2012	10:37:50 PM	PH3 MFC set to  0.000000
12/8/2012	10:37:50 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:37:50 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:37:51 PM	Tube furnace set to 150
12/8/2012	10:38:21 PM	H2 valve closed
12/8/2012	10:38:21 PM	BCl3 valve closed
12/8/2012	10:38:21 PM	PH3 valve closed
12/8/2012	10:38:21 PM	SiCl4 pre valve closed
12/8/2012	10:38:21 PM	SiCl4 post valve closed
12/8/2012	10:38:21 PM	Bypass valve closed
12/8/2012	10:38:21 PM	Bubbler valve closed
12/8/2012	10:38:21 PM	Helium valve opened
12/8/2012	10:38:21 PM	Main Vac valve opened
12/8/2012	10:38:21 PM	Helium MFC set to  20.000000
12/8/2012	10:38:21 PM	H2 MFC set to  0.000000
12/8/2012	10:38:21 PM	BCl3 MFC set to  0.000000
12/8/2012	10:38:21 PM	PH3 MFC set to  0.000000
12/8/2012	10:38:21 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:38:21 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:38:21 PM	Tube furnace set to 150
12/8/2012	10:38:51 PM	Helium valve closed
12/8/2012	10:38:51 PM	H2 valve closed
12/8/2012	10:38:51 PM	BCl3 valve closed
12/8/2012	10:38:51 PM	PH3 valve closed
12/8/2012	10:38:51 PM	SiCl4 pre valve closed
12/8/2012	10:38:51 PM	SiCl4 post valve closed
12/8/2012	10:38:51 PM	Bypass valve closed
12/8/2012	10:38:51 PM	Bubbler valve closed
12/8/2012	10:38:51 PM	Main Vac valve opened
12/8/2012	10:38:51 PM	Helium MFC set to  0.000000
12/8/2012	10:38:51 PM	H2 MFC set to  0.000000
12/8/2012	10:38:51 PM	BCl3 MFC set to  0.000000
12/8/2012	10:38:51 PM	PH3 MFC set to  0.000000
12/8/2012	10:38:51 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:38:51 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:38:51 PM	Tube furnace set to 150
12/8/2012	10:39:21 PM	H2 valve closed
12/8/2012	10:39:21 PM	BCl3 valve closed
12/8/2012	10:39:21 PM	PH3 valve closed
12/8/2012	10:39:21 PM	SiCl4 pre valve closed
12/8/2012	10:39:21 PM	SiCl4 post valve closed
12/8/2012	10:39:21 PM	Bypass valve closed
12/8/2012	10:39:21 PM	Bubbler valve closed
12/8/2012	10:39:21 PM	Helium valve opened
12/8/2012	10:39:21 PM	Main Vac valve opened
12/8/2012	10:39:21 PM	Helium MFC set to  20.000000
12/8/2012	10:39:21 PM	H2 MFC set to  0.000000
12/8/2012	10:39:21 PM	BCl3 MFC set to  0.000000
12/8/2012	10:39:21 PM	PH3 MFC set to  0.000000
12/8/2012	10:39:21 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:39:21 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:39:21 PM	Tube furnace set to 150
12/8/2012	10:39:51 PM	Helium valve closed
12/8/2012	10:39:51 PM	H2 valve closed
12/8/2012	10:39:51 PM	BCl3 valve closed
12/8/2012	10:39:51 PM	PH3 valve closed
12/8/2012	10:39:51 PM	SiCl4 pre valve closed
12/8/2012	10:39:51 PM	SiCl4 post valve closed
12/8/2012	10:39:51 PM	Bypass valve closed
12/8/2012	10:39:51 PM	Bubbler valve closed
12/8/2012	10:39:51 PM	Main Vac valve opened
12/8/2012	10:39:51 PM	Helium MFC set to  0.000000
12/8/2012	10:39:51 PM	H2 MFC set to  0.000000
12/8/2012	10:39:51 PM	BCl3 MFC set to  0.000000
12/8/2012	10:39:51 PM	PH3 MFC set to  0.000000
12/8/2012	10:39:51 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:39:51 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:39:52 PM	Tube furnace set to 150
12/8/2012	10:40:22 PM	H2 valve closed
12/8/2012	10:40:22 PM	BCl3 valve closed
12/8/2012	10:40:22 PM	PH3 valve closed
12/8/2012	10:40:22 PM	SiCl4 pre valve closed
12/8/2012	10:40:22 PM	SiCl4 post valve closed
12/8/2012	10:40:22 PM	Bypass valve closed
12/8/2012	10:40:22 PM	Bubbler valve closed
12/8/2012	10:40:22 PM	Helium valve opened
12/8/2012	10:40:22 PM	Main Vac valve opened
12/8/2012	10:40:22 PM	Helium MFC set to  20.000000
12/8/2012	10:40:22 PM	H2 MFC set to  0.000000
12/8/2012	10:40:22 PM	BCl3 MFC set to  0.000000
12/8/2012	10:40:22 PM	PH3 MFC set to  0.000000
12/8/2012	10:40:22 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:40:22 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:40:22 PM	Tube furnace set to 150
12/8/2012	10:40:52 PM	Helium valve closed
12/8/2012	10:40:52 PM	H2 valve closed
12/8/2012	10:40:52 PM	BCl3 valve closed
12/8/2012	10:40:52 PM	PH3 valve closed
12/8/2012	10:40:52 PM	SiCl4 pre valve closed
12/8/2012	10:40:52 PM	SiCl4 post valve closed
12/8/2012	10:40:52 PM	Bypass valve closed
12/8/2012	10:40:52 PM	Bubbler valve closed
12/8/2012	10:40:52 PM	Main Vac valve opened
12/8/2012	10:40:52 PM	Helium MFC set to  0.000000
12/8/2012	10:40:52 PM	H2 MFC set to  0.000000
12/8/2012	10:40:52 PM	BCl3 MFC set to  0.000000
12/8/2012	10:40:52 PM	PH3 MFC set to  0.000000
12/8/2012	10:40:52 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:40:52 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:40:52 PM	Tube furnace set to 150
12/8/2012	10:41:22 PM	H2 valve closed
12/8/2012	10:41:22 PM	BCl3 valve closed
12/8/2012	10:41:22 PM	PH3 valve closed
12/8/2012	10:41:22 PM	SiCl4 pre valve closed
12/8/2012	10:41:22 PM	SiCl4 post valve closed
12/8/2012	10:41:22 PM	Bypass valve closed
12/8/2012	10:41:22 PM	Bubbler valve closed
12/8/2012	10:41:22 PM	Helium valve opened
12/8/2012	10:41:22 PM	Main Vac valve opened
12/8/2012	10:41:22 PM	Helium MFC set to  20.000000
12/8/2012	10:41:22 PM	H2 MFC set to  0.000000
12/8/2012	10:41:22 PM	BCl3 MFC set to  0.000000
12/8/2012	10:41:22 PM	PH3 MFC set to  0.000000
12/8/2012	10:41:22 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:41:22 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:41:22 PM	Tube furnace set to 150
12/8/2012	10:41:52 PM	Helium valve closed
12/8/2012	10:41:52 PM	H2 valve closed
12/8/2012	10:41:52 PM	BCl3 valve closed
12/8/2012	10:41:52 PM	PH3 valve closed
12/8/2012	10:41:52 PM	SiCl4 pre valve closed
12/8/2012	10:41:52 PM	SiCl4 post valve closed
12/8/2012	10:41:52 PM	Bypass valve closed
12/8/2012	10:41:52 PM	Bubbler valve closed
12/8/2012	10:41:52 PM	Main Vac valve opened
12/8/2012	10:41:52 PM	Helium MFC set to  0.000000
12/8/2012	10:41:52 PM	H2 MFC set to  0.000000
12/8/2012	10:41:52 PM	BCl3 MFC set to  0.000000
12/8/2012	10:41:52 PM	PH3 MFC set to  0.000000
12/8/2012	10:41:52 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:41:52 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:41:53 PM	Tube furnace set to 150
12/8/2012	10:42:23 PM	H2 valve closed
12/8/2012	10:42:23 PM	BCl3 valve closed
12/8/2012	10:42:23 PM	PH3 valve closed
12/8/2012	10:42:23 PM	SiCl4 pre valve closed
12/8/2012	10:42:23 PM	SiCl4 post valve closed
12/8/2012	10:42:23 PM	Bypass valve closed
12/8/2012	10:42:23 PM	Bubbler valve closed
12/8/2012	10:42:23 PM	Helium valve opened
12/8/2012	10:42:23 PM	Main Vac valve opened
12/8/2012	10:42:23 PM	Helium MFC set to  20.000000
12/8/2012	10:42:23 PM	H2 MFC set to  0.000000
12/8/2012	10:42:23 PM	BCl3 MFC set to  0.000000
12/8/2012	10:42:23 PM	PH3 MFC set to  0.000000
12/8/2012	10:42:23 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:42:23 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:42:23 PM	Tube furnace set to 150
12/8/2012	10:42:53 PM	Helium valve closed
12/8/2012	10:42:53 PM	H2 valve closed
12/8/2012	10:42:53 PM	BCl3 valve closed
12/8/2012	10:42:53 PM	PH3 valve closed
12/8/2012	10:42:53 PM	SiCl4 pre valve closed
12/8/2012	10:42:53 PM	SiCl4 post valve closed
12/8/2012	10:42:53 PM	Bypass valve closed
12/8/2012	10:42:53 PM	Bubbler valve closed
12/8/2012	10:42:53 PM	Main Vac valve opened
12/8/2012	10:42:53 PM	Helium MFC set to  0.000000
12/8/2012	10:42:53 PM	H2 MFC set to  0.000000
12/8/2012	10:42:53 PM	BCl3 MFC set to  0.000000
12/8/2012	10:42:53 PM	PH3 MFC set to  0.000000
12/8/2012	10:42:53 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:42:53 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:42:53 PM	Tube furnace set to 150
12/8/2012	10:43:23 PM	H2 valve closed
12/8/2012	10:43:23 PM	BCl3 valve closed
12/8/2012	10:43:23 PM	PH3 valve closed
12/8/2012	10:43:23 PM	SiCl4 pre valve closed
12/8/2012	10:43:23 PM	SiCl4 post valve closed
12/8/2012	10:43:23 PM	Bypass valve closed
12/8/2012	10:43:23 PM	Bubbler valve closed
12/8/2012	10:43:23 PM	Helium valve opened
12/8/2012	10:43:23 PM	Main Vac valve opened
12/8/2012	10:43:23 PM	Helium MFC set to  20.000000
12/8/2012	10:43:23 PM	H2 MFC set to  0.000000
12/8/2012	10:43:23 PM	BCl3 MFC set to  0.000000
12/8/2012	10:43:23 PM	PH3 MFC set to  0.000000
12/8/2012	10:43:23 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:43:23 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:43:23 PM	Tube furnace set to 150
12/8/2012	10:43:49 PM	Helium valve closed
12/8/2012	10:43:49 PM	H2 valve closed
12/8/2012	10:43:49 PM	BCl3 valve closed
12/8/2012	10:43:49 PM	PH3 valve closed
12/8/2012	10:43:49 PM	SiCl4 pre valve closed
12/8/2012	10:43:49 PM	SiCl4 post valve closed
12/8/2012	10:43:49 PM	Bypass valve closed
12/8/2012	10:43:49 PM	Bubbler valve closed
12/8/2012	10:43:49 PM	Main Vac valve opened
12/8/2012	10:43:49 PM	Helium MFC set to  0.000000
12/8/2012	10:43:49 PM	H2 MFC set to  0.000000
12/8/2012	10:43:49 PM	BCl3 MFC set to  0.000000
12/8/2012	10:43:49 PM	PH3 MFC set to  0.000000
12/8/2012	10:43:49 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:43:49 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:43:50 PM	Tube furnace set to 150
12/8/2012	10:44:20 PM	H2 valve closed
12/8/2012	10:44:20 PM	BCl3 valve closed
12/8/2012	10:44:20 PM	PH3 valve closed
12/8/2012	10:44:20 PM	SiCl4 pre valve closed
12/8/2012	10:44:20 PM	SiCl4 post valve closed
12/8/2012	10:44:20 PM	Bypass valve closed
12/8/2012	10:44:20 PM	Bubbler valve closed
12/8/2012	10:44:20 PM	Helium valve opened
12/8/2012	10:44:20 PM	Main Vac valve opened
12/8/2012	10:44:20 PM	Helium MFC set to  20.000000
12/8/2012	10:44:20 PM	H2 MFC set to  0.000000
12/8/2012	10:44:20 PM	BCl3 MFC set to  0.000000
12/8/2012	10:44:20 PM	PH3 MFC set to  0.000000
12/8/2012	10:44:20 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:44:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:44:20 PM	Tube furnace set to 150
12/8/2012	10:44:50 PM	Helium valve closed
12/8/2012	10:44:50 PM	H2 valve closed
12/8/2012	10:44:50 PM	BCl3 valve closed
12/8/2012	10:44:50 PM	PH3 valve closed
12/8/2012	10:44:50 PM	SiCl4 pre valve closed
12/8/2012	10:44:50 PM	SiCl4 post valve closed
12/8/2012	10:44:50 PM	Bypass valve closed
12/8/2012	10:44:50 PM	Bubbler valve closed
12/8/2012	10:44:50 PM	Main Vac valve opened
12/8/2012	10:44:50 PM	Helium MFC set to  0.000000
12/8/2012	10:44:50 PM	H2 MFC set to  0.000000
12/8/2012	10:44:50 PM	BCl3 MFC set to  0.000000
12/8/2012	10:44:50 PM	PH3 MFC set to  0.000000
12/8/2012	10:44:50 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:44:50 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:44:50 PM	Tube furnace set to 150
12/8/2012	10:44:51 PM	Run finished at 10:44 PM
12/8/2012	10:45:20 PM	Main Vac valve closed
12/8/2012	10:45:31 PM	Main Vac valve opened
12/8/2012	10:47:37 PM	Recipe started at 10:47 PM
12/8/2012	10:47:38 PM	Helium valve closed
12/8/2012	10:47:38 PM	H2 valve closed
12/8/2012	10:47:38 PM	BCl3 valve closed
12/8/2012	10:47:38 PM	PH3 valve closed
12/8/2012	10:47:38 PM	SiCl4 pre valve closed
12/8/2012	10:47:38 PM	SiCl4 post valve closed
12/8/2012	10:47:38 PM	Main Vac valve closed
12/8/2012	10:47:38 PM	Bypass valve closed
12/8/2012	10:47:38 PM	Bubbler valve closed
12/8/2012	10:47:38 PM	Helium MFC set to  0.000000
12/8/2012	10:47:38 PM	H2 MFC set to  0.000000
12/8/2012	10:47:38 PM	BCl3 MFC set to  0.000000
12/8/2012	10:47:38 PM	PH3 MFC set to  0.000000
12/8/2012	10:47:38 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:47:38 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:47:38 PM	Tube furnace set to 0
12/8/2012	10:47:41 PM	Helium valve closed
12/8/2012	10:47:41 PM	BCl3 valve closed
12/8/2012	10:47:41 PM	PH3 valve closed
12/8/2012	10:47:41 PM	SiCl4 pre valve closed
12/8/2012	10:47:41 PM	SiCl4 post valve closed
12/8/2012	10:47:41 PM	Main Vac valve closed
12/8/2012	10:47:41 PM	Bypass valve closed
12/8/2012	10:47:41 PM	Bubbler valve closed
12/8/2012	10:47:41 PM	H2 valve opened
12/8/2012	10:47:41 PM	Helium MFC set to  0.000000
12/8/2012	10:47:41 PM	H2 MFC set to  500.000000
12/8/2012	10:47:41 PM	BCl3 MFC set to  0.000000
12/8/2012	10:47:41 PM	PH3 MFC set to  0.000000
12/8/2012	10:47:41 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:47:41 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:47:41 PM	Tube furnace set to 0
12/8/2012	10:48:53 PM	Helium valve closed
12/8/2012	10:48:53 PM	BCl3 valve closed
12/8/2012	10:48:53 PM	PH3 valve closed
12/8/2012	10:48:53 PM	SiCl4 pre valve closed
12/8/2012	10:48:53 PM	SiCl4 post valve closed
12/8/2012	10:48:53 PM	Main Vac valve closed
12/8/2012	10:48:53 PM	Bypass valve closed
12/8/2012	10:48:53 PM	H2 valve opened
12/8/2012	10:48:53 PM	Bubbler valve opened
12/8/2012	10:48:53 PM	Helium MFC set to  0.000000
12/8/2012	10:48:53 PM	H2 MFC set to  500.000000
12/8/2012	10:48:53 PM	BCl3 MFC set to  0.000000
12/8/2012	10:48:53 PM	PH3 MFC set to  0.000000
12/8/2012	10:48:53 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:48:53 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:48:53 PM	Tube furnace set to 0
12/8/2012	10:48:55 PM	Helium valve closed
12/8/2012	10:48:55 PM	BCl3 valve closed
12/8/2012	10:48:55 PM	PH3 valve closed
12/8/2012	10:48:55 PM	SiCl4 pre valve closed
12/8/2012	10:48:55 PM	SiCl4 post valve closed
12/8/2012	10:48:55 PM	Main Vac valve closed
12/8/2012	10:48:55 PM	Bypass valve closed
12/8/2012	10:48:55 PM	H2 valve opened
12/8/2012	10:48:55 PM	Bubbler valve opened
12/8/2012	10:48:55 PM	Helium MFC set to  0.000000
12/8/2012	10:48:55 PM	H2 MFC set to  450.000000
12/8/2012	10:48:55 PM	BCl3 MFC set to  0.000000
12/8/2012	10:48:55 PM	PH3 MFC set to  0.000000
12/8/2012	10:48:55 PM	SiCl4 MFC set to  0.000000
12/8/2012	10:48:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	10:48:55 PM	Tube furnace set to 1000
12/8/2012	11:13:55 PM	Helium valve closed
12/8/2012	11:13:55 PM	PH3 valve closed
12/8/2012	11:13:55 PM	Main Vac valve closed
12/8/2012	11:13:55 PM	Bypass valve closed
12/8/2012	11:13:55 PM	H2 valve opened
12/8/2012	11:13:55 PM	BCl3 valve opened
12/8/2012	11:13:55 PM	SiCl4 pre valve opened
12/8/2012	11:13:55 PM	SiCl4 post valve opened
12/8/2012	11:13:55 PM	Bubbler valve opened
12/8/2012	11:13:55 PM	Helium MFC set to  0.000000
12/8/2012	11:13:55 PM	H2 MFC set to  450.000000
12/8/2012	11:13:55 PM	BCl3 MFC set to  1.500000
12/8/2012	11:13:55 PM	PH3 MFC set to  0.000000
12/8/2012	11:13:55 PM	SiCl4 MFC set to  50.000000
12/8/2012	11:13:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	11:13:55 PM	Tube furnace set to 1000
12/8/2012	11:18:55 PM	Helium valve closed
12/8/2012	11:18:55 PM	BCl3 valve closed
12/8/2012	11:18:55 PM	PH3 valve closed
12/8/2012	11:18:55 PM	SiCl4 pre valve closed
12/8/2012	11:18:55 PM	SiCl4 post valve closed
12/8/2012	11:18:55 PM	Main Vac valve closed
12/8/2012	11:18:55 PM	Bypass valve closed
12/8/2012	11:18:55 PM	H2 valve opened
12/8/2012	11:18:55 PM	Bubbler valve opened
12/8/2012	11:18:55 PM	Helium MFC set to  0.000000
12/8/2012	11:18:55 PM	H2 MFC set to  500.000000
12/8/2012	11:18:55 PM	BCl3 MFC set to  0.000000
12/8/2012	11:18:55 PM	PH3 MFC set to  0.000000
12/8/2012	11:18:55 PM	SiCl4 MFC set to  0.000000
12/8/2012	11:18:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	11:18:55 PM	Tube furnace set to 750
12/8/2012	11:23:55 PM	H2 valve closed
12/8/2012	11:23:55 PM	BCl3 valve closed
12/8/2012	11:23:55 PM	PH3 valve closed
12/8/2012	11:23:55 PM	SiCl4 pre valve closed
12/8/2012	11:23:55 PM	SiCl4 post valve closed
12/8/2012	11:23:55 PM	Main Vac valve closed
12/8/2012	11:23:55 PM	Bypass valve closed
12/8/2012	11:23:55 PM	Helium valve opened
12/8/2012	11:23:55 PM	Bubbler valve opened
12/8/2012	11:23:55 PM	Helium MFC set to  500.000000
12/8/2012	11:23:55 PM	H2 MFC set to  0.000000
12/8/2012	11:23:55 PM	BCl3 MFC set to  0.000000
12/8/2012	11:23:55 PM	PH3 MFC set to  0.000000
12/8/2012	11:23:55 PM	SiCl4 MFC set to  0.000000
12/8/2012	11:23:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	11:23:55 PM	Tube furnace set to 0
12/8/2012	11:35:09 PM	Helium valve closed
12/8/2012	11:35:09 PM	H2 valve closed
12/8/2012	11:35:09 PM	BCl3 valve closed
12/8/2012	11:35:09 PM	PH3 valve closed
12/8/2012	11:35:09 PM	SiCl4 pre valve closed
12/8/2012	11:35:09 PM	SiCl4 post valve closed
12/8/2012	11:35:09 PM	Main Vac valve closed
12/8/2012	11:35:09 PM	Bypass valve closed
12/8/2012	11:35:09 PM	Bubbler valve closed
12/8/2012	11:35:09 PM	Helium MFC set to  0.000000
12/8/2012	11:35:09 PM	H2 MFC set to  0.000000
12/8/2012	11:35:09 PM	BCl3 MFC set to  0.000000
12/8/2012	11:35:09 PM	PH3 MFC set to  0.000000
12/8/2012	11:35:09 PM	SiCl4 MFC set to  0.000000
12/8/2012	11:35:09 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	11:35:09 PM	Tube furnace set to 0
12/8/2012	11:35:10 PM	Run finished at 11:35 PM
12/8/2012	11:35:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2012	11:35:13 PM	Recipe started at 11:35 PM
12/8/2012	11:35:13 PM	Helium valve closed
12/8/2012	11:35:13 PM	H2 valve closed
12/8/2012	11:35:13 PM	BCl3 valve closed
12/8/2012	11:35:13 PM	PH3 valve closed
12/8/2012	11:35:14 PM	SiCl4 pre valve closed
12/8/2012	11:35:14 PM	SiCl4 post valve closed
12/8/2012	11:35:14 PM	Main Vac valve closed
12/8/2012	11:35:14 PM	Bypass valve closed
12/8/2012	11:35:14 PM	Bubbler valve closed
12/8/2012	11:35:14 PM	Helium MFC set to  0.000000
12/8/2012	11:35:14 PM	H2 MFC set to  0.000000
12/8/2012	11:35:14 PM	BCl3 MFC set to  0.000000
12/8/2012	11:35:14 PM	PH3 MFC set to  0.000000
12/8/2012	11:35:14 PM	SiCl4 MFC set to  0.000000
12/8/2012	11:35:14 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	11:35:14 PM	Tube furnace set to 0
12/8/2012	11:35:17 PM	H2 valve closed
12/8/2012	11:35:17 PM	BCl3 valve closed
12/8/2012	11:35:17 PM	PH3 valve closed
12/8/2012	11:35:17 PM	SiCl4 pre valve closed
12/8/2012	11:35:17 PM	SiCl4 post valve closed
12/8/2012	11:35:17 PM	Main Vac valve closed
12/8/2012	11:35:17 PM	Bypass valve closed
12/8/2012	11:35:17 PM	Bubbler valve closed
12/8/2012	11:35:17 PM	Helium valve opened
12/8/2012	11:35:17 PM	Helium MFC set to  500.000000
12/8/2012	11:35:17 PM	H2 MFC set to  0.000000
12/8/2012	11:35:17 PM	BCl3 MFC set to  0.000000
12/8/2012	11:35:17 PM	PH3 MFC set to  0.000000
12/8/2012	11:35:17 PM	SiCl4 MFC set to  0.000000
12/8/2012	11:35:17 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	11:35:17 PM	Tube furnace set to 0
12/8/2012	11:35:17 PM	Helium valve closed
12/8/2012	11:35:17 PM	H2 valve closed
12/8/2012	11:35:17 PM	BCl3 valve closed
12/8/2012	11:35:17 PM	PH3 valve closed
12/8/2012	11:35:17 PM	SiCl4 pre valve closed
12/8/2012	11:35:17 PM	SiCl4 post valve closed
12/8/2012	11:35:17 PM	Main Vac valve closed
12/8/2012	11:35:17 PM	Bypass valve closed
12/8/2012	11:35:17 PM	Bubbler valve closed
12/8/2012	11:35:17 PM	Helium MFC set to  0.000000
12/8/2012	11:35:17 PM	H2 MFC set to  0.000000
12/8/2012	11:35:17 PM	BCl3 MFC set to  0.000000
12/8/2012	11:35:17 PM	PH3 MFC set to  0.000000
12/8/2012	11:35:17 PM	SiCl4 MFC set to  0.000000
12/8/2012	11:35:17 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	11:35:17 PM	Tube furnace set to 0
12/8/2012	11:35:18 PM	Run finished at 11:35 PM
12/8/2012	11:35:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2012	11:39:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2012	11:39:50 PM	Recipe started at 11:39 PM
12/8/2012	11:39:50 PM	Helium valve closed
12/8/2012	11:39:50 PM	H2 valve closed
12/8/2012	11:39:50 PM	BCl3 valve closed
12/8/2012	11:39:50 PM	PH3 valve closed
12/8/2012	11:39:50 PM	SiCl4 pre valve closed
12/8/2012	11:39:50 PM	SiCl4 post valve closed
12/8/2012	11:39:50 PM	Main Vac valve closed
12/8/2012	11:39:50 PM	Bubbler valve closed
12/8/2012	11:39:50 PM	Bypass valve opened
12/8/2012	11:39:50 PM	Helium MFC set to  0.000000
12/8/2012	11:39:50 PM	H2 MFC set to  0.000000
12/8/2012	11:39:50 PM	BCl3 MFC set to  0.000000
12/8/2012	11:39:50 PM	PH3 MFC set to  0.000000
12/8/2012	11:39:50 PM	SiCl4 MFC set to  0.000000
12/8/2012	11:39:50 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	11:39:50 PM	Tube furnace set to 0
12/8/2012	11:41:06 PM	Helium valve closed
12/8/2012	11:41:06 PM	H2 valve closed
12/8/2012	11:41:06 PM	BCl3 valve closed
12/8/2012	11:41:06 PM	PH3 valve closed
12/8/2012	11:41:06 PM	SiCl4 pre valve closed
12/8/2012	11:41:06 PM	SiCl4 post valve closed
12/8/2012	11:41:06 PM	Main Vac valve closed
12/8/2012	11:41:06 PM	Bubbler valve closed
12/8/2012	11:41:06 PM	Bypass valve opened
12/8/2012	11:41:06 PM	Helium MFC set to  0.000000
12/8/2012	11:41:06 PM	H2 MFC set to  0.000000
12/8/2012	11:41:06 PM	BCl3 MFC set to  0.000000
12/8/2012	11:41:06 PM	PH3 MFC set to  0.000000
12/8/2012	11:41:06 PM	SiCl4 MFC set to  0.000000
12/8/2012	11:41:06 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	11:41:06 PM	Tube furnace set to 0
12/8/2012	11:42:06 PM	Helium valve closed
12/8/2012	11:42:06 PM	H2 valve closed
12/8/2012	11:42:06 PM	BCl3 valve closed
12/8/2012	11:42:06 PM	PH3 valve closed
12/8/2012	11:42:06 PM	SiCl4 pre valve closed
12/8/2012	11:42:06 PM	SiCl4 post valve closed
12/8/2012	11:42:06 PM	Bypass valve closed
12/8/2012	11:42:06 PM	Bubbler valve closed
12/8/2012	11:42:06 PM	Main Vac valve opened
12/8/2012	11:42:06 PM	Helium MFC set to  0.000000
12/8/2012	11:42:06 PM	H2 MFC set to  0.000000
12/8/2012	11:42:06 PM	BCl3 MFC set to  0.000000
12/8/2012	11:42:06 PM	PH3 MFC set to  0.000000
12/8/2012	11:42:06 PM	SiCl4 MFC set to  0.000000
12/8/2012	11:42:06 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	11:42:06 PM	Tube furnace set to 0
12/8/2012	11:42:07 PM	Run finished at 11:42 PM
12/8/2012	11:42:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2012	11:43:38 PM	Recipe started at 11:43 PM
12/8/2012	11:43:38 PM	Helium valve closed
12/8/2012	11:43:38 PM	H2 valve closed
12/8/2012	11:43:38 PM	BCl3 valve closed
12/8/2012	11:43:38 PM	PH3 valve closed
12/8/2012	11:43:38 PM	SiCl4 pre valve closed
12/8/2012	11:43:38 PM	SiCl4 post valve closed
12/8/2012	11:43:38 PM	Bypass valve closed
12/8/2012	11:43:38 PM	Bubbler valve closed
12/8/2012	11:43:38 PM	Main Vac valve opened
12/8/2012	11:43:38 PM	Helium MFC set to  0.000000
12/8/2012	11:43:38 PM	H2 MFC set to  0.000000
12/8/2012	11:43:38 PM	BCl3 MFC set to  0.000000
12/8/2012	11:43:38 PM	PH3 MFC set to  0.000000
12/8/2012	11:43:38 PM	SiCl4 MFC set to  0.000000
12/8/2012	11:43:38 PM	Bypass solenoid MFC set to  0.000000
12/8/2012	11:43:38 PM	Tube furnace set to 150
